公开(公告)号：EP4344619A1

公开(公告)日：2024-04-03

申请号：EP22198679.7

申请日：2022-09-29

申请人： SCHOTT AG ,  Schott Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti ,  OTT, Christian

IPC分类号： A61B5/00 ,  H01L21/50 ,  H01L23/10 ,  A61F2/01 ,  B01D61/18 ,  B01D63/00 ,  B01D63/08 ,  A61B5/0215 ,  A61B5/145 ,  G01N27/327 ,  G01N33/487 ,  B23K26/03

摘要： An enclosure is shown, comprising at least a first substrate and a second substrate, wherein the first substrate is transparent at least in part and/or at least for a wavelength bandwidth, at least one common laser weld zone wherein material of the first and second substrates is mixed, wherein the laser weld zone is designed such to permanently join the first substrate to the second substrate and/or to provide for a hermetic sealing between the first substrate and the second substrate, at least one function zone, for example comprising a cavity, enclosed inside the enclosure, and at least one fluid channel allowing for a fluid flow between said function zone and an outside.

公开(公告)号：EP4241301A2

公开(公告)日：2023-09-13

申请号：EP21810304.2

申请日：2021-11-08

申请人： SCHOTT AG ,  Schott Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti ,  KUNISCH, Clemens ,  CORVERS, Stephan ,  HOPPE, Bernd ,  HERRMANN, Jens

IPC分类号： H01L21/50 ,  H01L23/10 ,  B23K26/0622

公开(公告)号：EP4424651A1

公开(公告)日：2024-09-04

申请号：EP23159639.6

申请日：2023-03-02

申请人： SCHOTT AG ,  Schott Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti ,  DAMM, Thorsten

IPC分类号： C03C17/06 ,  B23K26/00 ,  C03B23/20 ,  C03C17/22 ,  C03C17/23 ,  C03C17/34 ,  C03C23/00 ,  C03C27/00

CPC分类号： B23K26/00 ,  C03C23/0025 ,  C03B23/20 ,  C03C27/00 ,  C03C17/23 ,  C03C17/225 ,  C03C17/06 ,  C03C17/3417 ,  C03C2217/73420130101 ,  C03C2218/3220130101

摘要： An arrangement (1) is provided comprising a first substrate (10), which is transparent in a defined wavelength range, and a second substrate (20) arranged next to the first substrate (10), wherein the first substrate (10) and/or the second substrate (20) have a coating (12, 22) formed on the side facing to-wards an interface between the first substrate (10) and the second substrate (20) and a first laser treated zone (50) comprising weld lines (100), wherein in the first laser treated zone (50) material of the first substrate (10) and second substrate (20) has been melted and mixed to bond the two substrates (10, 20) together. The coating (12, 22) of the first substrate (10) and/or second substrate (20) has, before laser treatment, an absorption for light within the defined wavelength range of less than 10%.
Further aspects of the invention relate to a method for manufacturing such an arrangement and the use of such an arrangement.

公开(公告)号：EP4393869A1

公开(公告)日：2024-07-03

申请号：EP22216975.7

申请日：2022-12-28

申请人： SCHOTT AG ,  SCHOTT Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti ,  POLOJÄRVI, Ville ,  LAHTINEN, Ossi

IPC分类号： B81B7/00 ,  B81C1/00 ,  B23K26/20

CPC分类号： B81C1/00357 ,  C03B23/245 ,  B23K26/20 ,  B81C2203/011820130101 ,  B81C1/00904

摘要： The invention relates to a method for welding substrates comprising: bringing a first substrate and a second substrate in contact with each other such that a contact area between the two substrates is formed; introducing at least two outer weld lines extending next to each other within the contact area into the first and second substrates such that the first and second substrates are welded together by each of the outer weld lines and such that a dicing area is defined between the two outer weld lines; and introducing one or more inner weld lines extending between the two outer weld lines within the dicing area into at least one of the two substrates. The invention further relates to welded substrates and to singulated chips, in particular hermetically sealed enclosures.

公开(公告)号：EP4241300A1

公开(公告)日：2023-09-13

申请号：EP21806207.3

申请日：2021-11-04

申请人： SCHOTT AG ,  Schott Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti ,  ROKKA, Petri

IPC分类号： H01L21/50 ,  H01L23/10 ,  B23K26/03 ,  B23K26/28 ,  B23K26/324 ,  B23K31/12

公开(公告)号：EP4048643A1

公开(公告)日：2022-08-31

申请号：EP20792431.7

申请日：2020-10-20

申请人： Schott Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti

IPC分类号： C03B23/24 ,  B23K26/20 ,  B23K26/244 ,  B23K26/324 ,  B23K26/0622 ,  B23K26/22 ,  B23K101/18 ,  B23K103/00 ,  B23K101/36

公开(公告)号：EP3634686A1

公开(公告)日：2020-04-15

申请号：EP18801810.5

申请日：2018-05-17

申请人： Schott Primoceler Oy

发明人： MÄÄTTÄNEN, Antti ,  TOLPPA, Juha

IPC分类号： B23K26/00 ,  B23K26/12 ,  B23K26/24 ,  B23K37/00

公开(公告)号：EP3812352A1

公开(公告)日：2021-04-28

申请号：EP19205115.9

申请日：2019-10-24

申请人： Schott Primoceler Oy

发明人： THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti

IPC分类号： C03B23/24 ,  B23K26/20 ,  B23K26/244 ,  B23K26/324

摘要： An enclosure is shown, comprising at least a base substrate and a cover substrate, which constitute at least a part of the enclosure, and a function zone situated such that it is circumferentially enclosed in the enclosure. At least the cover substrate comprises preferably a glass or glass-like material. The base substrate and the cover substrate are hermetically welded by means of at least one laser weld line, where the laser weld line comprises a height HL in a direction perpendicular to its connecting plane, and wherein the mechanical stress in the at least one laser weld line is reduced, thus improving the mechanical stability of the enclosure.

公开(公告)号：EP4034493A1

公开(公告)日：2022-08-03

申请号：EP20788721.7

申请日：2020-09-25

申请人： SCHOTT AG

发明人： HETTLER, Robert ,  THOMAS, Jens Ulrich ,  MÄÄTTÄNEN, Antti ,  HERZBERG, Jochen ,  ONEZAWA, Yutaka ,  ZETTERER, Thomas

IPC分类号： B81C1/00 ,  B81B3/00 ,  B23K26/20 ,  B23K26/324

公开(公告)号：EP3999467A1

公开(公告)日：2022-05-25

申请号：EP20750184.2

申请日：2020-07-16

申请人： SCHOTT AG

发明人： THOMAS, Jens Ulrich ,  ZETTERER, Thomas ,  MÄÄTTÄNEN, Antti ,  HETTLER, Robert ,  ONEZAWA, Yutaka

IPC分类号： B81B7/00 ,  B81C1/00