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公开(公告)号：EP0462391A3
公开(公告)日：1992-01-22
申请号：EP91107484.7
申请日：1991-05-08
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W. , Canistro, Dianne , McIlnay, Susan E.
CPC classification number: G03F7/0295 , G03F7/038
Abstract: The invention is for a negative-acting, acid hardenable, deep UV photoresist comprising a phenolic resin having ring bonded hydroxyl sites, a thermally activated crosslinking agent that is an etherified aminoplast and a photoacid generator. The invention is characterized by control of the molar ratio of the ring bonded hydroxyl groups of the phenolic resin to the ether groups of the aminoplast which permits optimization of the properties such as optical absorbance, dissolution rate, photospeed, contrast, resolution and sidewall angle.
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公开(公告)号：EP0763781B2
公开(公告)日：2008-03-12
申请号：EP96116990.1
申请日：1992-10-22
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W.
IPC: G03F7/09
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公开(公告)号：EP0401499A1
公开(公告)日：1990-12-12
申请号：EP90107478.1
申请日：1990-04-19
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W. , Sinta, Roger,
CPC classification number: G03F7/0295 , G03F7/0233 , G03F7/038 , Y10S430/106 , Y10S430/11
Abstract: A photoresist that utilizes a copolymer of a phenol and a cyclic alcohol having increased optical transmission properties relative to photoresists using fully aromatic phenolic resins. Preferred binders are hydrogenated novolak resins and hydrogenated polyvinyl phenol resins.
Abstract translation: 使用完全芳族酚醛树脂相对于光致抗蚀剂，利用酚和环醇的共聚物的光致抗蚀剂具有增强的光学透射性能。 优选的粘合剂是氢化酚醛清漆树脂和氢化聚乙烯基苯酚树脂。
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公开(公告)号：EP0763781A3
公开(公告)日：1997-07-16
申请号：EP96116990.1
申请日：1992-10-22
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W.
IPC: G03F7/09
Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Abstract translation: 用于减少光致抗蚀剂的曝光辐射反射的防光晕组合物和方法在所述组合物上涂覆。 本发明的防光晕组合物包含树脂粘合剂和能够引起树脂粘合剂的热诱导交联反应的材料。
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公开(公告)号：EP0763781A2
公开(公告)日：1997-03-19
申请号：EP96116990.1
申请日：1992-10-22
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W.
IPC: G03F7/09
Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Abstract translation: 用于减少光致抗蚀剂外涂层的曝光辐射的反射的抗晕化组合物和方法。 本发明的防光组合物包括树脂粘合剂和能够引起树脂粘合剂的热诱导交联反应的材料。
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Patent Agency Ranking6.发明授权Substrate coated with antihalation composition and method for treating said substrate 失效具有抗反射涂布的基材组合物和方法，用于这种衬底的治疗。
公开(公告)号：EP0542008B2
公开(公告)日：2001-02-28
申请号：EP92118070.9
申请日：1992-10-22
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W.
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公开(公告)号：EP0401499B1
公开(公告)日：1995-12-13
申请号：EP90107478.1
申请日：1990-04-19
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W. , Sinta, Roger,
CPC classification number: G03F7/0295 , G03F7/0233 , G03F7/038 , Y10S430/106 , Y10S430/11
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公开(公告)号：EP0542008A1
公开(公告)日：1993-05-19
申请号：EP92118070.9
申请日：1992-10-22
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W.
Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Abstract translation: 用于减少光致抗蚀剂外涂层的曝光辐射的反射的抗晕化组合物和方法。 本发明的防光组合物包括树脂粘合剂和能够引起树脂粘合剂的热诱导交联反应的材料。
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公开(公告)号：EP0763781B1
公开(公告)日：2002-03-06
申请号：EP96116990.1
申请日：1992-10-22
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W.
IPC: G03F7/09
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公开(公告)号：EP0462391B1
公开(公告)日：1999-10-06
申请号：EP91107484.7
申请日：1991-05-08
Applicant: SHIPLEY COMPANY INC.
Inventor： Thackeray, James W. , Orsula, George W. , Canistro, Dianne , McIlnay, Susan E.
CPC classification number: G03F7/0295 , G03F7/038
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