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公开(公告)号:EP2257986A4
公开(公告)日:2012-06-13
申请号:EP09716687
申请日:2009-03-02
申请人: SOLEXANT CORP
发明人: REDDY DAMODER , LEIDHOLM CRAIG
CPC分类号: C23C14/34 , C23C14/0629 , C23C14/562 , C23C14/5806 , H01L21/67173 , H01L31/028 , H01L31/0296 , H01L31/0322 , H01L31/03682 , H01L31/03685 , H01L31/03687 , H01L31/03762 , H01L31/046 , Y02E10/541 , Y02P70/521