公开(公告)号：EP3152788A4

公开(公告)日：2018-02-28

申请号：EP15807428

申请日：2015-06-09

Applicant: STC UNM

Inventor： BRUECK STEVEN R J ,  NEUMANN ALEXANDER ,  ZARKESH-HA PAYMAN

IPC: G01J1/02 ,  F21S2/00 ,  G01J3/02 ,  G01J3/18 ,  H01L33/48 ,  H01L33/58

CPC classification number: G01J1/06 ,  G01J1/44 ,  G01J3/0218 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/1895 ,  G01J3/2803 ,  G01J2001/448 ,  G02B6/10 ,  G02B6/12004 ,  G02B6/122 ,  G02B6/124 ,  H01L27/1446 ,  H01L31/02019 ,  H01L31/02164 ,  H01L31/02327 ,  H01L31/103

Abstract: A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.