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1.发明公开OSCILLATING STRUCTURE WITH PIEZOELECTRIC ACTUATION, SYSTEM AND MANUFACTURING METHOD 审中-公开压电驱动的振荡结构，系统和制造方法
公开(公告)号：EP3276391A1
公开(公告)日：2018-01-31
申请号：EP17162612.0
申请日：2017-03-23
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , G03B21/008 , H01L41/053 , H01L41/332
摘要： An oscillating structure (30) with piezoelectric actuation, comprising: a first torsional elastic element (56) and a second torsional elastic element (58) constrained to respective portions of a fixed supporting body (40) and defining an axis of rotation (O); a mobile element (55, 57, 60) set between, and connected to, the first and second torsional elastic elements (56, 58), the mobile element being rotatable about the axis of rotation (O) as a consequence of a torsion of the first and second deformable elements; and a first control region (66), which is coupled to the mobile element (55, 57, 60) and houses a first piezoelectric actuator (70) configured to cause, in use, a local deformation of the first control region (66) that generates a torsion of the first and second torsional elastic elements (56, 58).
摘要翻译： 1。一种具有压电致动的摆动结构（30），包括：第一扭转弹性元件（56）和第二扭转弹性元件（58），所述第一扭转弹性元件和第二扭转弹性元件被约束至固定支撑体（40）的相应部分并限定旋转轴线（O） ; 设置在所述第一和第二扭转弹性元件（56,58）之间并连接到所述第一和第二扭转弹性元件（56,58）之间的可移动元件（55,57,60），所述可移动元件能够围绕所述旋转轴线（O）旋转，作为 第一和第二可变形元件; 和第一控制区域（66），所述第一控制区域联接到所述可移动元件（55,57,60）并容纳第一压电致动器（70），所述第一压电致动器（70）被配置为在使用时导致所述第一控制区域（66） 产生第一和第二扭转弹性元件（56,58）的扭转。
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公开(公告)号：EP4310573A1
公开(公告)日：2024-01-24
申请号：EP23183016.7
申请日：2023-07-03
发明人： MERLI, Massimiliano , CARMINATI, Roberto , BONI, Nicolò , COSTANTINI, Sonia , PRELINI, Carlo Luigi
IPC分类号： G02B26/08
摘要： Micro-electro-mechanical mirror device (1) having a fixed structure (2) defining an external frame (2') which delimits a cavity (3); a tiltable structure (4) extending into the cavity; a reflecting surface (4') carried by the tiltable structure and having a main extension in a horizontal plane (XY); an actuation structure (10), coupled between the tiltable structure (4) and the fixed structure (2). The actuation structure (10) is formed by at least one first pair of actuation arms (12A, 12B) configured to cause the rotation of the tiltable structure (2) around a first rotation axis (SA) parallel to the horizontal plane (XY). The actuation arms of the first pair of actuation arms (12A, 12B) are elastically coupled to the tiltable structure (4) through respective coupling elastic elements (14A, 14B) and are each formed by a bearing structure (15) and by a piezoelectric structure (13). The bearing structure (15) of each actuation arm of the first pair of actuation arms (12A, 12B) is formed by a soft region (56) of a first material and the coupling elastic elements (14A, 14B) are formed by a bearing layer (103) of a second material, the second material having greater stiffness than the first material.
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3.发明公开
公开(公告)号：EP3974890A1
公开(公告)日：2022-03-30
申请号：EP21199380.3
申请日：2021-09-28
摘要： A microelectromechanical device (10) has: a fixed structure (14) having a frame (14') defining a cavity (13); a tiltable structure (12) elastically suspended above the cavity with main extension in a horizontal plane (xy); a piezoelectrically driven actuation structure (22), which can be biased to cause a desired rotation of the tiltable structure about a first rotation axis (Al) and a second rotation axis (A2); and a supporting structure (15) integral with the fixed structure and extending in the cavity starting from the frame. Lever elements (16) are elastically coupled to the tiltable structure at a first end by respective elastic suspension elements (18) and to the supporting structure at a second end by elastic connecting elements (20), of a torsional type, which define a lever rotation axis (L); the lever elements are elastically coupled to the actuation structure so that their biasing causes, as a result of their rotation about the lever rotation axis, the desired rotation of the tiltable structure about the first and second rotation axes.
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4.发明公开
公开(公告)号：EP3715317A1
公开(公告)日：2020-09-30
申请号：EP20166471.1
申请日：2020-03-27
摘要： A MEMS device (20) formed in a die of semiconductor material (24) defining a cavity (23) and having an anchorage portion (24'); a tiltable structure (22) elastically suspended over the cavity (23) and having a main extension in a horizontal plane (XY); a first and a second supporting arm (25A, 25B), extending between the anchorage portion and opposite sides of the tiltable structure; and a first and a second resonant piezoelectric actuation structure (30A1, 30A2), intended to be biased and cause rotation of the tiltable structure (22) about a rotation axis (A). The first supporting arm is formed by a first and a second torsion spring (27A, 28A), which are rigid to movements out of the horizontal plane (XY) and compliant to torsion about the rotation axis and are coupled together at a constraint region (29A). The first and the second resonant piezoelectric actuation structures (38A1, 38A2) extend between the anchorage portion and the constraint region (29A), on a first and a second side, respectively, of the first supporting arm (25A).
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5.发明公开
公开(公告)号：EP3712676A1
公开(公告)日：2020-09-23
申请号：EP20159965.1
申请日：2020-02-28
摘要： A microelectromechanical structure (10) has: a body of semiconductor material having a fixed frame (11) internally defining a cavity (12); a mobile mass (14) elastically suspended in the cavity and movable with a first resonant movement of rotation about a first rotation axis (R1) and with a second resonant movement of rotation about a second rotation axis (R2), orthogonal to the first rotation axis (R1); a first (16a, 16b) and a second pair (16c, 16d) of supporting elements, which extend in a cantilever fashion in the cavity, are rigidly coupled to the frame, and can be deformed by piezoelectric effect to cause rotation of the mobile mass about the first rotation axis and the second rotation axis; and a first (30a, 30b) and a second (30c, 30d) pair of elastic-coupling elements, elastically coupled between the mobile mass and the first and the second pairs of supporting elements; the first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and the second pairs.
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6.发明公开
公开(公告)号：EP4082962A1
公开(公告)日：2022-11-02
申请号：EP22169585.1
申请日：2022-04-22
摘要： A microelectromechanical mirror device (1) is provided with: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting surface (2'), elastically suspended above the cavity and having a main extension in a horizontal plane (xy); a first pair of driving arms (12a, 12b), carrying respective piezoelectric material regions (13) designed to be biased to cause a rotation of the tiltable structure around at least one first rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane, elastically coupled to the tiltable structure; and elastic suspension elements (6a, 6b), which couple the tiltable structure to the fixed structure at the first rotation axis, stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, extending between the tiltable structure and the fixed structure. The elastic suspension elements comprise a first and a second elastic suspension element, wherein a first torsional stiffness of the first elastic suspension element is different from a second torsional stiffness of the second elastic suspension element.
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7.发明授权
公开(公告)号：EP3178783B1
公开(公告)日：2019-01-23
申请号：EP16175301.7
申请日：2016-06-20
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8.发明公开
公开(公告)号：EP4261592A9
公开(公告)日：2024-01-10
申请号：EP23164580.5
申请日：2023-03-28
发明人： BONI, Nicolo' , CARMINATI, Roberto , MERLI, Massimiliano , PRELINI, Carlo Luigi , AFIFI AFIFI, Tarek
IPC分类号： G02B26/08
摘要： A microelectromechanical mirror device (20) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity (3) and having a main extension in a horizontal plane (xy); at least one first pair of driving arms (12a, 12b), carrying respective piezoelectric structures (13) which can be biased to generate a driving force such as to cause a rotation of the tiltable structure (2) about a rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane; elastic suspension elements (6a, 6b), which elastically couple the tiltable structure (2) to the fixed structure (4) at the rotation axis (X) and are rigid to movements out of the horizontal plane (xy) and compliant to torsion about the rotation axis (X). In particular, the driving arms (12a, 12b) of the first pair are magnetically coupled to the tiltable structure (2) so as to cause its rotation about the rotation axis (X) by magnetic interaction, following biasing of the respective piezoelectric structures (13) .
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9.发明公开
公开(公告)号：EP4261592A1
公开(公告)日：2023-10-18
申请号：EP23164580.5
申请日：2023-03-28
发明人： BONI, Nicolo' , CARMINATI, Roberto , MERLI, Massimiliano , PRELINI, Carlo Luigi , AFIFI AFIFI, Tarek
IPC分类号： G02B26/08
摘要： A microelectromechanical mirror device (20) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity (3) and having a main extension in a horizontal plane (xy); at least one first pair of driving arms (12a, 12b), carrying respective piezoelectric structures (13) which can be biased to generate a driving force such as to cause a rotation of the tiltable structure (2) about a rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane; elastic suspension elements (6a, 6b), which elastically couple the tiltable structure (2) to the fixed structure (4) at the rotation axis (X) and are rigid to movements out of the horizontal plane (xy) and compliant to torsion about the rotation axis (X). In particular, the driving arms (12a, 12b) of the first pair are magnetically coupled to the tiltable structure (2) so as to cause its rotation about the rotation axis (X) by magnetic interaction, following biasing of the respective piezoelectric structures (13) .
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10.发明公开
公开(公告)号：EP3936907A1
公开(公告)日：2022-01-12
申请号：EP21184894.0
申请日：2021-07-09
摘要： The MEMS micromirror device (20) is formed in a package (24) including a containment body (22) and a lid (26) transparent to a light radiation. The package forms a cavity (23) housing a tiltable platform (21) having a reflecting surface (21A). A metastructure (30-32) is formed on the lid (26) and/or on the reflecting surface (21A) and comprises a plurality of diffractive optical elements (35).
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