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    INERTIAL MEASUREMENT CIRCUIT, CORRESPONDING DEVICE AND METHOD
    1.
    发明公开
    INERTIAL MEASUREMENT CIRCUIT, CORRESPONDING DEVICE AND METHOD 审中-公开

    公开(公告)号：EP4098973A1

    公开(公告)日：2022-12-07

    申请号：EP22174570.6

    申请日：2022-05-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： LANGFELDER, Giacomo ,  GAFFURI PAGANI, Leonardo ,  GUERINONI, Luca ,  FALORNI, Luca Giuseppe ,  FEDELI, Patrick ,  CARULLI, Paola

    IPC: G01C19/5776

    Abstract: A circuit (10) comprises an inertial measurement unit such as a MEMS gyroscope (12) configured to be oscillated via a driving signal ( D + , D - , Dsq ) produced by driving circuitry (14A, 14B, 16, 18, 20A, 20B, 22, 24, 26, 28, 30, 32) and a lock-in amplifier, LIA (38) receiving a sensing signal ( S + , S - , Ssq ) from the inertial measurement unit (12) as well as a reference demodulation signal which is a function of the driving signal ( D + , D - , Dsq ). The LIA amplifier (38) is configured to produce an inertial measurement signal ( Vout ) based on the sensing signal ( S + , S - , Ssq ) from the inertial measurement unit (12) and the reference demodulation signal, wherein the reference demodulation signal is affected by a variable phase error. Phase meter circuitry (40) configured to receive the driving signal ( D + , D - , Dsq ) and the sensing signal ( S + , S - , Ssq ) produces, as a function of the phase difference ( ΔΦds ) between the driving signal ( D + , D - , Dsq ) and the sensing signal ( S + , S - , Ssq ), a phase correction signal. The phase correction signal is applied (56) to the reference demodulation signal of the lock-in amplifier (38). In response to the phase correction signal being applied (56) to the reference demodulation signal of the lock-in amplifier (38) the phase error is maintained in the in the vicinity of a reference value ( Φer0 ), thus minimizing the effects of the variation of the phase error.

    FM INERTIAL SENSOR AND METHOD FOR OPERATING THE FM INERTIAL SENSOR
    2.
    发明公开
    FM INERTIAL SENSOR AND METHOD FOR OPERATING THE FM INERTIAL SENSOR 审中-公开

    公开(公告)号：EP3450992A1

    公开(公告)日：2019-03-06

    申请号：EP18188857.9

    申请日：2018-08-14

    Applicant: STMicroelectronics S.r.l.

    Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

    IPC: G01P15/097 ,  G01P15/18

    Abstract: An inertial sensor (1) for sensing an external acceleration, comprising: a first and a second proof mass (6, 8); a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly (14a, 14b, 18a, 18b) configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit (49, 51) configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly (16a, 16b, 20a, 20b, 40), configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.

    ENERGY RECOVERY DRIVER FOR PZT ACTUATORS
    3.
    发明公开
    ENERGY RECOVERY DRIVER FOR PZT ACTUATORS 审中-公开

    公开(公告)号：EP4326038A1

    公开(公告)日：2024-02-21

    申请号：EP23188320.8

    申请日：2023-07-28

    Applicant: STMicroelectronics S.r.l.

    Inventor： ZAMPROGNO, Marco ,  FURCERI, Raffaele Enrico ,  GIANOLLO, Matteo ,  LANGFELDER, Giacomo

    IPC: H10N30/80

    Abstract: A differential piezoelectric actuator-system (10) includes an inductor (L) and driver-circuit (11, 12) having switches (S1-S6) for transferring energy between first and second actuators (PZT1, PZT2) and the inductor, and between a voltage-supply node (Vbatt) and the inductor. Control circuitry (21) determines whether a next phase in which to operate the driver-circuit is a first charging-phase or a first recovery-phase. The first charging-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the voltage supply node to the inductor; and a third sub-phase to transfer energy from the inductor to the second actuator. The first recovery-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the inductor to the voltage supply node; and a third sub-phase to transfer energy from the inductor to the second actuator.

    MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION
    5.
    发明公开
    MEMS TRIAXIAL MAGNETIC SENSOR WITH IMPROVED CONFIGURATION 审中-公开

    公开(公告)号：EP3346281A1

    公开(公告)日：2018-07-11

    申请号：EP17172105.3

    申请日：2017-05-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

    IPC: G01R33/00

    CPC classification number: G01R33/0206 ,  G01R33/0023 ,  G01R33/0286 ,  G01R33/038

    Abstract: A MEMS triaxial magnetic sensor device (51) is provided with a sensing structure (2) having: a substrate (6); an outer frame (4), which internally defines a window (5) and is elastically coupled to first anchorages (7) fixed with respect to the substrate by means of first elastic elements (8); a mobile structure (10) arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements (12) and carries a conductive path (P) for flow of an electric current (I); and an elastic arrangement (22, 24) operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and of the arrangement of elastic elements, a first sensing movement in response to Lorentz forces originating from a first magnetic-field component (B x ), a second sensing movement in response to Lorentz forces originating from a second magnetic-field component (B y ), and a third sensing movement in response to Lorentz forces originating from a third magnetic-field component (B z ); the first, second, and third sensing movements are distinct and decoupled from one another.

    CLOSED-LOOP POSITION CONTROL OF MEMS MICROMIRRORS
    9.
    发明公开
    CLOSED-LOOP POSITION CONTROL OF MEMS MICROMIRRORS 审中-公开

    公开(公告)号：EP4009312A1

    公开(公告)日：2022-06-08

    申请号：EP21208720.9

    申请日：2021-11-17

    Applicant: STMicroelectronics S.r.l.

    Inventor： FRIGERIO, Paolo ,  LANGFELDER, Giacomo ,  MOLINARI, Luca ,  MAIOCCHI, Giuseppe ,  BARBIERI, Andrea

    IPC: G09G3/02 ,  G02B26/08 ,  H04N9/31

    Abstract: Disclosed herein is a control system (10) for a projection system (17), including a first subtractor (12) receiving an input drive signal (INPUT) and a feedback signal (FBK) and generating a first difference signal (DIFF1) therefrom, the feedback signal being indicative of position of a quasi-static micromirror (19b) of the projection system. A type-2 compensator (15a) receives the first difference signal (DIFF1) and generates therefrom a first output signal (OUT1). A derivative based controller (15b) receives the feedback signal (FBK) and generates therefrom a second output signal (OUT2) . A second subtractor (16) receives the first (OUT1) and second (OUT2) output signals and generates a second difference signal (DIFF2) therefrom. The second difference signal serves to control a mirror driver (19a) of the projection system. A higher order resonance equalization circuit (20) receives a pre-output signal from an analog front end (19c) of the projection system that is indicative of position of the quasi-static micromirror (19b), and generates the feedback signal (FBK) therefrom.

    MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS
    10.
    发明公开
    MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS 审中-公开

    公开(公告)号：EP3477852A1

    公开(公告)日：2019-05-01

    申请号：EP18203883.6

    申请日：2018-10-31

    Applicant: STMicroelectronics S.r.l.

    Inventor： VALZASINA, Carlo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  LANGFELDER, Giacomo

    IPC: H03B5/04 ,  H03B5/30 ,  H03L1/02 ,  G01R23/09 ,  H03H3/00

    Abstract: A MEMS resonator system (20) has a micromechanical resonant structure (22) and an electronic processing circuit (24), which has: a first resonant loop (24a), which excites a first vibrational mode of the structure and generates a first signal (S(f ΔT,1 )) at a first resonance frequency (f ΔT,1 ); and a compensation module (32), which compensates, as a function of a measurement of temperature variation (ΔT), a first variation (Δf 1 ) of the first resonance frequency caused by the temperature variation so as to generate a clock signal (CLK) at a desired frequency that is stable in regard to temperature. The electronic processing circuit further has: a second resonant loop (24b), which excites a second vibrational mode of the structure and generates a second signal (S(f ΔT,2 )) at a second resonance frequency (f ΔT,2 ); and a temperature-sensing module (30), which receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and of a second variation (Δf 2 ) of the second resonance frequency caused by the same temperature variation.

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