公开(公告)号：EP4092475A1

公开(公告)日：2022-11-23

申请号：EP22171657.4

申请日：2022-05-04

申请人： STMicroelectronics S.r.l.

发明人： BONI, Nicolò ,  MENDICINO, Gianluca ,  DUQI, Enri ,  CARMINATI, Roberto ,  MERLI, Massimiliano

IPC分类号： G02B26/08

摘要： A microelectromechanical mirror device (1; 100) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity; at least a first pair of driving arms (12a, 12b), coupled to the tiltable structure and carrying respective piezoelectric material regions (13) which may be biased to cause a rotation thereof around at least one rotation axis; elastic suspension elements (6a, 6b), which couple the tiltable structure elastically to the fixed structure, being stiff with respect to movements out of the horizontal plane and yielding with respect to torsion; and a piezoresistive sensor (20), configured to provide a detection signal (S r ) indicative of the rotation of the tiltable structure. At least one test structure (30, 30') is integrated in the die to provide a calibration signal (S c ) indicative of a sensitivity variation of the piezoresistive sensor (20), in order to calibrate the detection signal (S r ).