公开(公告)号：EP3174089A4

公开(公告)日：2017-11-15

申请号：EP15824999

申请日：2015-07-08

申请人： SUMITOMO CHEMICAL CO

发明人： FUJIKURA HAJIME ,  KONNO TAICHIRO ,  NONAKA TAKEHIRO ,  NUMATA TAKAYUKI

IPC分类号： H01L21/677 ,  B65G49/07 ,  C23C16/44 ,  C23C16/46 ,  H01L21/205 ,  H01L21/67

CPC分类号： C23C16/46 ,  C23C16/44 ,  H01L21/205 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/67706 ,  H01L21/67739 ,  H01L21/6776

摘要： Techniques are provided to improve the quality of the thin films deposited on substrates. A substrate transporting mechanism is configured to transport a plurality of substrates arranged in a line along a transport path extending in a first container from an entrance to an exit, and to load and unload substrates into and out of a second container in order. The driving units to drive the substrate transporting mechanism are configured to be detachable from the substrate transporting mechanism provided in the first container and are respectively provided in a substrate loading chamber and a substrate unloading chamber.