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1.发明公开SEMICONDUCTOR THIN-FILM MANUFACTURING METHOD, SEMINCONDUCTOR THIN-FILM MANUFACTURING APPARATUS, SUSCEPTOR, AND SUSCEPTOR HOLDING TOOL 审中-公开METHOD FOR半导体薄膜，APPARATUS FOR生产半导体薄膜，基座和SUSZEPTORENWERKZEUG
公开(公告)号：EP2549522A4
公开(公告)日：2013-07-31
申请号：EP11756047
申请日：2011-02-25
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor： SHIOMI HIROMU , SENDA YASUHIKO , ITOH SATOMI , FUJIKAWA KAZUHIRO , SHIMADA SHIGEKI , GENBA JUN , TERAO TAKEMI , FURUSHO MASARU
IPC: H01L21/205 , C23C16/455 , C23C16/458 , C23C16/48 , H01L21/02 , H01L29/16 , H01L29/872
CPC classification number: C23C16/4584 , C23C16/45504 , C23C16/4585 , C23C16/481 , H01L21/02378 , H01L21/02529 , H01L21/0262 , H01L21/02658 , H01L29/1608 , H01L29/872
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