Abstract:
A contact probe comprises a tip part to be brought into contact with a surface to be measured, a support part for support and electrical connection, and a spring part for connecting the tip part to the support part. The radius of curvature of the corner on the backside of the tip part in scrubbing while being in press contact is smaller than the corner on the front side. In scrubbing, the insulating film of the surface to be measured can be sufficiently removed while ensuring the electrical connection. Further, the adhering shavings can be reduced when the probe is moved off the surface, and the scratches on the surface can be also reduced. A contact probe of the invention has a predetermined projection and a bottom portion in a recess of the tip part. The projection breaks the insulating film of the curved surface to be measured to ensure the electrical contact. The bottom portion of the recess is brought into contact with the object to be measured, thereby preventing excessive bite of the projection.