IMPROVED COMPOSITE GETTERS
    5.
    发明公开
    IMPROVED COMPOSITE GETTERS 有权
    改进的复合吸尘器

    公开(公告)号:EP2774166A1

    公开(公告)日:2014-09-10

    申请号:EP12784733.3

    申请日:2012-10-25

    IPC分类号: H01J7/18 H01L23/26

    CPC分类号: B01D53/04 H01J7/183

    摘要: The present invention refers to a composite getter system (20) comprising NEG materials (22) coated with a polyimide or polyamide based compound (23).

    摘要翻译: 本发明涉及包含涂有聚酰亚胺或聚酰胺基化合物(23)的NEG材料(22)的复合吸气剂体系(20)。