摘要:
Provided is a method of manufacturing a semiconductor device. The method includes preparing a silicon substrate, forming a buffer layer on the silicon substrate, and forming a nitride semiconductor layer on the buffer layer. The buffer layer includes a first layer, a second layer, and a third layer. The first layer includes Al x In y Ga 1-x-y N (0≤x≤1, 0≤y≤1, 0≤x+y≤1) and has a lattice constant LP1 that is smaller than a lattice constant LP0 of the silicon substrate. The second layer is formed on the first layer, includes Al x In y Ga 1-x-y N (0≤x x In y Ga 1-x-y N (0≤x
摘要:
Crack formation and propagation in a silicon substrate may be reduced by forming a crack reducing portion. The silicon substrate includes a silicon main portion and a silicon edge portion formed around the silicon main portion. The crack reducing portion is formed on the silicon edge portion of the silicon substrate such that directions of crystal faces in the crack reducing portion are randomly oriented.
摘要:
Provided is a method of manufacturing a semiconductor device. The method includes preparing a silicon substrate, forming a buffer layer on the silicon substrate, and forming a nitride semiconductor layer on the buffer layer. The buffer layer includes a first layer, a second layer, and a third layer. The first layer includes Al x In y Ga 1-x-y N (0≤x≤1, 0≤y≤1, 0≤x+y≤1) and has a lattice constant LP1 that is smaller than a lattice constant LP0 of the silicon substrate. The second layer is formed on the first layer, includes Al x In y Ga 1-x-y N (0≤x x In y Ga 1-x-y N (0≤x
摘要:
A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer on the second layer.
摘要:
According to example embodiments, a semiconductor light emitting device (10) includes a first semiconductor layer (13), a pit enlarging layer (14) on the first semiconductor layer (13), an active layer (15) on the pit enlarging layer (14), a hole injection layer (16) on the active layer (15), and a second semiconductor layer (17) on the hole injection layer (16). The first semiconductor layer (13) is doped a first conductive type and includes dislocations (20) therein. An upper surface of the pit enlarging layer (14) and side surfaces of the active layer (15) define pits (30) having sloped surfaces on the dislocations (20). The pits (30) are reverse pyramidal spaces. The hole injection layer (16) is on a top surface of the active layer (15) and the sloped surfaces of the pits (30). The second semiconductor layer (17) is doped a second conductive type that is different than the first conductive type.