Semiconductor buffer structure, semiconductor device including the same, and method of manufacturing semiconductor device using semiconductor buffer structure
    4.
    发明公开
    Semiconductor buffer structure, semiconductor device including the same, and method of manufacturing semiconductor device using semiconductor buffer structure 审中-公开
    半导体缓冲结构,使半导体器件和工艺用于使用所述半导体缓冲结构的半导体器件制造

    公开(公告)号:EP2696365A2

    公开(公告)日:2014-02-12

    申请号:EP13179953.8

    申请日:2013-08-09

    IPC分类号: H01L21/02

    摘要: Provided is a method of manufacturing a semiconductor device. The method includes preparing a silicon substrate, forming a buffer layer on the silicon substrate, and forming a nitride semiconductor layer on the buffer layer. The buffer layer includes a first layer, a second layer, and a third layer. The first layer includes Al x In y Ga 1-x-y N (0≤x≤1, 0≤y≤1, 0≤x+y≤1) and has a lattice constant LP1 that is smaller than a lattice constant LP0 of the silicon substrate. The second layer is formed on the first layer, includes Al x In y Ga 1-x-y N (0≤x x In y Ga 1-x-y N (0≤x

    摘要翻译: 提供了一种制造半导体器件的方法。 该方法包括制备一硅衬底,形成在硅衬底上的缓冲层,和在所述缓冲层上的氮化物半导体层。 该缓冲层包括第一层,第二层和第三层。 所述第一层包含Al X的In y镓1-XY N(0‰¤x‰¤1,0‰¤y‰¤1,0‰¤x+ Y‰¤1),并具有的晶格常数LP1确实是小于 所述硅衬底的晶格常数LP0。 第二层在第一层上形成的,包含Al X的In y镓1-XY N(0‰¤x<1,0‰¤y<1,0‰¤x+ Y <1),并且具有的晶格常数 LP2确实比LP0大于LP1小。 第三层是在第二层上形成的,包含Al X的In y镓1-XY N(0‰¤x<1,0‰¤y<1,0‰¤x+ Y <1),并且具有的晶格常数 LP3确实比LP2小。

    Semiconductor light emitting device including hole injection layer
    7.
    发明公开
    Semiconductor light emitting device including hole injection layer 审中-公开
    Lichtemittierende Halbleitervorrichtung mit Lochinjektionsschicht

    公开(公告)号:EP2843714A1

    公开(公告)日:2015-03-04

    申请号:EP14182021.7

    申请日:2014-08-22

    摘要: According to example embodiments, a semiconductor light emitting device (10) includes a first semiconductor layer (13), a pit enlarging layer (14) on the first semiconductor layer (13), an active layer (15) on the pit enlarging layer (14), a hole injection layer (16) on the active layer (15), and a second semiconductor layer (17) on the hole injection layer (16). The first semiconductor layer (13) is doped a first conductive type and includes dislocations (20) therein. An upper surface of the pit enlarging layer (14) and side surfaces of the active layer (15) define pits (30) having sloped surfaces on the dislocations (20). The pits (30) are reverse pyramidal spaces. The hole injection layer (16) is on a top surface of the active layer (15) and the sloped surfaces of the pits (30). The second semiconductor layer (17) is doped a second conductive type that is different than the first conductive type.

    摘要翻译: 根据示例性实施例,半导体发光器件(10)包括第一半导体层(13),第一半导体层(13)上的凹坑扩大层(14),凹坑放大层上的有源层(15) 14),有源层(15)上的空穴注入层(16)和空穴注入层(16)上的第二半导体层(17)。 第一半导体层(13)掺杂有第一导电类型并且在其中包括位错(20)。 凹坑扩大层(14)的上表面和有源层(15)的侧表面在位错(20)上限定具有倾斜表面的凹坑(30)。 凹坑(30)是反锥形空间。 空穴注入层(16)位于有源层(15)的顶表面和凹坑(30)的倾斜表面上。 第二半导体层(17)掺杂有不同于第一导电类型的第二导电类型。