公开(公告)号：EP1541353A1

公开(公告)日：2005-06-15

申请号：EP03741320.0

申请日：2003-07-10

申请人： Seiko Epson Corporation

发明人： YASOSHIMA, Takashi ,  SHIMADA, Masato ,  MATSUZAWA, Akira

IPC分类号： B41J2/045 ,  B41J2/16

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1606 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Provided is a liquid jet head, a method of manufacturing the same, and a liquid jet apparatus, in which liquid ejecting characteristics can be kept constant for a long period and in which nozzle blockage is prevented. In a liquid jet head including a passage-forming substrate (10) which is made of a single crystal silicon substrate and in which pressure generating chambers (12) communicating with nozzle orifices are formed, and pressure generating elements (300) for causing pressure changes in the pressure generating chambers (12), a protective film (100) which is made of tantalum oxide and has resistance to liquid, is provided at least on the inner wall surfaces of the pressure generating chambers (12).

摘要翻译： 提供一种液体喷射头及其制造方法以及液体喷射装置，其中液体喷射特性可以长期保持恒定，并且防止喷嘴堵塞。 在包括由单晶硅基板制成的通道形成基板（10）的液体喷射头中，其中形成有与喷嘴孔连通的压力产生室（12）和用于引起压力变化的压力产生元件（300） 在压力发生室（12）中，至少在压力发生室（12）的内壁面上设置有由氧化钽制成并具有耐液体性的保护膜（100）。