公开(公告)号：EP1541353A1

公开(公告)日：2005-06-15

申请号：EP03741320.0

申请日：2003-07-10

申请人： Seiko Epson Corporation

发明人： YASOSHIMA, Takashi ,  SHIMADA, Masato ,  MATSUZAWA, Akira

IPC分类号： B41J2/045 ,  B41J2/16

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1606 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Provided is a liquid jet head, a method of manufacturing the same, and a liquid jet apparatus, in which liquid ejecting characteristics can be kept constant for a long period and in which nozzle blockage is prevented. In a liquid jet head including a passage-forming substrate (10) which is made of a single crystal silicon substrate and in which pressure generating chambers (12) communicating with nozzle orifices are formed, and pressure generating elements (300) for causing pressure changes in the pressure generating chambers (12), a protective film (100) which is made of tantalum oxide and has resistance to liquid, is provided at least on the inner wall surfaces of the pressure generating chambers (12).

摘要翻译： 提供一种液体喷射头及其制造方法以及液体喷射装置，其中液体喷射特性可以长期保持恒定，并且防止喷嘴堵塞。 在包括由单晶硅基板制成的通道形成基板（10）的液体喷射头中，其中形成有与喷嘴孔连通的压力产生室（12）和用于引起压力变化的压力产生元件（300） 在压力发生室（12）中，至少在压力发生室（12）的内壁面上设置有由氧化钽制成并具有耐液体性的保护膜（100）。

公开(公告)号：EP1116588B1

公开(公告)日：2010-10-06

申请号：EP00951887.9

申请日：2000-08-04

申请人： Seiko Epson Corporation

发明人： SHIMADA, Masato ,  MATSUZAWA, Akira ,  MIYATA, Yoshinao ,  NISHIWAKI, Tsutomu ,  KAMEI, Hiroyuki

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/1437 ,  B41J2002/14419 ,  B41J2002/14491

摘要： An ink jet recording head in which the rigidity of a partition wall is enhanced, pressure generating chambers can be arranged at high density, and the crosstalk between the pressure generating chambers can be reduced, a method for generating the ink jet recording head, and an ink jet recorder. An ink jet recording head comprising a channel forming substrate (10) having a silicon layer of single crystal silicon in which a pressure generating chamber (15) communicating with a nozzle opening is defined, and a piezoelectric element (300) provided in a region facing the pressure generating chamber (15) through a diaphragm constituting a part of the pressure generating chamber (15) and generating a pressure variation in the pressure generating chamber (15), wherein the pressure generating chamber (15) has an opening in one face side of the channel forming substrate (10) but not through the channel forming substrate (10). At least the bottom face of the inside of the pressure generating chamber (15) facing the one face side is constituted of an anisotropic etching stop face which is a surface subjected to anisotropic etching stopped in mid course and the piezoelectric element (300) composed of a film formed by film formation and lithography is provided on the one face side of the channel forming substrate (10).

公开(公告)号：EP1116588A1

公开(公告)日：2001-07-18

申请号：EP00951887.9

申请日：2000-08-04

申请人： SEIKO EPSON CORPORATION

发明人： SHIMADA, Masato ,  MATSUZAWA, Akira ,  MIYATA, Yoshinao ,  NISHIWAKI, Tsutomu ,  KAMEI, Hiroyuki

IPC分类号： B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14241 ,  B41J2002/1437 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed are an ink-jet recording head, in which the rigidity of the compartment wall is improved, pressure generating chambers can be arranged in a high density, and cross talk between the pressure generating chambers is reduced, and a manufacturing method of the same and an ink-jet recording apparatus.
In an ink-jet recording head comprising: a passage-forming substrate (10) having a silicon layer consisting of single crystal silicon, in which a pressure generating chamber (15) communicating with a nozzle orifice is defined; and a piezoelectric element (300) for generating a pressure change in the pressure generating chamber, the piezoelectric element being provided on a region facing the pressure generating chamber (15) via a vibration plate constituting a part of the pressure generating chamber (15), the pressure generating chamber (15) is formed so as to open to one surface of the passage-forming substrate (10) and not to penetrate therethrough, at least a bottom surface of inner surfaces of the pressure generating chamber (15), which is facing to the one surface, is constituted of an etching stop surface as a surface in which anisotropic etching stops, and the piezoelectric element (300) is provided on the one surface side of the passage-forming substrate (10) by a film formed by film deposition technology and a lithography method.

摘要翻译： 公开了一种喷墨记录头，其中室壁的刚性得到改善，压力发生室可以高密度地布置，并且压力发生室之间的串扰减少，并且其制造方法和 喷墨记录装置。 一种喷墨记录头，包括：具有由单晶硅组成的硅层的通道形成基板，其中限定与喷嘴孔连通的压力产生室; 以及用于在压力发生室产生压力变化的压电元件（300），所述压电元件经由构成所述压力发生室（15）的一部分的振动板设置在面对所述压力发生室（15）的区域上， 压力发生室15形成为在通路形成基板（10）的一个表面开口，而不是贯穿其中，至少压力发生室（15）的内表面的底面 由一个蚀刻停止面作为各向异性蚀刻停止的表面构成，并且压电元件（300）由通道形成基板（10）的一个表面侧上由薄膜形成的薄膜 薄膜沉积技术和光刻方法。