公开(公告)号：EP1163488A1

公开(公告)日：2001-12-19

申请号：EP00921435.4

申请日：2000-03-22

申请人： Sensys Instruments Corporation

发明人： STANKE, Fred, E. ,  WEBER-GRABAU, Michael ,  RUTH, Douglas, E. ,  TONG, Edric, H. ,  CAHILL, James, M., Jr. ,  CARLISLE, Clinton ,  BURKE, Elliot ,  PHAM, Hung

IPC分类号： G01B11/06 ,  H01L21/66 ,  G01N21/88 ,  H01L21/304 ,  C23C16/52

CPC分类号： B24B49/12 ,  G01B11/0625 ,  G01B11/30 ,  G01N21/211 ,  G01N21/9501 ,  H01L21/67 ,  H01L22/12

摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.