摘要:
The invention relates to a self-assembling device formed by engraving in a block of a semi-conductive material, said engraving being carried out in a thickness higher than 10νm. The inventive device comprises the following elements: a driving element (250) sequentially meshing with a toothed driven element (10), an actuator (20) displacing the driving element according to a hysteresis motion in such a way that said driving element (250) meshes with the successive teeth (11, 12, 13) of the driving element (10). The actuator (20) comprises an actuating module (201,202) consisting of at least one fixed comb (225, 226) and a movable comb (235, 236), each comb being provided with a series of fingers. Said movable comb (235, 236) is arranged with respect to the fixed comb (225, 226) in such a way that the fingers thereof and the fingers of the movable comb interlock between each other. Said invention is characterised in that the movable comb (235, 236) is displaceable with respect to the fixed comb (225, 226) in a parallel direction to the fingers thereof when a potential difference is applied between the fixed comb and the movable comb, thereby displacing the driving element (250) in a corresponding direction.
摘要:
The invention concerns an electrostatic microactuator based on SDA ( Scratch Drive Actuators), characterised in that it comprises a large number of associated SDA's and means adapted for applying on the latter an external mechanical prestress providing a superposition of the forces generated by the different SDA's and communicating to an external load the totality of the drive force derived from said SDA's collective performance.
摘要:
The invention relates to a device including: a movable element (1) comprising teeth (11; 11 i , i, 11 i+1 , 11 i+2 ,11 i+3 , 11 i+4 ); a driving element (2) for engaging with the teeth (11; 11 i , 11 i+1 , 11 i+2 ,11 i+3 , 11 i+4 ) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e. a driving phase, during which the driving element (2) is engaged with a tooth (11; 11 i , 11 i+1 , 11 i+2 ,11 i+3 , 11 i+4 ) of the movable element (1), and a return phase without driving, during which the driving element (2) is shifted with respect to the movable element (1); and a first indexing element (4), which includes a first indexing finger (41) to be positioned between two teeth (11; 11 i , 11 i+1 , 11 i+2 ,11 i+3 , 11 i+4 ) of the movable element (1), and which is connected to the actuator element (3) in order to move the driving element (2) and the first indexing finger (41) simultaneously.
摘要:
The invention concerns an element to be driven (10), a driving element (250) designed to be urged into engagement with the element to be driven (10) and an actuating element (200) adapted to move the driving element (250) so that it drives the element to be driven (10) in step-by-step displacement, the driving element (250) and the actuating element (200) being formed by etching in a semiconductor material wafer (21). The invention is characterized in that it comprises elastic prestressing means (212) for maintaining the driving element (250) in contact with the element to be driven (10).