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1.发明公开SCANNING PROBE MICROSCOPY PROBE AND METHOD FOR SCANNING PROBE CONTACT PRINTING 审中-公开探针探针显微镜GRID和接触印刷用探针
公开(公告)号：EP1629507A2
公开(公告)日：2006-03-01
申请号：EP04752235.4
申请日：2004-05-14
发明人： LIU, Chang , ZOU, Jun , WANG, Xuefeng , BULLEN, David , MIRKIN, Chad , ZHANG, Hua
CPC分类号： G01Q70/16 , G01Q70/06 , G01Q80/00 , G03F7/0002 , Y10S977/857 , Y10S977/86 , Y10S977/875 , Y10S977/877
摘要： A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.
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公开(公告)号：EP1560642A2
公开(公告)日：2005-08-10
申请号：EP03776285.3
申请日：2003-10-09
发明人： LIU, Chang , SHAIKH, Kashah , RYU, Kee , GOLUCH, Edgar , FAN, Zhifang , BULLEN, David
IPC分类号： B01F5/06
CPC分类号： B01L3/502738 , B01F7/00291 , B01F13/0059 , B01F13/0827 , B01F2215/0037 , B01L3/502707 , B01L2200/027 , B01L2200/10 , B01L2200/12 , B01L2300/0645 , B01L2300/0874 , B01L2300/0887 , B01L2300/123 , B01L2400/0418 , B01L2400/0475 , B01L2400/0481 , F16K99/0001 , F16K99/0015 , F16K99/0036 , F16K99/0046 , F16K99/0051 , F16K99/0055 , F16K2099/0074 , F16K2099/0076 , F16K2099/008 , F16K2099/0084 , Y10T156/1089 , Y10T436/2575
摘要： A microfluidic system includes one or more functional units (30, 32, 34, 36, 300, 302, 304, 306, 400) or microfluidic chips, configured to perform constituent steps in a process and interconnected to form the system. A multi-layer microfluidic system includes a separate dedicated fluid layer (402) and dedicated electromechanical layer (404) connected via through-holes (410). Electromechanical components (412) are formed on the electromechanical layer.
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