MIKROMECHANISCHES ELEKTROSTATISCHES RELAIS UND VERFAHREN ZU DESSEN HERSTELLUNG
    6.
    发明公开
    MIKROMECHANISCHES ELEKTROSTATISCHES RELAIS UND VERFAHREN ZU DESSEN HERSTELLUNG 失效
    细观静电继电器和方法及其

    公开(公告)号:EP1021815A1

    公开(公告)日:2000-07-26

    申请号:EP98947333.5

    申请日:1998-07-24

    IPC分类号: H01H59/00

    CPC分类号: H01H59/0009 H01H2059/0081

    摘要: The micromechanical relay has a base substrate (81) on which a flexible induction tongue (41) with a moveable contact (8) is structured in such a way that it is elastically curved away from the substrate in non-operational mode. A fixed contact (7) interacting with the moveable contact is arranged on a fixed contact flexible tongue (42) that is also curved away from the base substrate, so that the open ends of both flexible tongues face each other and the moveable contact (8) overlaps the fixed contact. By arranging the contacts on two flexible tongues, a relatively high extra way of contacts is achieved throughout the entire stretched position despite a possible low inductive path using an electrostatic driving system, thereby enabling sufficient contact force to be generated.