TILT CALIBRATION FOR PROBE SYSTEMS
    3.
    发明公开

    公开(公告)号:EP4357793A1

    公开(公告)日:2024-04-24

    申请号:EP23195727.5

    申请日:2023-09-06

    IPC分类号: G01R1/067 G01R31/28 G01B7/305

    摘要: A probing system includes a device-under-test, a probe device, and a die bonder. The device-under-test includes test patterns. The probe device includes tilt angle sensors. The tilt angle sensors include spikes that protrude from the probe device. The die bonder is operational to mount the device-under-test, mount the probe device facing the device-under-test, compress the probe device and the device-under-test together to causes a subset of the spikes to contact the test patterns, measure a number of connections formed between the tilt angle sensors and the test patterns, determine a first offset angle and a second offset angle between the device-under-test and the probe device based on the number of connections, adjust the spherical positioner in one or more rotational axes in response to the first offset angle and the second offset angle to change a parallelism between the device-under-test and the probe device.