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1.发明公开Power system for inductively coupled plasma torch 失效Energieversorgungfüreinen induktiv gekoppelten Plasmabrenner。
公开(公告)号：EP0281157A2
公开(公告)日：1988-09-07
申请号：EP88103403.7
申请日：1988-03-04
发明人： Morrisroe, Peter J.
摘要： An induction plasma system comprises a torch (10) and an induction coil (14). A sample substance is injected into the plasma at an axial position that is adjustable while the plasma is being energized. The plasma-forming gas flows through the induction coil prior to passing through the plasma torch. A piezoelectric crystal (98) is used for initiating the plasma. An osciallator network generates radio frequency power at a first frequency, and an output LC network (206) that includes the induction coil is tuned to a second frequency higher than the first frequency. Means for maintaining constant power to the plasma includes an AC circuit for duty cycling AC power input to a DC power supply in response to a feedback signal relative to the rectified voltage. Thus a change in the rectified voltage effects an inverse change in the duty cycling such as to nullify the change in the rectified voltage.
摘要翻译： 感应等离子体系统包括炬（10）和感应线圈（14）。 将样品物质注入到等离子体通电期间可调节的轴向位置处的等离子体中。 等离子体形成气体在通过等离子体焰炬之前流过感应线圈。 压电晶体（98）用于引发等离子体。 奥斯卡拉尔网络以第一频率产生射频功率，并且将包括感应线圈的输出LC网络（206）调谐到高于第一频率的第二频率。 用于维持等离子体的恒定功率的装置包括响应于相对于整流电压的反馈信号而向DC电源输入的负载循环AC电力的AC电路。 因此，整流电压的变化会造成负载循环的反向变化，从而消除整流电压的变化。
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公开(公告)号：EP0851572A1
公开(公告)日：1998-07-01
申请号：EP97121984.5
申请日：1997-12-12
CPC分类号： H05H1/36 , H03B5/1203 , H03B5/1228 , H03B5/129 , H03B5/1296 , H03B2200/0062 , H03B2200/0098
摘要： In a high frequency oscillator system a series oscillator circuit includes a load coil inductively coupled with a plasma generator. A capacitance is in series with the coil between the drain and source terminals of a transistor. A capacitive or inductive feedback responsive to the oscillation is connected to the gate terminal of the transistor. In another embodiment two sections of a series circuit are connected by the load coil, each section including a separate transistor. A first capacitance is connected between the coil and the first transistor drain, and a second capacitance is connected between the coil and the second transistor drain. A first capacitive feedback is connected between the second section and the first transistor gate, and a second capacitive feedback is connected between the first section and the second transistor gate. For alternative inductive feedback, one feedback is connected between the first section and the first transistor gate, and the other is connected between the second section and the second transistor gate.
摘要翻译： 在高频振荡器系统中，串联振荡器电路包括与等离子体发生器感应耦合的负载线圈。 电容与晶体管的漏极和源极端子之间的线圈串联。 响应于振荡的电容或电感反馈连接到晶体管的栅极端子。 在另一个实施例中，串联电路的两个部分由负载线圈连接，每个部分包括单独的晶体管。 第一电容连接在线圈和第一晶体管漏极之间，第二电容连接在线圈和第二晶体管漏极之间。 第一电容反馈连接在第二部分和第一晶体管栅极之间，第二电容反馈连接在第一部分和第二晶体管栅极之间。 对于替代的电感反馈，一个反馈连接在第一部分和第一晶体管栅极之间，另一个连接在第二部分和第二晶体管栅极之间。
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公开(公告)号：EP0568920A1
公开(公告)日：1993-11-10
申请号：EP93106923.1
申请日：1993-04-28
CPC分类号： H05H1/36
摘要： An inductively coupled plasma generator wherein actual power delivered to the load is measured and used to control output power. Means are provided for detecting generated RF voltage and current and multiplying these together to produce a continuous signal representative of actual RF power. Microprocessor means provides a signal representative of commanded power. These signals are compared to provide an error signal for controlling power delivered by the generator. Generator parameters are further monitored and plasma potential is maintained at zero potential with respect to ground to eliminate damage to the circuitry and instruments connected thereto.
摘要翻译： 一种电感耦合等离子体发生器，其中测量传送到负载的实际功率并用于控制输出功率。 提供了用于检测产生的RF电压和电流并将它们相乘并产生表示实际RF功率的连续信号的装置。 微处理器装置提供代表指令功率的信号。 将这些信号进行比较以提供用于控制由发电机输送的功率的误差信号。 进一步监测发电机参数，并将等离子体电位保持在相对于地面的零电位，以消除与其相连的电路和仪器的损坏。
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公开(公告)号：EP0155496A3
公开(公告)日：1987-09-09
申请号：EP85101457
申请日：1985-02-11
IPC分类号： H05H01/30
摘要： An impedance matching network for continuously and automatically maximizing RF power transfer to a plasma emission torch includes a dual phase detector network. Signals from the detector network control, via a control unit, a variable impedance network.
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公开(公告)号：EP0155496A2
公开(公告)日：1985-09-25
申请号：EP85101457.1
申请日：1985-02-11
IPC分类号： H05H1/30
摘要： An impedance matching network for continuously and automatically maximizing RF power transfer to a plasma emission torch includes a dual phase detector network. Signals from the detector network control, via a control unit, a variable impedance network.
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公开(公告)号：EP0281158A3
公开(公告)日：1989-10-11
申请号：EP88103413.6
申请日：1988-03-04
CPC分类号： H05H1/30 , H05H1/2475
摘要： An induction plasma system comprises a torch (10) and an induction coil (14). A sample substance is injected into the plasma at an axial position that is adjustable while the plasma is being energized. The plasma-forming gas flows through the induction coil prior to passing through the plasma torch. A piezoelectric crystal (98) is used for initiating the plasma. An oscillator network generates radio frequency power at a first frequency, and an output LC network (206) that includes the induction coil is tuned to a second frequency higher than the first frequency. Means for maintaining constant power to the plasma includes an AC circuit for duty cycling AC power input to a DC power supply in response to a feedback signal relative to the rectified voltage. Thus a change in the rectified voltage effects an inverse change in the duty cycling such as to nullify the change in the rectified voltage.
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公开(公告)号：EP0851572B1
公开(公告)日：2002-11-20
申请号：EP97121984.5
申请日：1997-12-12
CPC分类号： H05H1/36 , H03B5/1203 , H03B5/1228 , H03B5/129 , H03B5/1296 , H03B2200/0062 , H03B2200/0098
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公开(公告)号：EP0281158B1
公开(公告)日：1994-01-12
申请号：EP88103413.6
申请日：1988-03-04
CPC分类号： H05H1/30 , H05H1/2475
摘要： An induction plasma system comprises a torch (10) and an induction coil (14). A sample substance is injected into the plasma at an axial position that is adjustable while the plasma is being energized. The plasma-forming gas flows through the induction coil prior to passing through the plasma torch. A piezoelectric crystal (98) is used for initiating the plasma. An oscillator network generates radio frequency power at a first frequency, and an output LC network (206) that includes the induction coil is tuned to a second frequency higher than the first frequency. Means for maintaining constant power to the plasma includes an AC circuit for duty cycling AC power input to a DC power supply in response to a feedback signal relative to the rectified voltage. Thus a change in the rectified voltage effects an inverse change in the duty cycling such as to nullify the change in the rectified voltage.
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