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公开(公告)号:EP2843688A1
公开(公告)日:2015-03-04
申请号:EP13781218.6
申请日:2013-04-24
发明人: WATANABE, Junji , FUJITA, Takashi , IZUMI, Yasuo
IPC分类号: H01L21/301 , B24D3/00 , B24D5/00 , B24D5/12
摘要: An object of the present invention is to provide a dicing blade which does not cause cracking and breaking even in a workpiece formed from a brittle material, and can stably perform cutting process in a ductile mode on the workpiece with high precision. A dicing blade 26 which performs the cutting process on the workpiece is integrally formed of a diamond sintered body 80 which is formed by sintering diamond abrasive grains 82 so as to have a discoid shape, and a content of the diamond abrasive grains 82 of the diamond sintered body 80 is 80 vol% or more. It is preferable that recessed parts which are formed on a surface of the diamond sintered body 80 are continuously provided in an outer circumferential part of the dicing blade 26 along a circumferential direction.
摘要翻译: 本发明的目的是提供一种即使在由脆性材料形成的工件中也不会产生开裂和断裂的切割刀片,并且能够以高精度在工件上以延展性方式稳定地进行切割加工。 对工件进行切割处理的切割刀片26由金刚石烧结体80一体地形成,金刚石烧结体80通过烧结金刚石磨粒82形成为圆盘状,并且金刚石的金刚石磨粒82的含量 烧结体80为80体积%以上。 优选地,形成在金刚石烧结体80的表面上的凹部沿圆周方向连续地设置在切割刀26的外周部。
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公开(公告)号:EP2843688B1
公开(公告)日:2019-01-16
申请号:EP13781218.6
申请日:2013-04-24
发明人: WATANABE, Junji , FUJITA, Takashi , IZUMI, Yasuo
IPC分类号: H01L21/301 , B24D3/00 , B24D5/12
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公开(公告)号:EP2879164B1
公开(公告)日:2017-09-13
申请号:EP13803775.9
申请日:2013-06-14
发明人: WATANABE, Junji , FUJITA, Takashi
CPC分类号: B24B19/02 , B24B9/065 , B24B27/06 , B24D5/12 , B28D5/0029
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公开(公告)号:EP2879164A1
公开(公告)日:2015-06-03
申请号:EP13803775.9
申请日:2013-06-14
发明人: WATANABE, Junji , FUJITA, Takashi
IPC分类号: H01L21/301 , B24D3/00 , B24D3/06 , B24D5/12
CPC分类号: B24B19/02 , B24B9/065 , B24B27/06 , B24D5/12 , B28D5/0029
摘要: To stably perform cutting process even on a workpiece formed from a brittle material, in a ductile mode with high precision, without causing cracking and/or breaking in the workpiece. A dicing device (10) which performs cutting process on a workpiece (W) includes: a dicing blade (26) that is formed into a discoid shape from a diamond sintered body (80) formed by sintering diamond abrasive grains, and contains 80 % or more of the diamond abrasive grains; a spindle (rotating mechanism) (28) configured to rotate the dicing blade (26); and a movement mechanism configured to move the workpiece (W) relatively to the dicing blade (26) while forming a constant cut depth on the workpiece (W) by the dicing blade (26).
摘要翻译: 为了即使在由脆性材料形成的工件上以高精度的延性模式稳定地进行切割处理,也不会在工件中产生开裂和/或断裂。 对工件(W)进行切割处理的切割装置(10)包括:切割刀片(26),其由通过烧结金刚石磨粒形成的金刚石烧结体(80)形成为圆盘状,并且包含80% 或更多的金刚石磨粒; 构造成旋转切割刀片(26)的主轴(旋转机构)(28); 以及移动机构,其构造成相对于切割刀片(26)移动工件(W),同时通过切割刀片(26)在工件(W)上形成恒定的切割深度。
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