公开(公告)号：EP3647457A1

公开(公告)日：2020-05-06

申请号：EP18824625.0

申请日：2018-06-04

Applicant: Toppan Printing Co., Ltd.

Inventor： OKAMURA Kengo ,  TAKAHARA Ken ,  HAYAKAWA Takahiro ,  HANAMI Michihiro ,  TANI Takayuki

IPC: C23C14/35 ,  C23C14/02 ,  H05H1/46

Abstract: Disclosed is a treatment method performed by a film processing apparatus 1 including: a first discharge electrode unit 3 and a second discharge electrode unit 4 respectively including magnets 3b and 4b that form a magnetic field; and an AC power source 5 capable of alternately switching polarities of the first discharge electrode unit 3 and the second discharge electrode unit 4. In the treatment method, a predetermined surface treatment of a film F is performed by generating a plasma P while alternately switching polarities of the first discharge electrode unit 3 and the second discharge electrode unit 4 by using high-frequency power supplied from the AC power source 5.