公开(公告)号：EP1410436A4

公开(公告)日：2006-04-05

申请号：EP02795486

申请日：2002-07-26

申请人： UNIV ILLINOIS

发明人： LIU CHANG ,  ZHANG MING ,  BULLEN DAVID ANDREW

IPC分类号： H01L21/66 ,  B81B3/00 ,  B81B7/04 ,  G01N35/10 ,  G01Q60/38 ,  G01Q70/16 ,  G01Q70/18 ,  G01Q80/00 ,  G03F7/00 ,  G03F7/20 ,  H01L21/027

CPC分类号： G01R1/073 ,  G01N2035/1037 ,  G01Q80/00 ,  G03F7/0002 ,  Y10S977/857 ,  Y10S977/874

摘要： A microfabricated probe array (32, 100) for nanolithography and process for designing and fabricating the probe array. The probe array (32, 100) consists of individual probes (35, 54, 72, 104) that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array (32, 100) can be used to produce traces of diffusively transferred chemicals (26) on a substrate (24) with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.