公开(公告)号：EP2373827A1

公开(公告)日：2011-10-12

申请号：EP09764456.1

申请日：2009-11-30

申请人： Umicore

发明人： HUYBERECHTS, Guido ,  DREES, Griet ,  GOEDEME, Daan

IPC分类号： C23C14/34 ,  C01G3/02 ,  C01F11/02

CPC分类号： C23C14/3414 ,  C01G3/006 ,  C01G9/006 ,  C01G11/006 ,  C01G19/006 ,  C01G21/006 ,  C01G23/002 ,  C01G31/006 ,  C01G37/006 ,  C01G43/006 ,  C01G45/006 ,  C01G49/009 ,  C01G51/006 ,  C01G53/006 ,  C01G55/00 ,  C01P2002/72 ,  C01P2002/74 ,  C01P2004/03 ,  C01P2004/04 ,  C01P2004/61 ,  C01P2006/10 ,  C01P2006/40 ,  C01P2006/80

摘要： This invention relates to material compositions, a manufacturing method for these materials and a manufacturing method for ceramic bodies, to be used as targets in physical vapour deposition techniques of p-type transparent conductive films. There is disclosed a method for manufacturing a pelletized oxide material Mx Sr1−xCu2-+aO2+b, wherein −0.2≦̸a≦̸0.2, −0.2≦̸b≦̸0.2, and M is either one or more of the group of bivalent elements consisting of Ba, Ra, Mg, Be, Mn, Zn, Pb, Fe, Cu, Co, Ni, Sn, Pd, Cd, Hg, Ca, Ti, V, Cr; with 0≦̸x≦̸0.2; comprising the steps of: —providing a precursor mixture having a given grain size distribution, and comprising stoichiometric quantities of Cu2O, Sr(OH)2.8H2O, and, when 0≦̸x≦̸0.2, M-hydroxide, —intimately mixing said precursor mixture so as to obtain a homogeneous mixture, and —sintering said homogeneous mixture at a temperature above 850° C. The oxide material Sr Cu2+aO2+b has a residual carbon content of less than 400 ppm, and a target having a density of at least 5.30 g/ml can be manufactured with it.

公开(公告)号：EP2373826A1

公开(公告)日：2011-10-12

申请号：EP09764191.4

申请日：2009-11-30

申请人： Umicore

发明人： HUYBERECHTS, Guido ,  DREES, Griet ,  GOEDEME, Daan ,  NOLAN, Michael ,  ELLIOTT, Simon D.

IPC分类号： C23C14/34 ,  C01F11/02 ,  C01G3/02

CPC分类号： C23C14/3414 ,  C01G3/00 ,  C01G3/006 ,  C01P2002/72 ,  C23C14/087

摘要： The invention describes a powderous oxide material (M
x M'
y )Cu
2+a O
2+b for the production of targets for p-type transparent conductive thin films, wherein -0.2≤a≤0.2, -0.2≤b≤0.2 and either - M' is Sr and M is either one or both of Ba and bivalent Cu, with x>0, y>0 and x+y=1 ±0.2; or - M is bivalent Cu, x=1 ±0.2, and y=0.