Mounting apparatus for cryogenic aerosol cleaning
    5.
    发明公开
    Mounting apparatus for cryogenic aerosol cleaning 失效
    Befestigung einer Vorrichtung zur Reinigung手套kryogenem气溶胶

    公开(公告)号:EP0712690A1

    公开(公告)日:1996-05-22

    申请号:EP94480132.3

    申请日:1994-11-15

    IPC分类号: B24C1/00 H01L21/00 B24C9/00

    摘要: An apparatus (10) for mounting to a tool (105) having a surface (20) to be cleaned for producing aerosol from a substance for cleaning the surface (20), includes a flange (130) for mounting to the tool (105) having the surface (20) to be cleaned. A nozzle (102) is mounted to the flange (130) for receiving the substance. The nozzle (102) has at least one exit opening (165) which allows passing of the substance therethrough for expanding the substance from a first pressure to a second pressure which is lower than the first pressure for solidifying at least a substantial portion of the substance and producing aerosol for cleaning the surface (20). Condensation preventing means (115,125) is provided for preventing condensation from forming on surfaces (45) of the apparatus and the surface (20) to be cleaned, and contamination preventing means (115) is provided for preventing contaminants from re-contaminating the surface (20) subsequent to removal therefrom.

    摘要翻译: 一种用于安装到具有用于从用于清洁表面(20)的物质产生气溶胶的待清洁表面(20)的工具(105)的装置(10),包括用于安装到工具(105)的凸缘(130) 具有待清洁的表面(20)。 喷嘴(102)安装到用于接收物质的凸缘(130)上。 喷嘴(102)具有至少一个出口开口(165),其允许物质通过其中,用于将物质从第一压力扩展到低于第一压力的第二压力,用于固化至少大部分物质 并产生用于清洁表面(20)的气溶胶。 提供冷凝防止装置(115,125),用于防止在装置的表面(45)和要清洁的表面(20)上形成冷凝,并且设置防污染装置(115)以防止污染物再次污染表面 20)。

    MISCH- ODER DISPERGIERELEMENT UND VERFAHREN ZUM STATISCHEN MISCHEN ODER DISPERGIEREN
    7.
    发明授权
    MISCH- ODER DISPERGIERELEMENT UND VERFAHREN ZUM STATISCHEN MISCHEN ODER DISPERGIEREN 有权
    MISCH-ODER DISPERGIERELEMENT UND VERFAHREN ZUM STATISCHEN MISCHEN ODER DISPERGIEREN

    公开(公告)号:EP2550088B1

    公开(公告)日:2013-12-04

    申请号:EP10768911.9

    申请日:2010-10-08

    摘要: The element (1) has a channel (2), and an insert element (3) comprising a foam structure and arranged in the channel. The foam structure consists of metal, metal alloy, ceramics, glass, carbon or plastic. The foam structure is surrounded by a casing element, and the channel is designed as a tube with a circular cross-section. The foam structure has pores that are formed as a hole or hollow space, where the pores are limited by edge points. The pores are separated from each other by walls, where ratio of length and diameter of the insert element is less than 2. An independent claim is also included for a method for producing dispersion in a dispersing element.

    摘要翻译: 元件(1)具有通道(2)以及包括泡沫结构并设置在通道中的插入元件(3)。 泡沫结构由金属,金属合金,陶瓷,玻璃,碳或塑料组成。 泡沫结构被外壳元件包围,并且通道被设计成具有圆形横截面的管。 泡沫结构具有形成为孔或中空空间的孔,其中孔被边缘点限制。 孔通过壁彼此分隔开,其中插入元件的长度和直径的比率小于2.独立权利要求也包括用于在分散元件中制造分散体的方法。