摘要:
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.
摘要:
Apparatus and method for increasing dissolved oxygen levels in a liquid. An oxygenation system (100) includes a liquid source (102) from which liquid is introduced into a piping network (106) by a pump (104). Colloidal minerals are injected into the liquid in a dwell chamber (110). The mixture of liquid and minerals flows into an oxygenator (118) where gaseous oxygen is injected into the liquid. The resulting two-phase flow stream is accelerated to supersonic speeds through a linear flow accelerator (126) comprising a flat Venturi (130) and electromagnets (128) positioned adjacent the flat Venturi. The electromagnets generate an electromagnetic field to exert a force on the two-phase mixture in the direction of the flow. The flow stream then passes through a laminar flow grid (132) to remove turbulence, after which the oxygenated liquid is bottled at a bottling system (134).
摘要:
Methods and apparatuses are provided for forming fine particles of a desired substance comprising dissolving said substance in a fluid such as water to form a solution and mixing the solution with a second fluid such as supercritical carbon dioxide which becomes a gas upon rapid pressure release, and with which the first fluid is at least partially immiscible, and releasing the pressure to form an air-borne dispersion or aerosol comprising particles having an average diameter between about 0.1 and about 6.5 µm.
摘要:
An apparatus (10) for mounting to a tool (105) having a surface (20) to be cleaned for producing aerosol from a substance for cleaning the surface (20), includes a flange (130) for mounting to the tool (105) having the surface (20) to be cleaned. A nozzle (102) is mounted to the flange (130) for receiving the substance. The nozzle (102) has at least one exit opening (165) which allows passing of the substance therethrough for expanding the substance from a first pressure to a second pressure which is lower than the first pressure for solidifying at least a substantial portion of the substance and producing aerosol for cleaning the surface (20). Condensation preventing means (115,125) is provided for preventing condensation from forming on surfaces (45) of the apparatus and the surface (20) to be cleaned, and contamination preventing means (115) is provided for preventing contaminants from re-contaminating the surface (20) subsequent to removal therefrom.
摘要:
The element (1) has a channel (2), and an insert element (3) comprising a foam structure and arranged in the channel. The foam structure consists of metal, metal alloy, ceramics, glass, carbon or plastic. The foam structure is surrounded by a casing element, and the channel is designed as a tube with a circular cross-section. The foam structure has pores that are formed as a hole or hollow space, where the pores are limited by edge points. The pores are separated from each other by walls, where ratio of length and diameter of the insert element is less than 2. An independent claim is also included for a method for producing dispersion in a dispersing element.