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公开(公告)号：EP1452221A4
公开(公告)日：2006-02-01
申请号：EP02788714
申请日：2002-12-04
发明人： OHMI TADAHIRO , ISHIHARA YOSHIO , NAKAMURA AKIHIRO
IPC分类号： B01D53/34 , B01D53/68 , B01D46/00 , B01D53/04 , B01D53/46 , B01D53/70 , B01D53/74 , B01D53/81 , B01J4/00 , C01B23/00 , C23C16/44 , H01L21/31
CPC分类号： C01B23/0052 , B01D53/46 , B01D53/68 , B01D53/70 , B01D53/74 , B01D2257/11 , B01D2257/2066 , C01B23/001 , C01B2210/0029 , C01B2210/0035 , C01B2210/0042 , Y02P20/154
摘要： Gas supplying method and system in which effective component gas in exhaust gas can be separated and purified efficiently regardless of variation in the flow rate or composition of the exhaust gas and consumed gas can be replenished efficiently. In a method for collecting exhaust gas discharged from a gas using facility, separating/purifying effective component gas contained in the exhaust gas and supplying the effective component gas thus obtained to the gas using facility, the exhaust gas discharged from the gas using facility is added with a replenishing gas of the same components as the effective component gas before the effective component gas is separated and purified.
摘要翻译： 可以有效地补充气体供给方法和系统，其中排气中的有效成分气体可以被有效地分离和净化以被重新供应，而与流量或排气和消耗气体的组成的变化无关。 在从气体使用设备中排出的废气的收集方法中，分离/净化排气中含有的有效成分气体并将这样获得的有效成分气体供给到气体使用设备中，从气体使用设备排出的排气被添加 在有效成分气体被分离和纯化之前，补充与有效成分气体相同成分的气体。
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公开(公告)号：EP1841690A1
公开(公告)日：2007-10-10
申请号：EP05821460.2
申请日：2005-12-15
申请人： The BOC Group plc
发明人： JAIN, Ravi , DEAN, Julian Richard , GRANT, Robert Bruce , PERELMAN, Naum , STOCKMAN, Paul Alan , CONDON, Neil , HARPHAM, Andrew John , GERRISTEAD, William Robert
IPC分类号： C01B23/00
CPC分类号： C01B23/0042 , B01D53/025 , B01D2258/0216 , C01B23/0052 , C01B2210/0029 , C01B2210/0037 , Y02C20/30
摘要： A method is described for recovering a noble gas, such as xenon or krypton, from a first gas mixture comprising a plurality of components, one of which is the noble gas and the others are typically helium and/or nitrogen, argon, and relatively light fluorocarbons. The gas mixture is first conveyed to a gas chromatography column for separating the noble gas from the other components of the gas mixture. As the noble gas travels relatively slowly through the column, the other components are exhaust from the column before the relatively slow noble gas. Following the exhaust of these other components, a carrier gas is supplied to the column to flush the noble gas therefrom. An exhaust gas comprising the noble gas and the carrier gas is conveyed from the column to a membrane separator to separate the second gas mixture into a noble gas-rich gas stream and a purge gas-rich gas stream, which may be recirculated back to the column for re-use. The noble gas-rich gas stream is then purified prior to its re-use.
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公开(公告)号：EP1452221A1
公开(公告)日：2004-09-01
申请号：EP02788714.0
申请日：2002-12-04
发明人： OHMI, Tadahiro , ISHIHARA, Yoshio, c/o Nippon Sanso Corporation , NAKAMURA, Akihiro, c/o Nippon Sanso Corporation
CPC分类号： C01B23/0052 , B01D53/46 , B01D53/68 , B01D53/70 , B01D53/74 , B01D2257/11 , B01D2257/2066 , C01B23/001 , C01B2210/0029 , C01B2210/0035 , C01B2210/0042 , Y02P20/154
摘要： Gas supplying method and system in which effective component gas in exhaust gas can be separated and purified efficiently to be resupplied regardless of variation in the flow rate or composition of the exhaust gas and consumed gas can be replenished efficiently. In a method for collecting exhaust gas discharged from a gas using facility, separating/purifying effective component gas contained in the exhaust gas and supplying the effective component gas thus obtained to the gas using facility, the exhaust gas discharged from the gas using facility is added with a replenishing gas of the same components as the effective component gas before the effective component gas is separated and purified.
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公开(公告)号：EP0826629A3
公开(公告)日：1998-11-04
申请号：EP97305948.8
申请日：1997-08-05
申请人： THE BOC GROUP, INC.
发明人： Jain, Ravi , Whitlock, Walter H.
CPC分类号： C01B23/0094 , B01D53/00 , B01D2257/11 , C01B2210/0001 , C01B2210/001 , C01B2210/0015 , C01B2210/0029 , C01B2210/0032
摘要： A noble gas selected from xenon, neon, krypton or mixtures of these is recovered from a process chamber (A) by purging the chamber with one of several gases and then separating the noble gas from the purge gas by one of several techniques. The separated noble gas is further purified to remove trace impurities and is then recycled for reuse in the process chamber (A). The purge gas may be recycled or disposed of, depending upon the particular purge gas used and its purity. In a specific embodiment, hydrogen is used as the purge gas and it is separated from the noble gas by high temperature membrane separation using a palladium membrane (26). The hydrogen, obtained in high purity, and the noble gas are each recycled for reuse in the process chamber (A).
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5.发明公开Procédé et dispositif pour préparation d'un flux substantiellement épuré en l'une au moins des impuretés oxygène et monoxyde de carbone 失效为生产氧和Kohlstoffmonoxid的杂质中的至少一个的基本上纯化的通量的方法和装置
公开(公告)号：EP0750933A1
公开(公告)日：1997-01-02
申请号：EP96401417.9
申请日：1996-06-26
IPC分类号： B01D53/04
CPC分类号： F25J3/08 , B01D53/04 , B01D2253/112 , B01D2256/10 , B01D2256/18 , B01D2257/104 , B01D2257/502 , B01D2259/402 , B01D2259/416 , C01B23/0057 , C01B2210/0029 , C01B2210/0034 , C01B2210/0045 , C01B2210/005 , F25J3/04412 , F25J3/04678 , F25J3/04733 , F25J2205/60 , F25J2205/82 , F25J2215/30 , F25J2215/32 , F25J2215/34 , F25J2215/36 , F25J2215/58 , Y10S62/92 , Y10S62/924
摘要： Un procédé de préparation d'un flux substantiellement épuré en l'une au moins des impuretés O 2 et CO, selon lequel:
a) on refroidit un flux à épurer comprenant au moins 90 % molaire d'un composé choisi parmi l'azote, l'hélium, le néon, l'argon, le krypton, le xénon ou d'un mélange de ces composés et l'une au moins des impuretés O 2 et CO à une température inférieure à -40°C;
b) on fait passer le flux refroidi au travers d'un adsorbant pour l'adsorption de l'une au moins des impuretés O 2 et CO, ledit adsorbant comprenant au moins un oxyde métallique poreux;
c) on récupère un flux substantiellement épuré en l'une au moins des impuretés O 2 et CO.
Un dispositif pour la mise en oeuvre de ce procédé.摘要翻译： 制备流基本上纯化的w.r.t. 杂质O2和CO，摩尔，其中待纯化的流中的至少一个，至少90，其包括 ％N2，氦，氖，氩，氪，氙或mixt。 论文的，包括：（A）使料流通过至少一个多孔金属氧化物吸附材料进行纯化，具有一个临时的流。 的低于-40摄氏度; 和（b）回收流基本上纯化的w.r.t. 杂质O2和CO，其中，所述流包含LIQ的处理中的至少一个。 N2被排除在外。 所以自称是一个约会。 为实施该方法。
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公开(公告)号：EP2531274B1
公开(公告)日：2016-03-16
申请号：EP11702080.0
申请日：2011-01-28
CPC分类号： B01D53/82 , B01D53/04 , B01D53/0462 , B01D53/0476 , B01D53/44 , B01D2253/108 , B01D2256/18 , B01D2257/102 , B01D2257/108 , B01D2257/502 , B01D2257/702 , B01D2257/80 , B01D2258/0216 , B01J20/18 , B01J20/20 , B01J20/3408 , B01J20/3441 , B01J20/3491 , B01J2220/56 , B01J2220/606 , C01B23/0094 , C01B2210/0004 , C01B2210/0021 , C01B2210/0029 , C01B2210/0031 , C01B2210/0034 , C01B2210/0046 , C01B2210/005 , C01B2210/0051 , C01B2210/0053 , C01B2210/0062 , C01B2210/007 , Y02C10/08 , Y02P20/152
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公开(公告)号：EP2531274A1
公开(公告)日：2012-12-12
申请号：EP11702080.0
申请日：2011-01-28
CPC分类号： B01D53/82 , B01D53/04 , B01D53/0462 , B01D53/0476 , B01D53/44 , B01D2253/108 , B01D2256/18 , B01D2257/102 , B01D2257/108 , B01D2257/502 , B01D2257/702 , B01D2257/80 , B01D2258/0216 , B01J20/18 , B01J20/20 , B01J20/3408 , B01J20/3441 , B01J20/3491 , B01J2220/56 , B01J2220/606 , C01B23/0094 , C01B2210/0004 , C01B2210/0021 , C01B2210/0029 , C01B2210/0031 , C01B2210/0034 , C01B2210/0046 , C01B2210/005 , C01B2210/0051 , C01B2210/0053 , C01B2210/0062 , C01B2210/007 , Y02C10/08 , Y02P20/152
摘要： The method of recovery and recycling of inert gases, especially noble gases, from processes such as vacuum furnaces and other applications. A first gas stream comprising the inert gas and oxidisable impurities, is supplied to an oxidation column comprising a metal oxide. The impurities in the first gas stream are oxidised in the column in the presence of the metal oxide to form a second gas stream containing carbon dioxide and water, the second gas stream is supplied to a regenerable carbon dioxide removal column; the carbon dioxide is removed from the second gas stream in the column to form a third gas stream. Water is removed from the third gas stream in an absorption column, and the exhausted, purified inert gas is collected from the absorption column for conveying to a process utilising the inert gas. The recovered gas stream is of around 6N purity (99.9999% pure) i.e. having lppm total contaminants.
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公开(公告)号：EP0826629A2
公开(公告)日：1998-03-04
申请号：EP97305948.8
申请日：1997-08-05
申请人： THE BOC GROUP, INC.
发明人： Jain, Ravi , Whitlock, Walter H.
CPC分类号： C01B23/0094 , B01D53/00 , B01D2257/11 , C01B2210/0001 , C01B2210/001 , C01B2210/0015 , C01B2210/0029 , C01B2210/0032
摘要： A noble gas selected from xenon, neon, krypton or mixtures of these is recovered from a process chamber (A) by purging the chamber with one of several gases and then separating the noble gas from the purge gas by one of several techniques. The separated noble gas is further purified to remove trace impurities and is then recycled for reuse in the process chamber (A). The purge gas may be recycled or disposed of, depending upon the particular purge gas used and its purity. In a specific embodiment, hydrogen is used as the purge gas and it is separated from the noble gas by high temperature membrane separation using a palladium membrane (26). The hydrogen, obtained in high purity, and the noble gas are each recycled for reuse in the process chamber (A).
摘要翻译： 选自氙，氖，氪或它们的混合物的惰性气体是通过用几种气体之一吹扫室从处理室（A）中回收的，然后通过几种技术之一从吹扫气体中分离惰性气体。 分离的惰性气体被进一步净化以除去微量杂质，然后再循环用于处理室（A）中。 取决于所使用的特定吹扫气体及其纯度，吹扫气体可被再循环或处置。 在具体的实施方案中，使用氢气作为吹扫气体，并通过使用钯膜（26）的高温膜分离将其与惰性气体分离。 以高纯度获得的氢气和稀有气体各自循环再用于处理室（A）中。
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公开(公告)号：EP3265210A1
公开(公告)日：2018-01-10
申请号：EP16760962.7
申请日：2016-03-04
发明人： GAMACHE, Yves
CPC分类号： B01D53/346 , B01D53/0407 , B01D53/0423 , B01D53/0454 , B01D53/30 , B01D53/32 , B01D53/323 , B01D53/8696 , B01D2251/102 , B01D2253/102 , B01D2253/108 , B01D2253/116 , B01D2255/20707 , B01D2255/20715 , B01D2255/20723 , B01D2255/20738 , B01D2256/10 , B01D2256/18 , B01D2257/102 , B01D2257/108 , B01D2257/502 , B01D2257/504 , B01D2257/702 , B01D2257/7025 , B01D2257/80 , B01D2259/818 , B01J20/02 , B01J20/18 , B01J20/20 , B01J20/3408 , B01J20/3416 , B01J20/3433 , B01J20/3441 , C01B23/0015 , C01B23/0073 , C01B23/0094 , C01B2210/0029 , C01B2210/0046 , C01B2210/005 , C01B2210/0051 , C01B2210/0053 , C01B2210/0062 , C01B2210/007 , Y02C10/08 , Y02C20/20 , Y02P20/152 , Y02P20/156
摘要： A method for extending useful life of a sorbent for purifying a gas by sorption of an impurity is provided. The method generating a electrical discharge within the gas to obtain a spectral emission representative of a concentration of the impurity. The method also includes monitoring the concentration of the impurity according to the spectral emission. The method also includes lowering the concentration of the impurity by conversion of at least a portion of the impurity into a secondary impurity having a greater affinity to the sorbent than the impurity. The method also includes comparing the concentration of the impurity to a polluting concentration and managing the sorption of the gas onto the sorbent according to the comparison.
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公开(公告)号：EP0826629B1
公开(公告)日：2002-11-20
申请号：EP97305948.8
申请日：1997-08-05
申请人： THE BOC GROUP, INC.
发明人： Jain, Ravi , Whitlock, Walter H.
CPC分类号： C01B23/0094 , B01D53/00 , B01D2257/11 , C01B2210/0001 , C01B2210/001 , C01B2210/0015 , C01B2210/0029 , C01B2210/0032
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