High purity hafnium, high purity hafnium target and method of manufacturing a thin film using high purity hafnium
    7.
    发明公开
    High purity hafnium, high purity hafnium target and method of manufacturing a thin film using high purity hafnium 有权
    高纯度铪,以及高纯度Hafniumtarget方法使用高纯度铪的制造薄膜

    公开(公告)号:EP2017360A2

    公开(公告)日:2009-01-21

    申请号:EP08165172.1

    申请日:2004-10-25

    Inventor: SHINDO, Yuichiro

    CPC classification number: C22C27/00 C22B34/14 C23C14/3414

    Abstract: The present invention relates to high purity hafnium having a purity of 4N or higher excluding zirconium and gas components and an oxygen content of 40wtppm or less, and a target and thin film formed from such high purity hafnium, and high purity hafnium having a purity of 4N or higher excluding zirconium and gas components and in which the content of sulfur and phosphorus is respectively 10wtppm or less. The present invention also relates to a high purity hafnium material which uses a hafnium sponge with reduced zirconium as the raw material, and in which the content of oxygen, sulfur and phosphorus containing in the hafnium is reduced, as well as to a target and thin film formed from such material, and to the manufacturing method of high purity hafnium. Thereby provided is efficient and stable manufacturing technology which enables the manufacture of a high purity hafnium material, and a target and thin film formed from such material.

    Abstract translation: 本发明涉及高纯度铪具有纯度为4N或更高不含锆和气体成分和40重量ppm或更低的氧含量,并寻求高纯度铪靶和薄膜形成,并且具有的纯度的高纯度铪 4N以上不含锆和气体成分并且其中的硫和磷的含量分别为10重量ppm或更低。 因此,本发明涉及一种使用具有减小的锆作为原料海绵铪高纯度铪材料,并且其中氧,硫和在铪含磷的含量降低时,以及到目标和薄 寻求材料成膜,并以高纯度铪的制造方法。 从而提供了有效且稳定的制造技术,使高纯度铪材料的制造中,与目标和从寻求材料的薄膜形成的。

    HIGH PURITY HAFNIUM, TARGET AND THIN FILM COMPRISING SAID HIGH PURITY HAFNIUM, AND METHOD FOR PRODUCING HIGH PURITY HAFNIUM
    10.
    发明公开
    HIGH PURITY HAFNIUM, TARGET AND THIN FILM COMPRISING SAID HIGH PURITY HAFNIUM, AND METHOD FOR PRODUCING HIGH PURITY HAFNIUM 有权
    HIGH-纯度铪,Target和薄膜,其含有高纯度铪和方法生产高纯度铪

    公开(公告)号:EP1686196A4

    公开(公告)日:2007-04-25

    申请号:EP04792914

    申请日:2004-10-25

    Inventor: SHINDO YUICHIRO

    CPC classification number: C22C27/00 C22B34/14 C23C14/3414

    Abstract: A high purity hafnium, characterized in that it has a purity of 4N or higher, with the exception of zirconium and gas components, and has an oxygen content of 40 wt ppm or less; a target and thin film comprising the high purity hafnium; a high purity hafnium, characterized in that it has a purity of 4N or higher, with the exception of zirconium and gas components, and has both of a sulfur content and a phosphorus content of 10 wt ppm or less; a target and thin film comprising the high purity hafnium; a high purity hafnium material which is prepared by the use of a hafnium sponge having been reduced in the content of zirconium as a raw material and is further reduced in the contents of oxygen, sulfur and phosphorus; a target and thin film comprising the high purity hafnium material; and a method for producing a high purity hafnium. An efficient and stable production technique, a high purity hafnium material prepared by the technique, and a target and a thin film comprising said material are provided.

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