公开(公告)号：EP3176434A4

公开(公告)日：2018-01-24

申请号：EP15827048

申请日：2015-07-06

申请人： EDWARDS JAPAN LTD

发明人： NISHIMURA KATSUMI ,  TAKAHASHI KATSUNORI

IPC分类号： F04B37/16 ,  F04C25/02 ,  F04C29/04 ,  F04C29/12 ,  F04D19/04 ,  F28D7/00 ,  F28D7/16 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/67

CPC分类号： F04C29/04 ,  F04B37/16 ,  F04C18/126 ,  F04C25/02 ,  F04C29/12 ,  F04C2210/225 ,  F04D19/04 ,  F28D7/0008 ,  F28D7/1653 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/67017

摘要： An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

公开(公告)号：EP3176434A1

公开(公告)日：2017-06-07

申请号：EP15827048.8

申请日：2015-07-06

申请人： Edwards Japan Limited

发明人： NISHIMURA, Katsumi ,  TAKAHASHI, Katsunori

IPC分类号： F04B37/16 ,  C23C16/44 ,  H01L21/205 ,  H01L21/3065

CPC分类号： F04C29/04 ,  F04B37/16 ,  F04C18/126 ,  F04C25/02 ,  F04C29/12 ,  F04C2210/225 ,  F04D19/04 ,  F28D7/0008 ,  F28D7/1653 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/67017

摘要： An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

摘要翻译： 本发明的目的在于提供一种干式泵和废气处理方法，其能够提高抑制反应生成物附着在干式泵的气体出口内，气体排气管或 也可以提高节能效果。 为了实现该目的，本发明包括设置成与干泵的气体出口端口和无害化装置的气体入口端口连接的排气管以及使用热交换器加热引入其中的稀释气体的热交换器 从干燥泵产生的热量并将加热的稀释气体引入排气管中以将使用过的气体加热至不低于预定值的温度。

公开(公告)号：EP3123030A1

公开(公告)日：2017-02-01

申请号：EP14715334.0

申请日：2014-04-07

申请人： Ateliers Busch S.A.

发明人： MÜLLER, Didier ,  LARCHER, Jean-Eric ,  ILTCHEV, Théodore

IPC分类号： F04C25/02 ,  F04C18/16 ,  F04C28/06

CPC分类号： F04C25/02 ,  F04C18/16 ,  F04C23/005 ,  F04C28/06 ,  F04C28/065 ,  F04C2210/221 ,  F04C2210/225 ,  F04C2220/12 ,  F04C2220/30 ,  F04F5/20 ,  F04F5/52 ,  F04F5/54

摘要： A pumping system and method comprising: a dry primary screw vacuum pump (3) having a gas inlet orifice (2) connected to a vacuum chamber (1) and a gas outlet orifice (4) that opens into a duct (5) before leading into the gas outlet (8) of the pumping system (SP), a non-return valve (6) positioned in the duct (5) between the gas outlet orifice (4) and the gas outlet (8), and an ejector (7) connected in parallel to the non-return valve (6). The dry primary screw vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) through the gas outlet orifice (4). Simultaneously, the ejector (7) is supplied with pump fluid, and the ejector (7) continues to be supplied with pump fluid for the entire time that the dry primary screw vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or for the entire time that the dry primary screw vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

摘要翻译： 泵送系统（SP）中的泵送方法技术领域本发明涉及泵送系统（SP）中的泵送方法，包括：主干螺杆式真空泵（3），其具有连接到真空室（1）的气体入口孔（2）和气体出口孔 4）在进入泵送系统（SP）的气体出口（8）之前导入导管（5）中;定位在气体出口孔（4）之间的导管（5）中的止回阀（6） 和气体出口（8）以及与止回阀（6）并联连接的喷射器（7）。 根据该方法，主干式螺杆式真空泵（3）投入运行，以通过气体出口孔（4）泵送包含在真空室（1）中的气体。 以同时的方式，喷射器（7）被供给工作流体，并且喷射器（7）继续被供给工作流体，一直以来，主干螺杆式真空泵（3）泵送包含在 真空室（1）和/或一次干式螺杆式真空泵（3）在真空室（1）中维持限定的压力。 本发明还涉及能够用于实施该方法的泵送系统（SP）。