公开(公告)号：EP2140182A1

公开(公告)日：2010-01-06

申请号：EP08733639.2

申请日：2008-03-25

Applicant: Angstrom Power Incorporated

Inventor： ZIMMERMANN, Joerg ,  IACONIS, Jean-Louis ,  LAM, Duhane ,  SCHROOTEN, Jeremy ,  MCLEAN, Gerard Francis ,  SLOAN, Tristan

IPC: F16K13/00 ,  B21D21/00 ,  B21D53/00 ,  B32B33/00 ,  B32B7/04 ,  F16K27/00 ,  F16L41/02 ,  H01M8/04 ,  F15C4/00 ,  F15C5/00 ,  F15D1/14

CPC classification number: F16K99/0038 ,  C08L2201/12 ,  F16K99/0001 ,  F16K99/0005 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0044 ,  F16K99/0057 ,  F16K2099/008 ,  F16K2099/0082 ,  H01M8/04089 ,  H01M8/04201 ,  H01M8/04216 ,  H01M8/065 ,  H01M8/2485 ,  Y02P70/56 ,  Y10T137/7793 ,  Y10T137/7795 ,  Y10T137/7808 ,  Y10T137/7812 ,  Y10T137/7821 ,  Y10T137/7822

Abstract: A fluidic control system includes featured layers. The featured layers include two or more features which collectively form at least one functional component.

公开(公告)号：EP1789707A2

公开(公告)日：2007-05-30

申请号：EP05778141.1

申请日：2005-07-22

Applicant: AFA Controls, LLC

Inventor： TEACH, William O. ,  GIBSON, Paul W. ,  DOUGLAS, Kevin R. ,  HARRIS, Donald C. ,  GOODWIN, Scott H. ,  DAUSCH, David E. ,  DETTLOFF, Wayne D.

IPC: F16J3/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G05D7/0694 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/7761 ,  Y10T137/86558 ,  Y10T137/87169 ,  Y10T137/87217 ,  Y10T137/87225

Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

公开(公告)号：EP1216373B1

公开(公告)日：2007-04-18

申请号：EP00966889.8

申请日：2000-09-25

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： TAI, Yu-Chong ,  WANG, Xuan-Qi

IPC: F16K15/14 ,  F04B43/04 ,  F15C5/00

CPC classification number: F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K15/148 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10S137/907 ,  Y10T137/0491 ,  Y10T137/7879 ,  Y10T137/789

Abstract: An in-channel check valve assembly (116) is disclosed comprising, an in-channel check valve (100), connected between the front (110) and rear (114) of a channel (102) attached to a silicon substrate (106). The channel may have a width between 10 microns and 400 microns, and the check valve may have a width between about 50 microns and 500 microns. The check valve may be generally circular in shape. The check valve may also be normally closed, that is, sealed in the absence of a pressure differential between the front and the rear portions of the channel. The check valve may include a sealing cap (122) that contacts a valve seat (120) to seal the valve. The valve seat may include a metal layer (130) to separate the contacting surfaces of the valve seat and the sealing cap in the closed position.

公开(公告)号：EP1317399B1

公开(公告)日：2006-08-30

申请号：EP01970902.1

申请日：2001-09-14

Applicant: MCNC

Inventor： GOODWIN-JOHANSSON, Scott, H. ,  MCGUIRE, Gary, E.

IPC: B81B3/00 ,  F16J3/02 ,  F15C5/00

CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

公开(公告)号：EP0867622B1

公开(公告)日：2004-08-04

申请号：EP98300914.3

申请日：1998-02-09

Applicant: New Technology Management Co., Ltd.

Inventor： Yokota, Shinichi 1941-B1-301 ,  Otsubo, Jasafumi ,  Nakada, Takeshi 461-11-503 Eda-cho ,  Edamura, Kazuya

IPC: F15B21/06

CPC classification number: F15C5/00 ,  F15B21/065 ,  F15C1/04 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0013 ,  F16K99/0042 ,  F16K99/0057 ,  F16K2099/0094 ,  H01J41/18 ,  H02N11/006 ,  Y10S137/909 ,  Y10T137/0318 ,  Y10T137/2082 ,  Y10T137/2191 ,  Y10T137/85978

公开(公告)号：EP0928371B1

公开(公告)日：2004-01-14

申请号：EP97944369.4

申请日：1997-09-25

Applicant: Redwood Microsystems, Inc.

Inventor： HARRIS, James, M. ,  COZAD, Bradford, A. ,  HOPKINS, Dean, Allyn, Jr. ,  FITCH, John, S.

IPC: F15C5/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0069 ,  F16K2099/0074 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0082 ,  F16K2099/0086

Abstract: Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device (120) having a sealed cavity (100) with a flexible wall (200). The sealed cavity (100) contains a fluid (130) that expands and contracts as it is heated or cooled, thus causing the flexible wall (200) to move. Movement of this wall (200) or membrane is used to move a valve element (300) and dynamically control the opening or closing of a valve port (400) over a predetermined range.

公开(公告)号：EP1320686A1

公开(公告)日：2003-06-25

申请号：EP01969770.5

申请日：2001-09-25

Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DERANGEWANDTEN FORSCHUNG E.V.

Inventor： RICHTER, Martin

IPC: F15C5/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0048 ,  F16K2099/0074 ,  F16K2099/0086 ,  F16K2099/0094

Abstract: The invention relates to a micro valve normally in a closed position, comprising a membrane (80), an activating device (100) for controlling the deformation of the membrane (80) and a valve seal (180) which is deformed by the controllable deformation of the membrane (80). The valve seal (180) is situated at least partially opposite the membrane (80) and is arranged in a first position in the normally closed position of the valve, along a sealing lip (130) disposed between the valve seal (180) and the membrane. The sealing lip (130) is so arranged that an outlet of the valve, which is fluidly connected to an interrupted section of the sealing lip (130), is fluidically sealed in relation to an inlet channel (170) which boarders on the valve seal (180). The valve seal can also be deformed in a second position in order to enable a fluidic connection between the outlet (140) and the inlet channel (170) when the valve is in an open position.

公开(公告)号：EP1216373A1

公开(公告)日：2002-06-26

申请号：EP00966889.8

申请日：2000-09-25

Applicant: California Institute of Technology

Inventor： TAI, Yu-Chong ,  WANG, Xuan-Qi

IPC: F16K15/14

CPC classification number: F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K15/148 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10S137/907 ,  Y10T137/0491 ,  Y10T137/7879 ,  Y10T137/789

Abstract: An in-channel check valve assembly (116) is disclosed comprising, an in-channel check valve (100), connected between the front (110) and rear (114) of a channel (102) attached to a silicon substrate (106). The channel may have a width between 10 microns and 400 microns, and the check valve may have a width between about 50 microns and 500 microns. The check valve may be generally circular in shape. The check valve may also be normally closed, that is, sealed in the absence of a pressure differential between the front and the rear portions of the channel. The check valve may include a sealing cap (122) that contacts a valve seat (120) to seal the valve. The valve seat may include a metal layer (130) to separate the contacting surfaces of the valve seat and the sealing cap in the closed position.

公开(公告)号：EP1214523A1

公开(公告)日：2002-06-19

申请号：EP00963745.5

申请日：2000-09-22

Applicant: Honeywell Inc.

Inventor： OHNSTEIN, Thomas, R. ,  CABUZ, Eugen, L.

IPC: F15B11/042 ,  F15B11/028 ,  F15C5/00

CPC classification number: F16K99/0001 ,  F15B11/0426 ,  F15B2211/40507 ,  F15B2211/40515 ,  F15B2211/40576 ,  F15B2211/45 ,  F15B2211/455 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0051 ,  G05D7/0694 ,  Y10T137/0318 ,  Y10T137/87314

Abstract: An addressable array (11, 37) is interposed between a source pressure (Ps) and an exit pressure (Pe) chamber. The array (11, 37) comprises a plurality of valves, the total open area of which define the opening between the source pressure (Ps) and the exit pressure (Pe). Also provided is an actuator for separately actuating each valve of the array between an open and a closed condition, whereby the total number of open valves determines the flow between the source pressure and the exit pressure. The preferred valves are electrostatically actuated valves including upper and lower electrodes addressable by a conductor, and are fabricated monolithically on a substrate.

公开(公告)号：EP0939861A1

公开(公告)日：1999-09-08

申请号：EP98925492.0

申请日：1998-04-28

Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventor： LINNEMANN, Reinhard ,  RICHTER, Martin ,  KLUGE, Stefan ,  WOIAS, Peter

IPC: F04B43 ,  F15C5 ,  F16K99

CPC classification number: F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0094

Abstract: The invention relates to a method for producing a pump body comprising an inlet having an inlet valve (106) and an outlet having an outlet valve (108). According to said method, the first step is for a first main surface each of a first and second semi-conductor wafer (200) to be structured so as to establish a valve flap structure (202) for the inlet valve and a valve seat structure (204) for the outlet valve in the first wafer as well as a valve flap structure for the outlet valve and a valve seat structure for the inlet valve in the second wafer. Thereafter, for each wafer, one trough-shaped structure for a valve flap (206; 216) and one trough-shaped structure for a valve opening (208; 218) is embodied in a predetermined relationship to the valve flap structures and the valve seat structures in the respective second main surfaces of the first and second semi-conductor wafer. The first main surfaces of the first and second semi-conductor wafer are connected in such a way that each valve flap structure is positioned in a predetermined relationship to a valve seat structure. Lastly, the second main surfaces of the first and second semi-conductor wafers are etched at least in the area of the trough-shaped structure for a valve flap and the trough-shaped structure for a valve opening so as to release the valve flaps and open the valve seats.