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公开(公告)号：EP3107585A1
公开(公告)日：2016-12-28
申请号：EP15702176.7
申请日：2015-01-21
发明人： MELLBIN, Håkan
CPC分类号： A61L2/087 , A61L2202/11 , A61L2202/23 , B65B55/08 , G21K5/02 , H01J37/07 , H01J37/242
摘要： Sterilization device, in particular for sterilization of packaging material, comprising a first chamber, a barrier element and a connection area. The first chamber is adapted to provide charge carriers for sterilization, and the connection area is connected to a third chamber so that the barrier element forms at least one part of the boundary of a volume in which a first atmosphere exists.
摘要翻译： 杀菌装置，特别是用于灭菌包装材料，包括第一室，屏障元件和连接区域。 第一室适于提供用于灭菌的电荷载体，并且连接区域连接到第三室，使得屏障元件形成存在第一气氛的体积的边界的至少一部分。
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公开(公告)号：EP2680294B1
公开(公告)日：2015-09-09
申请号：EP11859058.7
申请日：2011-02-25
申请人： Param Corporation
发明人： YASUDA, Hiroshi
IPC分类号： H01J1/148 , H01J1/26 , H01J37/075 , H01J37/317 , H01J37/065 , H01J37/07 , H01J37/26 , B82Y10/00 , B82Y40/00
CPC分类号： H01J29/485 , B82Y10/00 , B82Y40/00 , H01J1/148 , H01J1/26 , H01J37/065 , H01J37/07 , H01J37/075 , H01J37/26 , H01J37/3174
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3.发明公开High performance source for electron beam projection lithography 审中-公开HochleistungsquellefürElektronenstrahl-Lithographie
公开(公告)号：EP1310978A1
公开(公告)日：2003-05-14
申请号：EP02024610.4
申请日：2002-11-04
申请人： Nikon Corporation
发明人： Golladay, Steven D. , Gordon, Michael S. , Kendall Rodney A. , Kojima, Shinichi , Stickel, Werner
IPC分类号： H01J37/317 , H01J37/07
CPC分类号： H01J37/07
摘要： The presence of magnetic fields from lenses and other (e.g. parasitic) sources at locations in a charged particle beam system such as the charged particle emitter, where the particles have little or no kinetic energy, creates disturbances of the charged particle trajectories, generating undesired angular momentum and resulting in excessive aberrations and associated adverse effects on system performance. Solutions are provided by suppression of these magnetic fields, by relocating the charged particle emitter away from the field source and/or counterbalancing the field with a bucking field. In addition, residual irrepressible field asymmetries are compensated by a suitable element such as a stigmator located at the correct location in the beam path, permitted by relocation of the charged particle emitter.
摘要翻译： 在诸如带电粒子发射器的带电粒子束系统中的位置处的透镜和其他（例如寄生）源的磁场的存在，其中颗粒几乎没有或没有动能，产生带电粒子轨迹的干扰，产生不期望的角 动量并导致过度畸变和对系统性能的相关不利影响。 解决方案是通过抑制这些磁场，通过将带电粒子发射器远离场源重新定位和/或用平衡场平衡场来提供的。 另外，残余不可压缩的场不对称性由适当的元件补偿，诸如位于光束路径中的正确位置的标示符，通过重新定位带电粒子发射器所允许的。
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公开(公告)号：EP3107586B1
公开(公告)日：2018-08-08
申请号：EP15703899.3
申请日：2015-01-21
发明人： DICKNER, Jonas , MELLBIN, Håkan , LINDGREN, Roger , ÅKESSON, Mats
CPC分类号： A61L2/087 , A61L2202/23 , B65B3/00 , B65B55/08 , G21K5/02 , H01J37/07 , H01J37/165 , H01J37/242
摘要： Sterilization apparatus for sterilizing packaging containers, the sterilization apparatus comprising a first carousel for supporting a plurality of sterilization devices, the sterilization devices being adapted to sterilize an interior of the packaging containers by electron beam irradiation, and a transport system for transporting the packaging containers, the transport system comprising a second carousel coaxial with the first carousel, wherein the first carousel comprises a first rotatable shaft and the second carousel comprises a separate second rotatable shaft coaxial with the first rotatable shaft.
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公开(公告)号：EP2680294A1
公开(公告)日：2014-01-01
申请号：EP11859058.7
申请日：2011-02-25
申请人： Param Corporation
发明人： YASUDA, Hiroshi
IPC分类号： H01J1/13 , H01J1/26 , H01J1/304 , H01J37/06 , H01L21/027
CPC分类号： H01J29/485 , B82Y10/00 , B82Y40/00 , H01J1/148 , H01J1/26 , H01J37/065 , H01J37/07 , H01J37/075 , H01J37/26 , H01J37/3174
摘要： An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.
摘要翻译： 电子枪阴极（104）是柱状的，并且通过加热而发射电子。 覆盖电子枪阴极底部和侧面的保持器（103）具有导电性并保持电子枪阴极，并且由在加热状态下不易与电子枪阴极反应的材料构成， 被提供。 电子枪阴极（104）的前端从支架（103）突出而露出，通过对前端施加电场，电子从前端向前方射出。
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公开(公告)号：EP1498929B1
公开(公告)日：2011-12-14
申请号：EP04076906.9
申请日：2004-07-01
申请人： FEI COMPANY
发明人： Bierhoff, Mart , Kooijman, Kees , Sanford, Colin
IPC分类号： H01J37/141 , H01J37/28 , H01J37/07
CPC分类号： H01J37/07 , H01J37/141 , H01J37/28
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公开(公告)号：EP1515358A3
公开(公告)日：2010-11-17
申请号：EP04015558.2
申请日：2004-07-01
CPC分类号： H01J37/18 , H01J7/16 , H01J7/18 , H01J37/07 , H01J2237/022 , H01J2237/062 , H01J2237/06316 , H01J2237/1825 , H01J2237/188
摘要： To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a non-evaporative getter pump, a heater, a filament, and an electron-source positioning mechanism is provided with an opening for rough exhausting and its automatically opening/closing valve, and means for ionizing and decomposing an inert gas or a compound gas for the non-evaporative getter pump. It is possible to keep a high vacuum pressure of 10 -8 Pa without requiring an ion pump by using a small electron gun having a height and a width of approximately 15 cm while emitting electrons from the electron gun.
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公开(公告)号：EP0530004A1
公开(公告)日：1993-03-03
申请号：EP92307756.4
申请日：1992-08-26
申请人： THE BOC GROUP, INC.
发明人： Hill, Rusell J. , Smith, P.A. Joel
IPC分类号： H01J37/305 , H01J37/07
CPC分类号： H01J37/07 , H01J37/305 , Y10S430/143
摘要： An electron beam gun for an electron beam evaporation source in which a beam former (68) shields a filament (18) from an anode (56) such that electrons emitted from the filament are accelerated past the anode in a ribbon-like beam. The filament is connected to a split cathode block (12) having two sides (14,16) for applying an electric current through the filament. The beam former has two sections (74,76) with a vertical gap (78) therebetween and the sections are separately connected to the two sides of the cathode block such that the cathode block acts as a heat sink for the beam former, and a thermal gradient is not produced within the beam former that would produce warpage and movement of the beam former.
摘要翻译： 一种用于电子束蒸发源的电子束枪，其中束形成器（68）从阳极（56）屏蔽细丝（18），使得从细丝发射的电子被加速通过带状束的阳极。 灯丝连接到具有用于施加电流通过灯丝的两侧（14,16）的分裂阴极块（12）。 束形成器具有两个在其间具有垂直间隙（78）的部分（74,76），并且这些部分分开地连接到阴极块的两侧，使得阴极块用作束形成器的散热器，并且 波束形成器内不会产生热梯度，这将产生波束形成器的翘曲和运动。
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10.发明公开Strahlerzeugendes System für Elektronenstrahlmessgeräte 失效Strahlerzeugendes SystemfürElektronenstrahlmessgeräte。
公开(公告)号：EP0309767A1
公开(公告)日：1989-04-05
申请号：EP88114377.0
申请日：1988-09-02
IPC分类号： H01J37/07
摘要： In bekannten Strahlerzeugern wird die Lebensdauer direkt geheizter Boridkathoden durch deren thermisch ungünstige Halterung begrenzt. Es wird deshalb vorgeschlagen, die Kathode nicht wie bisher üblich am unteren Ende des Kristallschaftes, sondern unmittelbar unterhalb der Kathodenspitze einzuspannen. Durch die erfindungsgemäße Halterung der Boridkathode wird erreicht, daß der Kristall im Bereich der Einspannebene nur unwesentlich heißer als an der elektronenemittierenden Spitze ist.
摘要翻译： 在已知的束发生器中，直接加热的硼化物阴极的使用寿命受其热不利保留的限制。 因此，正如直到现在一样，阴极直接夹持在阴极尖端的正下方，而不是在晶体轴的下端。 根据本发明，硼化物阴极的保留确保了晶体在夹持平面的区域中比在电子发射尖端处仅显着更热。 ...
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