Charged particle beam column assembly
    1.
    发明公开
    Charged particle beam column assembly 有权
    SäulenvorrichtungfürStrahl aus geladenen Teilchen

    公开(公告)号:EP1587130A1

    公开(公告)日:2005-10-19

    申请号:EP05009209.7

    申请日:1998-09-24

    发明人: Sanderson, Allan

    摘要: A charged particle beam column assembly for mounting to an evacuated charged particle beam source chamber. The assembly has a sequence of controlled pressure chambers (55-57), each having inlet and outlet apertures (51A-54A) through which a charged particle beam can pass and an evacuation port (59) for connection to a pump to enable the pressure in the chamber to be controlled. The pressure in successive chambers (55-57) increases in use. An evacuation port (59) is connected to a downstream chamber via a conduit (145,146) which extends within the assembly past at least one upstream chamber.

    摘要翻译: 用于安装到抽空的带电粒子束源室的带电粒子束柱组件。 组件具有一系列受控压力室(55-57),每个控制压力室具有入口孔和出口孔(51A-54A),带电粒子束可穿过该孔和出口孔,以及用于连接到泵的排气口(59),以使压力 在房间被控制。 连续室(55-57)的压力在使用中增加。 排气口(59)经由导管(145,146)连接到下游室,该导管在组件内延伸通过至少一个上游室。

    CHARGED PARTICLE BEAM EMITTING ASSEMBLY
    2.
    发明公开
    CHARGED PARTICLE BEAM EMITTING ASSEMBLY 有权
    带电粒子发射组件

    公开(公告)号:EP1018137A2

    公开(公告)日:2000-07-12

    申请号:EP98944099.5

    申请日:1998-09-24

    发明人: SANDERSON, Allan

    摘要: A charged particle emitting assembly comprises an emitter member (5) for emitting charged particles of one polarity. A tubular shield electrode (6) circumferentially surrounds the emitter member and is held in use at the same polarity as the charged particles. A tubular accelerating electrode (7) is positioned substantially coaxially with the shield electrode (6) and is held in use at the opposite polarity to the shield electrode. The arrangement is such that charged particles from the emitter member (5) initially spread laterally outwardly and then are focused into a beam which passes through the tubular accelerating electrode (7).

    摘要翻译: 带电粒子发射组件包括用于发射一种极性的带电粒子的发射器部件(5)。 管状屏蔽电极(6)周向地围绕发射体构件并且以与带电粒子相同的极性被保持在使用中。 管状加速电极(7)基本上与屏蔽电极(6)同轴地定位,并以与屏蔽电极相反的极性保持使用。 该布置使得来自发射器部件(5)的带电粒子首先横向向外扩散,然后聚焦成穿过管状加速电极(7)的光束。

    ELECTRON GUN AND ELECTRON BEAM DEVICE
    4.
    发明公开
    ELECTRON GUN AND ELECTRON BEAM DEVICE 有权
    电子枪和电子束装置

    公开(公告)号:EP2680294A1

    公开(公告)日:2014-01-01

    申请号:EP11859058.7

    申请日:2011-02-25

    申请人: Param Corporation

    发明人: YASUDA, Hiroshi

    摘要: An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.

    摘要翻译: 电子枪阴极(104)是柱状的,并且通过加热而发射电子。 覆盖电子枪阴极底部和侧面的保持器(103)具有导电性并保持电子枪阴极,并且由在加热状态下不易与电子枪阴极反应的材料构成, 被提供。 电子枪阴极(104)的前端从支架(103)突出而露出,通过对前端施加电场,电子从前端向前方射出。

    Vacuum deposition apparatus and process for preparing magnetic recording medium
    6.
    发明公开
    Vacuum deposition apparatus and process for preparing magnetic recording medium 失效
    一种用于真空沉积和用于生产磁性记录载体的过程。

    公开(公告)号:EP0355766A2

    公开(公告)日:1990-02-28

    申请号:EP89115378.5

    申请日:1989-08-21

    摘要: The present invention provides an electron beam heating vacuum deposition apparatus in which the generating body (5) of said electron beam comprises at least 95 at % of tantalum and a process for preparing a magnetic recording medium comprising vapor-depositing a ferromagnetic metal onto a non-magnetic substrate (12) with an electron beam heating vapor deposition apparatus, in which process the generating body (5) of said electron beam comprises at least 95 at % of tantalum.

    摘要翻译: 本发明提供了对电子束加热的真空沉积装置,其中,所述生成体(5)的所述电子束包括钽%,至少95和用于制备磁性记录介质的方法,包括汽相淀积的强磁性金属到非 - 磁性基片(12),在电子束加热汽相淀积设备,在该方法中生成所述主体(5)。所述的电子束在钽%包含至少95。

    ELECTRON SOURCE
    9.
    发明公开
    ELECTRON SOURCE 有权
    电子源

    公开(公告)号:EP2148354A1

    公开(公告)日:2010-01-27

    申请号:EP08752646.3

    申请日:2008-05-13

    IPC分类号: H01J1/26 H01J1/20 H01J37/063

    摘要: Provided is an electron source which provides a stable electron beam even when vibration is applied from external to a device which uses the electron source. The electron source is provided with a needlelike chip (1) having an electron emitting section at one end; a cup-like component (6) bonded to the other end of the needlelike chip (1); and a filament (3) for heating the cup-like component.(6). The filament (3) is arranged in a gap inside the cup-like component (6), in a noncontact state to the cup-like component (6).

    摘要翻译: 本发明提供一种即使从外部向使用电子源的装置施加振动时也能够提供稳定的电子束的电子源。 电子源设有一端具有电子发射部分的针状芯片(1) 与针状片(1)的另一端结合的杯状部件(6); 和用于加热杯形部件的丝(3)。 细丝(3)设置在杯状部件(6)内部的间隙中,与杯状部件(6)处于非接触状态。

    CHARGED PARTICLE BEAM EMITTING ASSEMBLY
    10.
    发明授权
    CHARGED PARTICLE BEAM EMITTING ASSEMBLY 有权
    DEVICE FOR放出带电POND RAY

    公开(公告)号:EP1018137B1

    公开(公告)日:2005-06-22

    申请号:EP98944099.5

    申请日:1998-09-24

    发明人: SANDERSON, Allan

    摘要: A charged particle emitting assembly comprises an emitter member (5) for emitting charged particles of one polarity. A tubular shield electrode (6) circumferentially surrounds the emitter member and is held in use at the same polarity as the charged particles. A tubular accelerating electrode (7) is positioned substantially coaxially with the shield electrode (6) and is held in use at the opposite polarity to the shield electrode. The arrangement is such that charged particles from the emitter member (5) initially spread laterally outwardly and then are focused into a beam which passes through the tubular accelerating electrode (7).