利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

38 条记录 (耗时 0.01 秒)

    HIGH-VOLTAGE ELECTRIC APPARATUS
    1.
    发明公开
    HIGH-VOLTAGE ELECTRIC APPARATUS 有权
    ELEKTRISCHE HOCHSPANNUNGSVORRICHTUNG

    公开(公告)号：EP1367609A1

    公开(公告)日：2003-12-03

    申请号：EP02705086.3

    申请日：2002-03-06

    申请人： Hitachi, Ltd.

    发明人： SATO, T., c/o Hitachi Ltd, Hitachi Res. Lab. ,  TAKEUCHI, R., c/o Hitachi Ltd, Hitachi Res. Lab. ,  KAGA, H., c/o Hitachi Ltd, Instruments

    IPC分类号： H01B17/26 ,  H01B17/34 ,  H01J37/248

    CPC分类号： H01J37/248 ,  H01J2237/063

    摘要： Sufficient dielectric strength needs to be ensured for the high voltage connection (13-11) of the high voltage electrical equipment such as a pattern generation system for focused ion beam processing and observation (1), without enlarging the equipment.
    The present invention seals an insulating liquid (13-113a) or gas (13-113b) in the space (13-113) between the connection bushing on the power supply side (13-111) and the flange on the power receiving side (13-112), and applies the water repellent treatment (13-111c) to a surface of the connection bushing or flange on the power receiving side, which the surface faces the space (13-113).
    Such a configuration provides compact electrical equipment with high dielectric strength, which can prevent the condensation or moisture absorption on the insulation surface in the space of the high voltage connection and can prevent the leakage current increase even under high humidity environment.

    摘要翻译： 对于高压电气设备的高压连接（13-11）需要确保足够的介电强度，例如用于聚焦离子束加工和观察的图案生成系统（1），而不会扩大设备。 本发明在电源侧（13-111）上的连接衬套与电源侧（13-111）上的凸缘之间的空间（13-113）中密封绝缘液体（13-113a）或气体（13-113b） 电力接收侧（13-112），并且将防水处理（13-111c）施加到表面面向空间（13-113）的受电侧的连接衬套或凸缘的表面。 这种构造提供了具有高介电强度的紧凑型电气设备，其可以防止在高压连接的空间中的绝缘表面上的冷凝或吸湿，并且即使在高湿度环境下也可以防止漏电流增加。

    Charged particle beam device
    2.
    发明公开
    Charged particle beam device 失效
    充电颗粒光束装置

    公开(公告)号：EP0473216A3

    公开(公告)日：1992-03-11

    申请号：EP91202016.1

    申请日：1991-08-06

    申请人： Philips Electronics N.V.

    发明人： Mul, Petrus Maria

    IPC分类号： H01J37/073 ,  H01J37/248 ,  H01J37/18

    CPC分类号： H01J37/18 ,  H01J37/073 ,  H01J37/248 ,  H01J2237/0216

    摘要： In a charged particle beam device, comprising a charged particle source (9) for emitting a charged particle beam, a column comprising particle-optical elements which are enclosed by a column jacket (10) and which serve to accelerate and focus the charged particle beam, the charged particle source comprising an emitter (11) which is accommodated in an emitter chamber (19), a vibration-insensitive suspension of the emitter is achieved by connecting the emitter chamber to the column jacket via a tubular electrode system (25). Because the pumping device (39) cooperating with the emitter chamber is arranged above the emitter chamber and in the prolongation of the column, disturbing effects of the pumping device on the emitter are reduced. Because the power supply unit (47) is arranged in the vicinity of the emitter, high-voltage supply leads can be dispensed with, so that interference signals cannot reach the emitter via the supply leads. The use of optical communication via optical fibres (51) prevents the occurrence of undesirable potentials in the equipment.

    Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone
    3.
    发明公开
    Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone 失效
    电子束发生器，特别是用于电子枪

    公开(公告)号：EP0417641A3

    公开(公告)日：1991-08-14

    申请号：EP90117159.5

    申请日：1990-09-06

    申请人： PTR PRÄZISIONSTECHNIK GMBH

    发明人： Fritz, Dieter ,  Schwarz, Wolfgang, Dr.

    IPC分类号： H01J37/248

    CPC分类号： H01J37/248 ,  H02H7/00

    摘要： Bei einem Elektronenstrahlerzeuger, bei dem der Katoden­heizstrom von einem auf dem Hochspannungsisolator (4) des Strahlkopfes angeordneten Isolationstransformator (7) umgewandelt wird, dessen Primärwicklung auf Erdpotential liegt, und bei dem der Strahlkopf (3) über einen einpoligen Hochspannungsanschluß (9) und ein einpoliges Hochspannungs­kabel (2) mit einem Hochspannungserzeuger (1) verbunden ist, ist zur Reduzierung von Isolations- und Bauteilschäden das Hochspannungskabel (2) an den Anschlußenden mit einem dem Wellenwiderstand des Hochspannungskabels (2) entspre­chenden Schutzwiderstand (10) abgeschlossen.

    摘要翻译： 是在电子枪中，其中Katodenheizstrom布置从一个到高电压绝缘体（4）的喷射头的隔离变压器（7）转化为初级绕组的是在地电位，并且其中所述喷射头（3）通过一个单极的高压端子（9）和一个单极 高压电缆（2）具有高电压发生器（1）在所述连接端连接到高压电缆（2）与（2）对应的保护电阻（10）完成，以减少绝缘和元件损坏高压电缆的特性阻抗。

    Electron beam gun
    4.
    发明公开
    Electron beam gun 失效
    电子束枪

    公开(公告)号：EP0410596A3

    公开(公告)日：1991-03-27

    申请号：EP90307363.3

    申请日：1990-07-05

    申请人： FERRANTI SCIAKY, INC.

    发明人： Lawrence, Glen Sherman ,  Haynie, Timothy John ,  Ferrario, Joseph Dominic

    IPC分类号： B23K15/00 ,  H01J19/00 ,  H01J37/065

    CPC分类号： B23K15/00 ,  H01J37/248

    摘要： An improvement in high power electron beam guns including a non-inductive high-voltage cable (24-3C) for supplying power to the gun (1) having barriers for preventing air leakage from inside the cable into the vacuum chamber. The gun (1) includes a support for its cathode (2) and filament, which transmits heat developed in these elements to a heat sink so that dimensional accuracy is maintained in the electron beam generating elements. Provision is made for quick release of cable terminations from the gun (1) receptacle and for maintaining a given pressure in insulating grease placed between mating surfaces of plugs and receptacles.

    HIGH-VOLTAGE ELECTRIC APPARATUS
    6.
    发明授权
    HIGH-VOLTAGE ELECTRIC APPARATUS 有权
    电气高压设备

    公开(公告)号：EP1367609B1

    公开(公告)日：2008-09-10

    申请号：EP02705086.3

    申请日：2002-03-06

    申请人： Hitachi, Ltd.

    发明人： SATO, T., c/o Hitachi Ltd, Hitachi Res. Lab. ,  TAKEUCHI, R., c/o Hitachi Ltd, Hitachi Res. Lab. ,  KAGA, H., c/o Hitachi Ltd, Instruments

    IPC分类号： H01B17/26 ,  H01B17/34 ,  H01J37/248

    CPC分类号： H01J37/248 ,  H01J2237/063

    摘要： It is necessary to secure a sufficient dielectric strength without increasing the size as a high-voltage apparatus in high-voltage connecting sections (13-11) of a high-voltage electric apparatus such as an ion beam processing observation pattern generator (1). An insulating liquid (13-113a) or a gas (13-113b) is encapsulated into a gap (13-113) between a power-feed side connection bushing (13-111) and a power-receiving side flange (13-112), and the connection bushing facing the gap (13-113) or the power-receiving side flange are treated by water repellent finishing (13-111c) in their surfaces. This constitution provides a small-sized electric apparatus of high dielectric strength for suppressing dew condensation or humidity absorption in the insulating surface in the gap in the high-voltage connecting section and for suppressing an increase in leakage current under a high-humidity environment.

    Arc suppressor for electron gun
    9.
    发明公开
    Arc suppressor for electron gun 失效
    Bogen-UnterdrückungsvorrichtungfürElektronenkanone。

    公开(公告)号：EP0550054A1

    公开(公告)日：1993-07-07

    申请号：EP92122089.3

    申请日：1992-12-29

    申请人： Etec Systems, Inc.

    发明人： Howard, Glen E. ,  Gesley, Mark A.

    IPC分类号： H01J37/248

    CPC分类号： H01J37/248 ,  H01J37/241 ,  H01J2237/0206

    摘要： An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor includes a resistance and an inductor in series with each electrode lead providing voltage or current to the various electrodes of the electron gun. The inductance is provided by a ferrite toroid which contains a plurality of holes in addition to the main central hole. The leads for each electrode are wrapped around the toroid through the various holes, with one hole being provided for each lead. Thus advantageously each lead is isolated magnetically from the others, reducing the transformer and capacitive effects that couple one lead to another.

    摘要翻译： 为例如使用的电子枪提供电弧抑制器。 在半导体光刻设备中。 电弧抑制器可以防止由于阴极功函数的变化或对发射极顶点的任何损坏而造成的电子枪的发射特性。 电弧抑制器包括与每个电极引线串联的电阻和电感器，为电子枪的各种电极提供电压或电流。 该电感由除了主中心孔之外还包含多个孔的铁氧体环形铁氧体提供。 每个电极的引线通过各种孔缠绕在环形环上，每个引线提供一个孔。 因此，有利地，每个引线与其它引线磁性隔离，减小了将一个引线耦合到另一引线的变压器和电容效应。