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公开(公告)号:EP3624173B1
公开(公告)日:2024-09-04
申请号:EP19184181.6
申请日:2019-07-03
CPC分类号: H01L21/568 , H01L24/19 , H01L24/96 , H01L2224/0237720130101 , H01L2224/040120130101 , H01L2224/0410520130101 , H01L2224/0512420130101 , H01L2224/0514720130101 , H01L2224/0556920130101 , H01L2224/0557220130101 , H01L2224/1210520130101 , H01L2224/13120130101 , H01L2224/1314720130101 , H01L2224/1622720130101 , H01L2224/7326720130101 , H01L2224/9420130101 , H01L2924/143120130101 , H01L2924/143220130101 , H01L2924/143620130101 , H01L2924/1816220130101 , H01L2924/35120130101