公开(公告)号：EP2564159B1

公开(公告)日：2016-04-06

申请号：EP11716162.0

申请日：2011-04-18

Applicant: Qualcomm Mems Technologies, Inc.

Inventor： ACER, Cenk ,  SHENOY, Ravindra, Vaman ,  BLACK, Justin, Phelps ,  PETERSEN, Kurt, Edward ,  GANAPATHI, Srinivasan, Kodaganallur ,  STEPHANOU, Philip, Jason

IPC: G01C19/5712 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01C19/5769 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  H01L41/25 ,  H01L41/311 ,  H01L41/312 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155

公开(公告)号：EP2564158B1

公开(公告)日：2016-04-06

申请号：EP11716161.2

申请日：2011-04-18

Applicant: Qualcomm Mems Technologies, Inc.

Inventor： ACAR, Cenk ,  SHENOY, Ravindra, Vaman ,  BLACK, Justin, Phelps ,  PETERSEN, Kurt, Edward ,  GANAPATHI, Srinivasan, Kodaganallur ,  STEPHANOU, Philip, Jason

IPC: G01C19/56 ,  G01P15/12

CPC classification number: G01C19/5769 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  H01L41/25 ,  H01L41/311 ,  H01L41/312 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155

公开(公告)号：EP2915594A1

公开(公告)日：2015-09-09

申请号：EP15153222.3

申请日：2015-01-30

Applicant: Samsung Medison Co., Ltd.

Inventor： Jin, Gil-ju ,  Park, Jung-lim

IPC: B06B1/06

CPC classification number: H01L41/31 ,  A61B8/14 ,  A61B8/4483 ,  B06B1/0622 ,  H01L41/22 ,  H01L41/25 ,  H01L41/27 ,  H01L41/29 ,  H01L41/311 ,  Y10T29/42

Abstract: Provided is an ultrasound proba and a method of manufacturing said probe. The method includes :preparing a backing layer having first and second surfaces with different heights due to forming a groove in the backing layer, wherein first and second electrodes are exposed on the first and second surfaces, respectively; forming a third electrode that is in contact with the first electrode; forming a base piezoelectric unit on the third electrode, the base piezoelectric unit including a piezoelectric layer; forming a piezoelectric unit by removing an upper region of the base piezoelectric unit; and forming a fourth electrode on the backing layer and the piezoelectric unit.

Abstract translation: 提供了一种超声波探头及其制造方法。 该方法包括：由于在背衬层中形成凹槽，制备具有不同高度的第一和第二表面的背衬层，其中第一和第二电极分别暴露在第一表面和第二表面上; 形成与所述第一电极接触的第三电极; 在所述第三电极上形成基底压电单元，所述基底压电单元包括压电层; 通过去除所述基底压电单元的上部区域来形成压电单元; 以及在背衬层和压电单元上形成第四电极。

公开(公告)号：EP2783271B1

公开(公告)日：2018-08-08

申请号：EP13822307.8

申请日：2013-06-26

Applicant: Immersion Corporation

Inventor： OLIEN, Neil ,  PARKER, Daniel ,  VISITACION, Allan ,  JONES, Trevor ,  YE, Frank

IPC: G06F3/041 ,  G06F3/01 ,  G06F3/048 ,  H01L41/25 ,  H01L41/311

CPC classification number: H01L41/35 ,  G06F3/016 ,  G06F3/041 ,  G06F3/0414 ,  G06F3/048 ,  H01L41/25 ,  H01L41/311 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126

Abstract: Methods of manufacturing a haptic device having a compliant suspension element. Segments of piezo material are coupled to at least one surface of at least one compliant suspension element, and the at least one suspension element is coupled to a touch screen component. The at least one suspension element is also coupled to a housing component. The segments of piezo material are configured to produce a force that moves the touch screen component relative to the housing component and thereby provide a haptic effect to a user of the touch screen component. In reaction to the force produced by the segments of piezo material, the at least one suspension element is configured to allow movement of the touch screen component relative to the housing component in a first direction and to limit movement between the touch screen component and the housing component in at least a second direction.

公开(公告)号：EP2783271A4

公开(公告)日：2015-10-28

申请号：EP13822307

申请日：2013-06-26

Applicant: IMMERSION CORP

Inventor： OLIEN NEIL ,  PARKER DANIEL ,  VISITACION ALLAN ,  JONES TREVOR ,  YE FRANK

IPC: G06F3/041 ,  G06F3/01

CPC classification number: H01L41/35 ,  G06F3/016 ,  G06F3/041 ,  G06F3/0414 ,  G06F3/048 ,  H01L41/25 ,  H01L41/311 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126

公开(公告)号：EP2564218A1

公开(公告)日：2013-03-06

申请号：EP11717859.0

申请日：2011-04-18

Applicant: Qualcomm Mems Technologies, Inc.

Inventor： STEPHANOU, Philip, Jason ,  ACAR, Cenk ,  SHENOY, Ravindra, Vaman ,  BURNS, David, William ,  BLACK, Justin, Phelps ,  PETERSEN, Kurt, Edward ,  GANAPATHI, Srinivasan, Kodaganallur

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08 ,  G01C19/56

CPC classification number: G01C19/5769 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  H01L41/25 ,  H01L41/311 ,  H01L41/312 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.

Abstract translation: 本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用加速度计的计算机程序。 一些这样的加速度计包括基板，第一多个电极，第二多个电极，附接到基板的第一锚固件，框架和检验块。 衬底可以基本上在第一平面中延伸。 证明物质可以附接到框架，可以基本上在第二平面中延伸，并且可以基本上被约束用于沿着第一和第二轴线的运动。 框架可以附接到第一锚固件，可以基本上在第二平面中延伸，并且可以基本上被约束用于沿着第二轴线的运动。 响应于沿着第一或第二轴的施加的横向加速度，证明物质的横向运动可导致第一或第二多个电极处的电容变化。

公开(公告)号：EP1172849B1

公开(公告)日：2006-04-26

申请号：EP01117039.6

申请日：2001-07-12

Applicant: Infineon Technologies AG

Inventor： Aigner, Robert ,  Marksteiner, Stephan ,  Elbrecht, Lueder

IPC: H01L21/822 ,  H03H3/02

CPC classification number: H01L21/3043 ,  H01L21/78 ,  H01L37/02 ,  H01L41/311 ,  H03H3/02

公开(公告)号：EP3362943A1

公开(公告)日：2018-08-22

申请号：EP16790788.0

申请日：2016-10-14

Applicant: Qualcomm Incorporated

Inventor： PANCHAWAGH, Hrishikesh Vijaykumar ,  GANTI, Suryaprakash ,  DJORDJEV, Kostadin Dimitrov ,  BURNS, David William ,  DICKINSON, Timothy Alan ,  KIDWELL JR, Donald William ,  SHENOY, Ravindra Vaman ,  LASITER, Jon Bradley ,  TANG, Hao-Yen ,  LU, Yipeng

IPC: G06K9/00 ,  G10K11/34 ,  B06B1/06 ,  B06B1/02

CPC classification number: H01L27/20 ,  B06B1/0207 ,  B06B1/0607 ,  G01S7/52028 ,  G06F3/0436 ,  G06K9/0002 ,  H01L27/1214 ,  H01L41/1132 ,  H01L41/311

Abstract: An ultrasonic sensor pixel includes a substrate, a piezoelectric micromechanical ultrasonic transducer (PMUT) and a sensor pixel circuit. The PMUT includes a piezoelectric layer stack including a piezoelectric layer disposed over a cavity, the cavity being disposed between the piezoelectric layer stack and the substrate, a reference electrode disposed between the piezoelectric layer and the cavity, and one or both of a receive electrode and a transmit electrode disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The sensor pixel circuit is electrically coupled with one or more of the reference electrode, the receive electrode and the transmit electrode and the PMUT and the sensor pixel circuit are integrated with the sensor pixel circuit on the substrate.

公开(公告)号：EP2345095B1

公开(公告)日：2013-09-04

申请号：EP09752805.3

申请日：2009-11-11

Applicant: Epcos AG

Inventor： RINNER, Franz ,  SOMITSCH,Dieter ,  RESZAT, Jan-Thorsten ,  GABL, Reinhard ,  GALLER, Martin ,  AUER, Christoph ,  KÜGERL, Georg

IPC: H01L41/047 ,  H01L41/22

CPC classification number: H01L41/313 ,  C23C4/02 ,  C23C4/08 ,  C23C4/12 ,  C23C4/129 ,  C23C4/131 ,  C23C4/134 ,  H01L41/0472 ,  H01L41/083 ,  H01L41/29 ,  H01L41/293 ,  H01L41/311 ,  Y10T29/42 ,  Y10T156/10

公开(公告)号：EP2564158A1

公开(公告)日：2013-03-06

申请号：EP11716161.2

申请日：2011-04-18

Applicant: Qualcomm Mems Technologies, Inc.

Inventor： ACAR, Cenk ,  SHENOY, Ravindra, Vaman ,  BLACK, Justin, Phelps ,  PETERSEN, Kurt, Edward ,  GANAPATHI, Srinivasan, Kodaganallur ,  STEPHANOU, Philip, Jason

IPC: G01C19/56 ,  G01P15/12

CPC classification number: G01C19/5769 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5747 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  H01L41/25 ,  H01L41/311 ,  H01L41/312 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.