HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES

    公开(公告)号:EP4235742A1

    公开(公告)日:2023-08-30

    申请号:EP22461518.7

    申请日:2022-02-28

    摘要: High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising:
    - several low-power- (LP-) generators (14, 16 ,18),
    ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component,
    ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18),

    - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18),
    - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20),
    - at least one, preferably several, most preferred all LP-generators (14, 16, 18) comprise a LP-generator-value limiting circuit (151), such as a voltage limiting circuit or a current limiting circuit.

    HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES

    公开(公告)号:EP4235738A1

    公开(公告)日:2023-08-30

    申请号:EP22461514.6

    申请日:2022-02-28

    摘要: High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising:
    - several low-power- (LP-) generators (14, 16 ,18),
    ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component,
    ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18),

    - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18),
    - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20),
    - wherein the HP-generator (10) is at least partially directly liquid cooled, in particular by immersed dielectric cooling liquid, in particular the LP-generators (14,16,18) are bathed by dielectric cooling liquid.

    HIGH POWER GENERATOR AND METHOD OF SUPPLYING HIGH POWER PULSES

    公开(公告)号:EP4235736A1

    公开(公告)日:2023-08-30

    申请号:EP22461512.0

    申请日:2022-02-28

    摘要: High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising:
    - several low-power- (LP-) generators (14, 16 ,18),
    ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component,
    ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18),

    - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18),
    - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20),
    - the control unit (22) is further configured to select the contribution of LP-generators (14, 16, 18) in a way to reduce voltage overshoots at the output of the HP-generator (10) and/or at a dedicated location on the load, in particular at the substrate of a plasma process.

    ELECTRONIC CIRCUIT WITH LOW NOISE DELAY CIRCUIT
    5.
    发明公开
    ELECTRONIC CIRCUIT WITH LOW NOISE DELAY CIRCUIT 有权
    具有不良噪声延迟电路电子电路

    公开(公告)号:EP1966889A1

    公开(公告)日:2008-09-10

    申请号:EP06842462.1

    申请日:2006-12-12

    申请人: NXP B.V.

    IPC分类号: H03K4/00 H03K3/00

    CPC分类号: H03K3/354 H03K4/502

    摘要: An electronic circuit comprises a delay circuit that with a chain of saw tooth delay stages (10a-d), coupled in a loop to form an oscillator for example. Each stage comprises an integrating circuit (104) and a current modulator (106) coupled to the integrating circuit (104). Each stage triggers a transition in the next stage when the integration result reaches a level defined by a reference voltage. Correlating circuitry (102, 30, 32, 34) is provided with current outputs to generate currents to the current modulators (106) and reference voltages for the saw tooth delay stages (10a-d). The reference voltages are generated at least partly from a common reference (102c), so that noise in the currents from the current modulators (106) and reference voltages is correlated in a way that at least partly cancels the effect of the noise on the delay time.

    CIRCUITRY FOR SUPPLYING A CONTROLLED SIGNAL TO A DRIVE SYSTEM
    6.
    发明公开
    CIRCUITRY FOR SUPPLYING A CONTROLLED SIGNAL TO A DRIVE SYSTEM 有权
    电路,用于产生控制的信号,用于驾驶员系统

    公开(公告)号:EP1285496A2

    公开(公告)日:2003-02-26

    申请号:EP01920956.8

    申请日:2001-02-05

    IPC分类号: H03K4/00

    摘要: Circuitry that provides alternating current to a load from a unipolar power supply. A current source in the circuitry controls current applied to the load. A first switch and a second switch are connected between the load and the current source and allow current to flow from the current source to the load in a first direction responsive to the first switch and the second switch being closed. A third switch and a fourth switch connected between the load and the current source allow current to flow from the current source to the load in a second direction responsive to the third switch and the fourth switch being closed.

    STEERABLE PULSE PHASE CONTROLLER.
    8.
    发明公开
    STEERABLE PULSE PHASE CONTROLLER. 失效
    应税脉冲相位校正器。

    公开(公告)号:EP0591460A4

    公开(公告)日:1995-05-24

    申请号:EP92915662

    申请日:1992-06-26

    申请人: BONDY DANIEL J

    发明人: LAWRENCE LUCAS G

    CPC分类号: H03K3/57 H03K3/35 H03K17/30

    摘要: An impedance-steerable circuit (40) for an industrial phase controller (200) inserts precise steerable trigger pulses (32) in the sine and cosine excursions of a sine wave of high-energy capacitive and related discharge systems. Multiple pulses and Barkhausen effects are eliminated. The controller (200) can lock capacitive discharge systems (100) into precise phase or, in extended embodiments, serve as a power controller for radar systems, laser systems, and beam weapons. Thyristors (242) and thyratrons provide steered elements (pulses) activated in a pulse-feedback mode.

    Digital input/analog drive positioning system
    10.
    发明公开
    Digital input/analog drive positioning system 失效
    数字-Eingang /模拟二极管驱动器,Positionierungssystem。

    公开(公告)号:EP0015319A2

    公开(公告)日:1980-09-17

    申请号:EP79105163.4

    申请日:1979-12-14

    IPC分类号: G06F3/153 G09G1/10 H03K4/00

    CPC分类号: G05B19/41 G09G1/10 G09G1/26

    摘要: In a digital input/analog drive positioning system, in order to simplify the circuitry of the absolute difference generator used to calculate the magnitude and sign of the difference between the digital target input and the digital current position value, the pre-adder (31) magnitude comparator is omitted. One input (36) to the adder contains complementing circuitry (34) as does the output from the adder. The carry-out (38) from the adder (31) is latched and used to select connection by complementing or carry handling in response to application of a carry-in signal as well as to determine the sign of the difference (line 43) if both input and value are positive, additional circuitry being required else.

    摘要翻译: 在数字输入/模拟驱动定位系统中,为了简化用于计算数字目标输入和数字电流位置值之差的幅度和符号的绝对差分发生器的电路,预加器(31) 幅度比较器被省略。 与加法器的输出一样,加法器的一个输入(36)包含补码电路(34)。 来自加法器(31)的进位(38)被锁存并用于响应于进位信号的应用而通过补充或进位处理来选择连接以及确定差异的符号(行43)如果 输入和值均为正,需要其他电路。