PROCÉDÉ DE CALIBRAGE D'UN CAPTEUR ANGULAIRE INERTIEL MICRO-USINÉ ET SYSTÈME DE CALIBRAGE

    公开(公告)号:EP4202362A1

    公开(公告)日:2023-06-28

    申请号:EP22216141.6

    申请日:2022-12-22

    申请人: THALES

    IPC分类号: G01C19/5719 G01C25/00

    摘要: Le procédé de calibrage d'un capteur angulaire inertiel micro-usiné (2) comprenant un support, au moins une masse vibrante mobile par rapport au support, au moins un transducteur d'excitation d'un mouvement de vibration de la masse vibrante, au moins un transducteur de détection d'une vibration de la masse vibrante, et au moins un transducteur électrostatique apte à appliquer une raideur électrostatique ajustable à la masse vibrante, le procédé de calibrage comprenant les étapes de réception par le capteur angulaire d'une excitation vibratoire prédéterminée émise par un dispositif d'excitation (18) distinct du transducteur d'excitation ; de mesure par le transducteur de détection de la vibration de la masse vibrante, pour obtenir un signal de mesure (S m ) à partir de ladite mesure par le transducteur de détection ; de transformation ; de détermination, de réglage, et d'application de la raideur électrostatique.

    SENSORELEMENT UND VERFAHREN ZUR ERFASSUNG VON EINER ERSTEN UND EINER ZWEITEN KOMPONENTE EINER PHYSIKALISCHEN GRÖßE
    6.
    发明公开
    SENSORELEMENT UND VERFAHREN ZUR ERFASSUNG VON EINER ERSTEN UND EINER ZWEITEN KOMPONENTE EINER PHYSIKALISCHEN GRÖßE 审中-公开
    传感器元件及方法首先检测和物理尺寸的第二组分

    公开(公告)号:EP2997386A1

    公开(公告)日:2016-03-23

    申请号:EP14719685.1

    申请日:2014-04-16

    申请人: Robert Bosch GmbH

    发明人: NEUL, Reinhard

    IPC分类号: G01P15/18 G01C19/5719

    摘要: The invention relates to a sensor element (100) for capturing a first and a second component of a physical variable (a). The sensor element (100) comprises a first measuring transducer (110) for measuring a first component, directed in a first measuring direction (115), of the physical variable (a). The sensor element (100) further comprises a second measuring transducer (120) for measuring a second component, directed in a second measuring direction (125), of the physical variable (a), wherein the first (110) and second (120) measuring transducers are formed or arranged on or in a carrier substrate (135), which contains a material on or in which measuring transducers (110, 120) can be produced during processing with a predefined processing method, said measuring transducers being formed to measure the physical variable (a) in a first (115) or second (125) measuring direction, wherein a measuring angle (130) between the first (115) and the second (125) measuring direction depends on the material of the carrier substrate (135).

    MEMS Gyroscopes with Reduced Errors
    7.
    发明公开
    MEMS Gyroscopes with Reduced Errors 有权
    MEMS陀螺仪具有减少错误

    公开(公告)号:EP2657648A3

    公开(公告)日:2015-09-23

    申请号:EP13163371.1

    申请日:2013-04-11

    IPC分类号: G01C19/5719 G01C19/574

    摘要: In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase (+) and anti-phase (-) drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.

    Capacitive Sensor
    8.
    发明授权
    Capacitive Sensor 有权
    电容式传感器

    公开(公告)号:EP2317328B1

    公开(公告)日:2015-04-15

    申请号:EP10013373.5

    申请日:2010-10-06

    摘要: A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.

    Angular Rate Sensor With Quadrature Error Compensation
    9.
    发明公开
    Angular Rate Sensor With Quadrature Error Compensation 审中-公开
    Winkelgeschwindigkeitssensor mit Quadraturfehlerkompensation

    公开(公告)号:EP2685211A1

    公开(公告)日:2014-01-15

    申请号:EP13173286.9

    申请日:2013-06-21

    发明人: Lin, Yizhen

    IPC分类号: G01C19/5719 G01C19/5733

    CPC分类号: G01C19/5719 G01C19/5733

    摘要: An angular rate sensor (20) includes a drive mass (36) flexibly coupled to a substrate (22). A sense mass (42) is suspended above the substrate (22) is and flexibly connected to the drive mass (36) via flexible support elements (44). A quadrature compensation electrode (24) is associated with the drive mass (36) and a sense electrode (28) is associated with the sense mass (42). The drive mass (36) and the sense mass (42) oscillate together relative to a sense axis (50) in response to quadrature error. The quadrature error produces a signal error component (78) between the quadrature compensation electrode (24) and the drive mass (36) and a signal error component (76) between the sense electrode (28) and the sense mass (42). The compensation and sense electrodes (24, 28) are coupled in reverse polarity so that the signal error component (78) substantially cancels the signal error component (76).

    摘要翻译: 角速率传感器(20)包括柔性地联接到基板(22)的驱动质量块(36)。 通过柔性支撑元件(44)将感测质量块(42)悬置在基板(22)上方并且柔性地连接到驱动块体(36)上。 正交补偿电极(24)与驱动质量块(36)相关联,并且感测电极(28)与感测质量块(42)相关联。 响应于正交误差,驱动质量块(36)和感测质量块(42)相对于感测轴线(50)一起振荡。 正交误差在正交补偿电极(24)和驱动质量块(36)之间产生信号误差分量(78)和感测电极(28)和感测质量块(42)之间的信号误差分量(76)。 补偿和感测电极(24,28)以相反极性耦合,使得信号误差分量(78)基本上消除信号误差分量(76)。

    MEMS Gyroscopes with Reduced Errors
    10.
    发明公开
    MEMS Gyroscopes with Reduced Errors 有权
    MEMS-Gyroskope mit reduzierten Fehlern

    公开(公告)号:EP2657648A2

    公开(公告)日:2013-10-30

    申请号:EP13163371.1

    申请日:2013-04-11

    IPC分类号: G01C19/5719 G01C19/574

    摘要: In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase (+) and anti-phase (-) drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.

    摘要翻译: 在梳状驱动振动陀螺仪中,驱动诱导的科里奥利加速度计偏移量通过在相对于用于角速率的速度信号的同步(+)和反相( - )驱动的相等时间内解调输出而被有效地消除 解调。 这可以减少或消除另外需要校准的相应的热和晶粒应力作用。