摘要:
Le procédé de calibrage d'un capteur angulaire inertiel micro-usiné (2) comprenant un support, au moins une masse vibrante mobile par rapport au support, au moins un transducteur d'excitation d'un mouvement de vibration de la masse vibrante, au moins un transducteur de détection d'une vibration de la masse vibrante, et au moins un transducteur électrostatique apte à appliquer une raideur électrostatique ajustable à la masse vibrante, le procédé de calibrage comprenant les étapes de réception par le capteur angulaire d'une excitation vibratoire prédéterminée émise par un dispositif d'excitation (18) distinct du transducteur d'excitation ; de mesure par le transducteur de détection de la vibration de la masse vibrante, pour obtenir un signal de mesure (S m ) à partir de ladite mesure par le transducteur de détection ; de transformation ; de détermination, de réglage, et d'application de la raideur électrostatique.
摘要:
The invention relates to a sensor element (100) for capturing a first and a second component of a physical variable (a). The sensor element (100) comprises a first measuring transducer (110) for measuring a first component, directed in a first measuring direction (115), of the physical variable (a). The sensor element (100) further comprises a second measuring transducer (120) for measuring a second component, directed in a second measuring direction (125), of the physical variable (a), wherein the first (110) and second (120) measuring transducers are formed or arranged on or in a carrier substrate (135), which contains a material on or in which measuring transducers (110, 120) can be produced during processing with a predefined processing method, said measuring transducers being formed to measure the physical variable (a) in a first (115) or second (125) measuring direction, wherein a measuring angle (130) between the first (115) and the second (125) measuring direction depends on the material of the carrier substrate (135).
摘要:
In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase (+) and anti-phase (-) drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.
摘要:
A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.
摘要:
An angular rate sensor (20) includes a drive mass (36) flexibly coupled to a substrate (22). A sense mass (42) is suspended above the substrate (22) is and flexibly connected to the drive mass (36) via flexible support elements (44). A quadrature compensation electrode (24) is associated with the drive mass (36) and a sense electrode (28) is associated with the sense mass (42). The drive mass (36) and the sense mass (42) oscillate together relative to a sense axis (50) in response to quadrature error. The quadrature error produces a signal error component (78) between the quadrature compensation electrode (24) and the drive mass (36) and a signal error component (76) between the sense electrode (28) and the sense mass (42). The compensation and sense electrodes (24, 28) are coupled in reverse polarity so that the signal error component (78) substantially cancels the signal error component (76).
摘要:
In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase (+) and anti-phase (-) drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.