Nano-wires and method of manufacturing the same
    91.
    发明专利
    Nano-wires and method of manufacturing the same 审中-公开
    纳米线及其制造方法

    公开(公告)号:JP2006248893A

    公开(公告)日:2006-09-21

    申请号:JP2006062815

    申请日:2006-03-08

    摘要: PROBLEM TO BE SOLVED: To provide a method of manufacturing nano-wires which are grown by controlling diameters and distribution of nano-wires, and nano-wires accurately grown using the method. SOLUTION: The method of manufacturing the nano-wires includes (1) a step for forming microgrooves having a plurality of microcavities regularly on the surface of a silicon substrate, (2) a step for forming a metal layer on the silicon substrate by depositing a material which acts as a catalyst to form nano-wires on the silicon substrate, (3) a step for agglomerating the metal layer within the microgrooves on the surface of the silicon substrate by heating the metal layer to form catalysts and (4) a step for growing the nano-wires between the catalysts and the silicon substrate using a thermal process. COPYRIGHT: (C)2006,JPO&NCIPI

    摘要翻译: 要解决的问题:提供一种通过控制纳米线的直径和分布而生长的纳米线的制造方法,以及使用该方法精确生长的纳米线。 解决方案:制造纳米线的方法包括(1)在硅衬底的表面上规则地形成具有多个微腔的微槽的步骤,(2)在硅衬底上形成金属层的步骤 通过沉积作为催化剂的材料在硅衬底上形成纳米线,(3)通过加热金属层形成催化剂和(4)在硅衬底的表面上的微槽内的金属层附聚的步骤 )使用热处理在催化剂和硅衬底之间生长纳米线的步骤。 版权所有(C)2006,JPO&NCIPI

    Optical member including antireflection film and method for producing the same
    98.
    发明专利
    Optical member including antireflection film and method for producing the same 有权
    包括抗反射膜的光学构件及其制造方法

    公开(公告)号:JP2014098885A

    公开(公告)日:2014-05-29

    申请号:JP2013054850

    申请日:2013-03-18

    摘要: PROBLEM TO BE SOLVED: To provide an optical member which can be produced with high productivity and includes an antireflection film having sufficient optical characteristics.SOLUTION: The optical member includes an antireflection film 19 comprising a transparent thin film layer 15 and a transparent finely rugged layer 18 essentially comprising an alumina hydrate, disposed in this order on a surface of a transparent substrate 10. The transparent thin film layer 15 comprises, successively from the transparent substrate 10 side, an alumina layer 11, a water barrier layer 12 having a refractive index lower than that of the alumina layer and serving a water barrier for the alumina layer 11, and a flattening layer 13 essentially comprising an alumina hydrate and having a refractive index lower than that of the water barrier layer 12, in which the thickness of the water barrier layer 12 is 70 nm or less.

    摘要翻译: 要解决的问题:提供一种可以以高生产率制造的光学构件,并且包括具有足够光学特性的抗反射膜。解决方案:光学构件包括防反射膜19,其包括透明薄膜层15和透明细小凹凸层 18基本上包括水合氧化铝,其依次设置在透明基板10的表面上。透明薄膜层15依次由透明基板10侧包括氧化铝层11,具有折射率的防水层12 低于氧化铝层并且用于氧化铝层11的防水层,以及基本上包含氧化铝水合物并且具有低于防水层12的折射率的平坦化层13,其中水的厚度 阻挡层12为70nm以下。