摘要:
A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma ( 22 ) is ignited in a gaseous medium between at least two electrodes ( 14, 16 ) in a discharge space ( 12 ), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt ( 24 ), which is applied to a surface in said discharge space ( 12 ) and at least partially evaporated by an energy beam, in particular by a laser beam ( 20 ).
摘要:
PROBLEM TO BE SOLVED: To provide a small-sized thin layer activation device utilizing a laser driving proton beam. SOLUTION: This thin layer activation device using a laser driving proton beam is equipped with: a proton beam generation part 10 constituted of a high-intensity laser generation device 2 and a vacuum container 3, for generating the laser driving proton beam; and an activation part 20 for performing thin layer activation by allowing the proton beam to collide with an activation object 5. The high-intensity laser generation device 2 generates high-intensity laser light having a laser intensity of 10 17 W/cm 2 -10 22 W/cm 2 . The vacuum container 3 is equipped with: a laser light introduction part 31 for introducing the high-intensity laser light; a condensing mirror 11 for condensing the high-intensity laser light; a target 12 with which the laser light focused by the condensing mirror 11 collides; a debris shield 13 provided on an orbit of the proton beam diverging from the target 12; and a take-out window 33 for taking out the laser driving proton beam 17 into the atmosphere. COPYRIGHT: (C)2011,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide an X-ray imaging apparatus and an X-ray imaging method solving a problem of a refraction contrast method.SOLUTION: The X-ray imaging apparatus that obtains phase change information of X-rays by a detected object includes: a dividing element 103 spatially dividing the X-rays generated from an X-ray generating means 101; an attenuating means 105 with a plurality of attenuating elements 204, 404 arranged and continuously changed in the transmission quantity of X-rays according to the incident positions of the X-rays divided by the dividing element 103; and an intensity detecting means 106 for detecting the intensity of the X-rays attenuated by the attenuating means 105.
摘要:
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electron emitting element easily manufacturable in the atmosphere, and capable of stably and satisfactorily emitting electrons. SOLUTION: After applying conductive particulate dispersion liquid in which conductive particulates 6 are dispersed in a dispersion solvent, insulator particulate dispersion liquid in which insulator particulates 5 each having an average particle diameter larger than that of the conductive particulate 6 are dispersed is applied onto an electrode substrate 2 to form the electron accelerating layer 4 of this electron emitting element 1. COPYRIGHT: (C)2011,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide an electron emitting element capable of improving an amount of electron emission since a thin electrode can be thinned down to a moderate thickness. SOLUTION: This electron emitting element 1 includes an electron accelerating layer 4 between an electrode substrate 2 and a thin film electrode 3, and the electron accelerating layer 4 contains an insulator particulate 5 and at least either one of a conductive particulate 6 having an average particle diameter smaller than that of the insulator particulate 5 or a basic dispersant 60. The surface roughness of the electron accelerating layer 4 is not more than 0.2 μm in centerline average roughness (Ra), and the layer thickness of the thin electrode 3 is not more than 100 nm. COPYRIGHT: (C)2011,JPO&INPIT