Defect inspection apparatus and defect inspection method
    15.
    发明专利
    Defect inspection apparatus and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号:JP2012032252A

    公开(公告)日:2012-02-16

    申请号:JP2010171333

    申请日:2010-07-30

    Abstract: PROBLEM TO BE SOLVED: To solve such a problem that it is difficult to quickly and highly accurately detect a defect and calculate the size of the detect without applying thermal damage to a sample in a conventional technique.SOLUTION: In a defect inspection method, illuminating light of which the illumination intensity distribution is substantially uniform in one direction on the surface of a sample is applied to the surface of the sample, a plurality of scattered light components outgoing to a plurality of mutually different directions out of scattered light from the surface of the sample are detected, a plurality of scattered light detection signals corresponding to the scattered light components are obtained, at least one of the plurality of scattered light detection signals is processed to determine the existence of a defect, at least one of the plurality of scattered light detection signals corresponding to respective positions determined as defective by the processing is processed to determine the size of the defect, and a position and a defect size on the surface of the sample for each position determined as defective are displayed.

    Abstract translation: 要解决的问题为了解决在传统技术中难以快速和高精度地检测缺陷并且计算检测尺寸而不对样品造成热损伤的问题。 解决方案:在缺陷检查方法中,将样品表面上的一个方向上的照明强度分布基本上均匀的照明光施加到样品的表面,多个散射光分量输出到多个 检测出来自样品表面的散射光的相互不同的方向,获得与散射光分量对应的多个散射光检测信号,对多个散射光检测信号中的至少一个进行处理,以确定存在 处理出与处理确定为缺陷的各个位置对应的多个散射光检测信号中的至少一个,以确定缺陷的尺寸,以及每个样品的表面上的位置和缺陷尺寸 显示确定为有缺陷的位置。 版权所有(C)2012,JPO&INPIT

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