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    検査システムの動作プログラムを生成する装置および方法
    1.
    发明专利
    検査システムの動作プログラムを生成する装置および方法 有权

    公开(公告)号：JP2018132331A

    公开(公告)日：2018-08-23

    申请号：JP2017024201

    申请日：2017-02-13

    Applicant: ファナック株式会社

    Inventor： 吉田 順一郎 ,  藁科 文和

    IPC: G01B11/00 ,  B25J9/22 ,  G05B19/42 ,  G01N21/84

    CPC classification number: G01N21/89 ,  G01N2201/10 ,  Y02P90/265

    Abstract: 【課題】ワークの被検査面の傷を検出するために該被検査面を撮像する動作を検査システムに実行させるための動作プログラムを迅速に構築可能とする技術が求められている。 【解決手段】装置50は、ワークの図面データを取得する図面取得部52と、図面データにおける被検査面の指定を受け付ける指定受付部54と、被検査面が撮像部16の視野に入るようにワークと撮像部16とを位置決めしたときの移動機構14の位置を、目標位置として取得する目標位置取得部60と、目標位置に基づいて、移動機構14の移動動作と撮像部16の撮像動作とを制御するための動作プログラムを生成するプログラム生成部62とを備える。 【選択図】図2

    Photo-detector
    7.
    发明专利
    Photo-detector 有权
    光电探测器

    公开(公告)号：JP2014095601A

    公开(公告)日：2014-05-22

    申请号：JP2012246605

    申请日：2012-11-08

    Applicant: Sharp Corp ,  シャープ株式会社

    Inventor： WATANABE YUKIO

    IPC: G01N21/64

    CPC classification number: G01J1/0411 ,  G01J1/0422 ,  G01J1/0488 ,  G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/10 ,  G01N2201/103 ,  G02B17/08 ,  G02B19/0028

    Abstract: PROBLEM TO BE SOLVED: To improve light condensing efficiency while restricting an increase in size of an objective lens.SOLUTION: A photo-detector comprises: an objective lens element (17) configured to condense light from an object (16) being measured; and a photo-detection element configured to detect light condensed by the objective lens element (17). The objective lens element (17) includes a central portion (28) configured to condense light by refraction, and a peripheral portion (29) located in the vicinity of the central portion (28) and configured to condense light by reflection. This makes it possible to condense even light at a large radiation angle, which a normal convex lens cannot condense, and to improve condensing efficiency, thus increasing sensitivity by means of the photo-detection element.

    Abstract translation: 要解决的问题：在限制物镜尺寸增加的同时提高聚光效率。解决方案：一种光检测器，包括：物镜（17），被配置为冷凝被测物体（16）的光; 以及被配置为检测由所述物镜元件（17）会聚的光的光检测元件。 物镜元件（17）包括被配置为通过折射来冷凝光的中心部分（28）和位于中心部分（28）附近的周边部分（29），并被配置为通过反射来冷凝光。 这使得可以以普通的凸透​​镜不能冷凝的大的辐射角冷凝均匀的光，并且提高冷凝效率，从而通过光检测元件增加灵敏度。

    Defect inspection apparatus and defect inspection method
    9.
    发明专利
    Defect inspection apparatus and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号：JP2012032252A

    公开(公告)日：2012-02-16

    申请号：JP2010171333

    申请日：2010-07-30

    Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    Inventor： URANO YUTA ,  MARUYAMA SHIGENOBU ,  NAKAO TOSHIYUKI ,  HONDA TOSHIFUMI ,  SHIBATA YUKIHIRO

    IPC: G01N21/956 ,  G01B11/30

    CPC classification number: G01N21/94 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4711 ,  G01N2021/8867 ,  G01N2021/8874 ,  G01N2201/0806 ,  G01N2201/10

    Abstract: PROBLEM TO BE SOLVED: To solve such a problem that it is difficult to quickly and highly accurately detect a defect and calculate the size of the detect without applying thermal damage to a sample in a conventional technique.SOLUTION: In a defect inspection method, illuminating light of which the illumination intensity distribution is substantially uniform in one direction on the surface of a sample is applied to the surface of the sample, a plurality of scattered light components outgoing to a plurality of mutually different directions out of scattered light from the surface of the sample are detected, a plurality of scattered light detection signals corresponding to the scattered light components are obtained, at least one of the plurality of scattered light detection signals is processed to determine the existence of a defect, at least one of the plurality of scattered light detection signals corresponding to respective positions determined as defective by the processing is processed to determine the size of the defect, and a position and a defect size on the surface of the sample for each position determined as defective are displayed.

    Abstract translation: 要解决的问题为了解决在传统技术中难以快速和高精度地检测缺陷并且计算检测尺寸而不对样品造成热损伤的问题。 解决方案：在缺陷检查方法中，将样品表面上的一个方向上的照明强度分布基本上均匀的照明光施加到样品的表面，多个散射光分量输出到多个 检测出来自样品表面的散射光的相互不同的方向，获得与散射光分量对应的多个散射光检测信号，对多个散射光检测信号中的至少一个进行处理，以确定存在 处理出与处理确定为缺陷的各个位置对应的多个散射光检测信号中的至少一个，以确定缺陷的尺寸，以及每个样品的表面上的位置和缺陷尺寸 显示确定为有缺陷的位置。 版权所有（C）2012，JPO＆INPIT

    Method, substrate, and apparatus for fine particle measurement
    10.
    发明专利
    Method, substrate, and apparatus for fine particle measurement 有权
    方法，基板和微粒测量装置

    公开(公告)号：JP2009115473A

    公开(公告)日：2009-05-28

    申请号：JP2007285671

    申请日：2007-11-02

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： FURUKI MOTOHIRO ,  IMANISHI SHINGO ,  SHINODA MASATAKA ,  SUZUKI AKITOSHI ,  MIYAKE KAZUJI

    IPC: G01N15/14

    CPC classification number: G01N15/1425 ,  G01N15/1436 ,  G01N15/1459 ,  G01N15/1484 ,  G01N21/6428 ,  G01N21/645 ,  G01N2015/1006 ,  G01N2015/1497 ,  G01N2021/058 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/10 ,  G01N2201/11

    Abstract: PROBLEM TO BE SOLVED: To provide a measuring method capable of obtaining high accuracy of measurement, when scanning light with respect to a plurality of channels for samples which are arranged on a substrate, and optically measuring fine particles introduced to the channels for samples.
    SOLUTION: In the fine particle measuring method for scanning light with respect to the plurality of channels 111 for samples which are arranged on the substrate 11, and optically measuring fine particles introduced to the channels 111 for samples, by sequentially irradiating light to at least two reference regions 113, which are juxtaposed to the channels 111 for samples and detecting changes in the optical characteristics generated in the light by the reference regions 113, the emission timing of the light to the channels 111 for samples is controlled.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题：为了提供一种能够获得高精度测量的测量方法，当相对于布置在基板上的样品的多个通道扫描光时，并且光学测量引入到通道的细颗粒 样品。 解决方案：在相对于布置在基板11上的样品的多个通道111扫描光的微粒测量方法中，并且通过顺序地将光照射到 至少两个参考区域113，它们与采样的通道111并列并且检测由参考区域113在光中产生的光学特性的变化，控制对样品的通道111的光的发射定时。 版权所有（C）2009，JPO＆INPIT

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