公开(公告)号：JP2007200588A

公开(公告)日：2007-08-09

申请号：JP2006014665

申请日：2006-01-24

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01B19/00 ,  H01B3/00 ,  H01L21/316 ,  H01L41/18 ,  H01L41/187 ,  H01L41/317 ,  H01L41/39

摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a composition for ferroelectric thin film formation excelling in storage stability and uniformity of a film in applying and drying it. SOLUTION: Metallic alkoxide, metallic acetate, metal acetylacetonate salt, amines and an alcohol solvent are mixed, this mixture 1 is heated by using a distillation column 3, and refluxed while removing a part of an evaporant, and water is replenished, whereby a colloid solution for an MOD method is formed. COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：提供一种制造铁电薄膜形成用组合物的方法，其优异的涂布和干燥中的膜的保存稳定性和均匀性。 溶液：将金属醇盐，金属乙酸盐，金属乙酰丙酮盐，胺和醇溶剂混合，通过使用蒸馏塔3加热该混合物1，同时除去一部分蒸发剂并回流，并补充水， 从而形成用于MOD方法的胶体溶液。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007197227A

公开(公告)日：2007-08-09

申请号：JP2006014666

申请日：2006-01-24

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： C04B35/49

摘要： PROBLEM TO BE SOLVED: To provide a method of preparing a composition for forming a PZT thin film having uniform metal concentration and excellent preservation stability. SOLUTION: A colloid solution for a metal organic deposition (MOD) method is prepared by mixing titanium alkoxide, lead acetate hydrate, zirconium acetyl acetonate, amine and an alcohol solvent and heating the mixture 1 while totally refluxing. COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 解决的问题：提供一种制备具有均匀的金属浓度和优异的保存稳定性的PZT薄膜的形成用组合物的方法。 解决方案：通过混合钛醇盐，乙酸铅水合物，乙酰丙酮锆，胺和醇溶剂制备金属有机沉积（MOD）方法的胶体溶液，并在完全回流的同时加热混合物1。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006245619A

公开(公告)日：2006-09-14

申请号：JP2006166232

申请日：2006-06-15

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI ,  SUMI KOJI ,  MURAI MASAMI ,  QIU HONG ,  MORIYA SOICHI ,  NISHIWAKI MANABU

IPC分类号： G01L1/16 ,  C23C18/12 ,  C30B29/32 ,  H01L41/09 ,  H01L41/187 ,  H01L41/29 ,  H01L41/318 ,  H01L41/39

CPC分类号： C23C18/1254 ,  C23C18/1216 ,  C23C18/1225 ,  H01L41/1876 ,  H01L41/318 ,  Y10T29/42

摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric substance element, having improved piezoelectric and breakdown voltage characteristics. SOLUTION: The method for manufacturing the piezoelectric substance element is provided with a first process of applying a first sol for forming a piezoelectric substance film on a substrate, where a lower electrode is formed, a second process of applying a second sol for forming the piezoelectric film after conducting the first process at least once, and a third process of heat treating at a predetermined temperature, after the second process. The first and second sols are provided with a composition, capable of forming the piezoelectric substance film, having a perovskite-type crystal structure expressed by general Formula A x B y O 3 . The content of substance composing an A site of the first sol is larger than that of the second sol. COPYRIGHT: (C)2006,JPO&NCIPI

摘要翻译： 要解决的问题：提供一种具有改进的压电和击穿电压特性的压电体元件的制造方法。 解决方案：制造压电体元件的方法设置有在形成下电极的基板上施加用于形成压电体膜的第一溶胶的第一工序，将形成第二溶胶的第二工序 在第一工序进行至少一次之后形成压电膜，以及在第二工序之后，以规定温度进行热处理的第三工序。 第一和第二溶胶具有能够形成具有由通式A表示的钙钛矿型晶体结构的压电体膜的组合物， SB> 3 。 构成第一溶胶的A位点的物质的含量大于第二溶胶的含量。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2006196547A

公开(公告)日：2006-07-27

申请号：JP2005004358

申请日：2005-01-11

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L41/08 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22 ,  H01L41/317 ,  H01L41/43

摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezo-electric element which improves the piezo-electric characteristic of a piezoelectric material layer, and can be equalized comparatively easily, and to provide a method of manufacturing a liquid injection head.
SOLUTION: The method of manufacturing the piezo-electric element includes a step of forming a lower electrode layer 60 to one surface side of a substrate 10, a step of forming a piezo-electric material layer 70 made of a plurality of layers of ferroelectric film on the lower electrode layer, and a step of forming an upper electrode film 80 on the piezoelectric material layer. The step of forming the piezoelectric material layer includes at least a coating step of forming the ferroelectric precursor film by applying the ferroelectric material on the lower electrode layer, a drying step of drying the ferroelectric precursor film, a degreasing step of degreasing the ferroelectric precursor film, and a calcinating step of calcinating the ferroelectric material precursor film. The heating temperature in the previous step before the calcinating step of the step of forming the piezo-electric material layer is changed according to the thermal hysteresis of the lower electrode layer.
COPYRIGHT: (C)2006,JPO&NCIPI

摘要翻译： 解决的问题：提供一种提高压电材料层的压电特性的压电元件的制造方法，并且可以相对容易地相等，并且提供一种制造液体注入头的方法 。 解决方案：制造压电元件的方法包括在基板10的一个表面侧形成下电极层60的步骤，形成由多层形成的压电材料层70的步骤 的下电极层上的铁电体膜，以及在压电体层上形成上电极膜80的工序。 形成压电材料层的步骤至少包括通过在下电极层上施加铁电材料形成铁电前体膜的涂布步骤，干燥铁电前体膜的干燥步骤，将铁电前体膜脱脂的脱脂步骤 以及煅烧铁电材料前体膜的煅烧步骤。 根据下电极层的热滞，改变形成压电材料层的步骤的煅烧步骤之前的前一步骤中的加热温度。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2004160947A

公开(公告)日：2004-06-10

申请号：JP2002332361

申请日：2002-11-15

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B05B1/14 ,  B05D7/24 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22 ,  H01L41/23 ,  H01L41/29

摘要： PROBLEM TO BE SOLVED: To provide a liquid jet head of which the mounting reliability is enhanced by certainly connecting a lead electrode and drive wiring, a manufacturing method therefor and a liquid jet device.
SOLUTION: The liquid jet head is equipped with a flow channel forming substrate 10 to which a pressure generating chamber 12 communicating with a nozzle orifice for ejecting a liquid is formed, the piezoelectric element 300, which comprises a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80, provided on one surface of the flow channel forming substrate 10 through a vibration plate, the seal substrate 30 bonded to the surface on the side of the piezoelectric element 300 of the flow channel forming substrate 10 to have a piezoelectric element holding part 31 for sealing the piezoelectric element 300 and the lead electrode 90 drawn out from at least one electrode 80 of the piezoelectric element 300 to the outside of the piezoelectric element holding part 31. In this liquid jet head, the flow channel forming substrate 10 and the seal substrate 30 are bonded by an adhesive 100 kneaded with a granular insulating material 101 to regulate the flow-out amount of the adhesive 100.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2012213968A

公开(公告)日：2012-11-08

申请号：JP2011081695

申请日：2011-04-01

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAZAMA HIRONOBU ,  KAMEI HIROYUKI ,  HOKARI YOSHIHIRO ,  TAKABE HONKI

IPC分类号： B41J2/16

摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid ejecting head, which can secure a preferable hysteresis characteristic even when removing surface contamination of a pressure generating element by magnetron dry etching.SOLUTION: The method for manufacturing a liquid ejecting head includes: a surface removing step of removing the surface contamination of the pressure generating element by magnetron dry etching; and a wiring step of laying wiring on the pressure generating element, wherein a magnetron application current in the surface removing step is configured based on a surface removal amount of the pressure generating element and a variation in hysteresis characteristic in association with the surface removal.

摘要翻译： 要解决的问题：提供一种液体喷射头的制造方法，即使通过磁控干法蚀刻去除压力产生元件的表面污染，其也可以确保优选的滞后特性。 解决方案：液体喷射头的制造方法包括：表面去除步骤，通过磁控干法蚀刻去除压力产生元件的表面污染; 以及在所述压力发生元件上布置布线的布线步骤，其中，所述表面去除步骤中的磁控管施加电流基于所述压力产生元件的表面去除量和与所述表面去除相关联的滞后特性的变化来构造。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2009018551A

公开(公告)日：2009-01-29

申请号：JP2007184893

申请日：2007-07-13

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： TAKABE HONKI ,  KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B41J2/055

摘要： PROBLEM TO BE SOLVED: To provide an actuator in which the occurrence of a crack of a piezoelectric element due to a longitudinal tensile stress acting on the piezoelectric element from a diaphragm can be surely prevented when the piezoelectric element bends by being applied with voltage, and a liquid jet head using the same and a liquid jet apparatus.
SOLUTION: The actuator is provided with: the diaphragm disposed on a substrate; and the piezoelectric element 300 comprising a lower electrode 60 disposed on the diaphragm, a piezoelectric layer 70 disposed on the lower electrode 60 and an upper electrode 80 disposed on the piezoelectric layer 70. The piezoelectric layer 70 is provided with a plurality of recessed parts 71 which have the depth to substantially separate the piezoelectric layer 70, are disposed across the transverse direction. The recessed parts 71 are spaced at prescribed intervals in the longitudinal direction of the piezoelectric layer 70, and the upper electrode 80 is continuously formed within the recessed parts 71 of the piezoelectric layer 70 as well.
COPYRIGHT: (C)2009,JPO&INPIT

摘要翻译： 要解决的问题：提供一种致动器，其中当通过施加压电元件弯曲时，可以可靠地防止由于由隔膜作用在压电元件上的纵向拉伸应力而产生压电元件的裂纹的致动器 电压，以及使用其的液体喷射头和液体喷射装置。

解决方案：致动器设置有：隔膜设置在基板上; 并且压电元件300包括设置在隔膜上的下电极60，设置在下电极60上的压电层70和设置在压电层70上的上电极80.压电层70设置有多个凹部71 其具有使压电层70基本分离的深度，横跨横向设置。 凹部71在压电层70的长度方向上以规定间隔隔开，上部电极80也连续形成在压电体层70的凹部71内。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2009016625A

公开(公告)日：2009-01-22

申请号：JP2007177763

申请日：2007-07-05

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： TAKABE HONKI ,  KAMEI HIROYUKI

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  H01L41/18 ,  H01L41/22 ,  H01L41/33 ,  H01L41/39

摘要： PROBLEM TO BE SOLVED: To provide an actuator that can prevent cracks from being generated at a piezoelectric substance element layer comparatively easily and assuredly, keeping an excellent displacement behavior, and to provide a liquid injection head and a liquid injection apparatus.
SOLUTION: The actuator includes diaphragms 50, 55 provided on a substrate, and a piezoelectric substance element 300 having lower electrodes 60 provided on the diaphragms 50, 55, piezoelectric substance element layers 70 formed on the lower electrodes 60 and upper electrodes 80 provided on the piezoelectric substance element layers 70. Between the lower electrodes 60 and the upper electrodes 80 on the piezoelectric substance element 300, many low dielectric constant layers 75 with given widths composed of materials with dielectric constants lower than that of the piezoelectric substance element layer 70 are formed at given intervals along the longitudinal direction of the piezoelectric substance element 300.
COPYRIGHT: (C)2009,JPO&INPIT

摘要翻译： 要解决的问题：提供能够相对容易且可靠地防止在压电体元件层产生裂纹的致动器，保持优异的位移特性，以及提供液体注入头和液体注入装置。 解决方案：致动器包括设置在基板上的隔膜50,55和设置在隔膜50,55上的下电极60的压电体元件300，形成在下电极60和上电极80上的压电体元件层70 在压电体元件层70的下部电极60与上部电极80之间设置许多具有由介电常数低于压电体元件层的材料构成的给定宽度的低介电常数层75 70以沿压电体元件300的纵向的给定间隔形成。版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008120644A

公开(公告)日：2008-05-29

申请号：JP2006308368

申请日：2006-11-14

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： C04B35/49 ,  C04B35/491 ,  H01L41/187 ,  H01L41/39 ,  H01L41/43

摘要： PROBLEM TO BE SOLVED: To provide a composition for forming a ferroelectric film which can form a ferroelectric film by an MOD method and by a low temperature firing, and to provide its manufacturing method and a manufacturing method of a ferroelectric film using it. SOLUTION: The composition for forming a ferroelectric film is one that is used for forming a ferroelectric film by the MOD method and contains an organometallic compound containing lead (Pb) and zirconium (Zr) and a methyl group and a carboxylate group, and a compound of a metal other than lead and zirconium. COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：提供一种通过MOD法和低温烧制形成铁电体膜的铁电体膜的组合物，并提供其使用它的铁电体膜的制造方法和制造方法 。 解决方案：用于形成铁电体膜的组合物是用于通过MOD法形成铁电体膜的组合物，并且含有含铅（Pb）和锆（Zr）以及甲基和羧酸酯基的有机金属化合物， 和除铅和锆之外的金属的化合物。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008117794A

公开(公告)日：2008-05-22

申请号：JP2006296678

申请日：2006-10-31

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI ,  SUMI KOJI

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  H01L41/187 ,  H01L41/22 ,  H01L41/331

摘要： PROBLEM TO BE SOLVED: To provide an actuator in which the deformation quantity of a vibration plate due to driving of a piezoelectric element can be improved while maintaining driving durability of the vibration plate in a good condition, and to provide a manufacturing method thereof, a liquid jetting head and a liquid jetting device.
SOLUTION: The actuator has a plurality of piezoelectric elements 300 each having a lower electrode 60 provided on one surface side of a substrate 10, a piezoelectric layer 70 provided on the lower electrode 60 and an upper electrode 80 provided on the piezoelectric layer 70. The piezoelectric layer 70 of each of the piezoelectric elements 300 has a thickness relatively larger in its both end side than in its center portion, in a cross section in a short hand direction of the piezoelectric element 300.
COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：提供一种致动器，其中可以在保持振动板的驱动耐久性的同时改善由于驱动压电元件而产生的振动板的变形量，并提供制造方法 液体喷射头和液体喷射装置。 解决方案：致动器具有多个压电元件300，每个压电元件300具有设置在基板10的一个表面侧的下电极60，设置在下电极60上的压电层70和设置在压电层上的上电极80 每个压电元件300的压电层70在其两端侧的厚度比在其中心部分相对于压电元件300的短方向的横截面相对较大。厚度（（ C）2008，JPO＆INPIT