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    Electron beam exposure system
    31.
    发明专利
    Electron beam exposure system 有权
    电子束曝光系统

    公开(公告)号：JP2010171452A

    公开(公告)日：2010-08-05

    申请号：JP2010088024

    申请日：2010-04-06

    Applicant: Mapper Lithography Ip Bv ,  マッパー・リソグラフィー・アイピー・ビー.ブイ.

    Inventor： WIELAND JAN-JACO MARCO ,  KAMPHERBEEK BERT JAN ,  KRUIT PIETER ,  ALEXANDER HENDRIK VINCENT VAN VEEN

    IPC: H01L21/027 ,  A61N5/00 ,  G01Q30/02 ,  G01Q30/08 ,  G03B1/00 ,  H01J37/08 ,  H01J37/30 ,  H01J37/304 ,  H01J37/317

    CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

    Abstract: PROBLEM TO BE SOLVED: To provide an electron beam exposure system. SOLUTION: The electron beam exposure system transfers a pattern onto the surface of a target (14). The electron beam exposure system includes: a beamlet generator generating a plurality of electron beamlets (5a, 5b); a modulation array that includes a plurality of modulators modulating intensity of the electron beamlets and receives the plurality of electron beamlets; a controller connected to the modulation array for controlling the respective modulators independently; a regulator operatively connected to the respective modulators so that control signals of the respective modulators are adjusted individually; a convergent electron optical system including an array of electrostatic lenses (7), where each focuses a corresponding and individual beamlet transmitted by the modulation array on a section smaller than 300 nm; and a target holder for holding the target on an exposed surface of the pattern where the pattern is transferred in a first convergent surface of the convergent electron optical system. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供电子束曝光系统。 解决方案：电子束曝光系统将图案传送到目标（14）的表面上。 电子束曝光系统包括：产生多个电子束（5a，5b）的子束发生器; 调制阵列，其包括调制电子束强度的多个调制器并接收多个电子子束; 连接到调制阵列的控制器，用于独立控制各个调制器; 调节器，其可操作地连接到各个调制器，使得各个调制器的控制信号被单独地调节; 包括静电透镜阵列（7）的会聚电子光学系统，其中每个将由调制阵列传输的相应和单独的子束聚焦在小于300nm的部分上; 以及目标保持器，用于将目标物保持在会聚电子光学系统的第一会聚表面中的图案转印的图案的暴露表面上。 版权所有（C）2010，JPO＆INPIT

    Electron gun
    33.
    发明专利
    Electron gun 审中-公开
    电子枪

    公开(公告)号：JP2007128874A

    公开(公告)日：2007-05-24

    申请号：JP2006285627

    申请日：2006-10-20

    Applicant: United Technol Corp ,  ユナイテッド テクノロジーズ コーポレイションUnited Technologies Corporation

    Inventor： TYMASHOV VIKTOR A ,  OLEG L ZHDANOV ,  RYABENKO SERGIY I ,  TSEPKALOV ANDRIY A ,  BURNS STEVEN M

    IPC: H01J37/06 ,  H01J37/075

    CPC classification number: H01J37/3053 ,  H01J3/02 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/3132

    Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive, small-sized and high-performance electron gun which is improved in durable years by using two thermionic electron sources, which are exchanged rapidly and efficiently.
    SOLUTION: The electron gun 10 comprises an assembly equipped with a first housing 12 accommodating a main thermionic electron source 44, a sub-thermionic electron source 58 and a focusing electrode 62, a second housing 14 accommodating an anode and focusing coils 86A, 86B, and a third housing 16 which accommodates deflecting coils 104A, 104B, is connected to the second housing 14 and located at the opposite side of the first housing 12. The electron gun 10 uses the two thermionic electron sources 44, 58 for improving durable years. The size of the electron gun 10 is made small so that the two thermionic electron sources 44, 58 can easily be exchanged without restricting the rated output of the electron gun 10.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种廉价的小型和高性能的电子枪，其通过使用两个快速有效地交换的热离子电子源在耐久性方面得到改善。 解决方案：电子枪10包括装配有容纳主热离子电子源44的第一壳体12，亚热电子源58和聚焦电极62的第一壳体14，容纳阳极的第二壳体14和聚焦线圈86A 86B和容纳偏转线圈104A，104B的第三壳体16连接到第二壳体14并且位于第一壳体12的相对侧。电子枪10使用两个热电子源44,58来改善 耐用的年份。 电子枪10的尺寸变小，使得两个热离子电子源44,58可以容易地更换，而不限制电子枪10的额定输出。（C）2007，JPO＆INPIT

    Electron emission display apparatus
    34.
    发明专利
    Electron emission display apparatus 审中-公开
    电子发射显示装置

    公开(公告)号：JP2005197215A

    公开(公告)日：2005-07-21

    申请号：JP2004284408

    申请日：2004-09-29

    Applicant: Samsung Sdi Co Ltd ,  三星エスディアイ株式会社

    Inventor： LEE BYONG-GON ,  ZEN SHOKO

    IPC: H01J29/04 ,  H01J1/30 ,  H01J1/62 ,  H01J3/02 ,  H01J29/46 ,  H01J31/12 ,  H01J63/04

    CPC classification number: H01J3/02

    Abstract: PROBLEM TO BE SOLVED: To provide an electron emission display apparatus capable of excellently ensuring brightness and color reproductivity of a screen by optimizing positional relation between electron beam passing aperture of a grid base and electron emitting portions.
    SOLUTION: This electron emission display apparatus includes a first base 2 and a second base 4 disposed opposite to each other with a predetermined space, a first electrode 10 and a second electrode 14 formed on the first base, electron emitting portions 16 contacting with the second electrode at at least its one part and disposed corresponding to a picture element region provided on the first base, and a grid base 8 disposed between the first base 2 and the second base 4 and having electron beam passing apertures corresponding to each of the electron emitting portions 16.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 解决的问题：提供一种电子发射显示装置，通过优化栅格的电子束通过孔径与电子发射部分之间的位置关系，能够极好地保证屏幕的亮度和颜色再现性。 解决方案：该电子发射显示装置包括以预定空间相对设置的第一基底2和第二基底4，形成在第一基底上的第一电极10和第二电极14，电子发射部分16接触 其中第二电极至少其一部分并且对应于设置在第一基座上的像素区域并且布置在第一基座2和第二基座4之间并具有对应于每个的电子束通过孔的格栅基座8 电子发射部分16.版权所有（C）2005，JPO＆NCIPI

    Cyclotron display
    36.
    发明专利
    Cyclotron display 审中-公开
    CYCLOTRON显示

    公开(公告)号：JPH11273595A

    公开(公告)日：1999-10-08

    申请号：JP2676299

    申请日：1999-02-03

    Applicant: Herng-Er Horng ,  Kai Yang ,  Wai-Bong Yeung ,  ヤン カイ ,  ホーン ハーン−エア ,  ユン ワイ−ボン

    Inventor： HORNG HERNG-ER ,  YEUNG WAI-BONG ,  YANG KAI

    IPC: H01J31/12 ,  H01J3/02 ,  H01J29/04 ,  H01J29/48 ,  H01J29/62

    CPC classification number: H01J29/48 ,  H01J3/02 ,  H01J29/04 ,  H01J29/62

    Abstract: PROBLEM TO BE SOLVED: To provide a display substitutive for a CRT display by using one or more deflection units for orienting the direction of electron beams emitted from one or more cyclotrons for generating one or more electron beams and a screen for forming an image by collision of the electron beams.
    SOLUTION: A cyclotron 1 generates a single beam by being deflected by a deflection unit 8. An electron beam sweeps by crossing a phosphor screen 9 to form an image by collision with a picture element. Since one or more cyclotrons for generating electron beams are used instead of an electron gun, an accelerating electrode for accelerating an electron is obviated to reduce the necessity of focusing the electron beams so as to thereby obtain an extremely shorter display device for reducing energy consumtion more than an electron gun CRT. The cyclotrons desirably contain two D type members and one or more electron sources, and a deflection unit contains at least two deflecting plates for orienting the electron beams.
    COPYRIGHT: (C)1999,JPO

    Abstract translation: 要解决的问题：通过使用一个或多个偏转单元来提供用于定向从一个或多个回旋加速器发射的电子束的方向用于产生一个或多个电子束的CRT显示器的显示代用品和用于通过碰撞形成图像的屏幕 的电子束。 解决方案：回旋加速器1通过被偏转单元8偏转而产生单个光束。电子束通过穿过荧光屏9扫过以通过与像素碰撞形成图像。 由于使用一个或多个用于产生电子束的回旋加速器来代替电子枪，所以避免了用于加速电子的加速电极，以减少聚焦电子束的必要性，从而获得更短的显示装置，以减少能量消耗 比电子枪CRT。 回旋加速器理想地包含两个D型构件和一个或多个电子源，并且偏转单元包含用于定向电子束的至少两个偏转板。

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