Vacuum pump
    42.
    发明专利

    公开(公告)号:JP2014001744A

    公开(公告)日:2014-01-09

    申请号:JP2013213093

    申请日:2013-10-10

    IPC分类号: F04D19/04 F04D17/16 F04D23/00

    摘要: PROBLEM TO BE SOLVED: To solve the problem in which any performance change in a first chamber 11 is not preferable because it gives significant influence on performance of a separate chamber.SOLUTION: A differential pressure pump type mass spectrometer system includes a mass spectrometer with a plurality of pressure chambers, a vacuum pump provided in the mass spectrometer and having at least three pump inlets, a first pumping section, a second pumping section downstream of the first pumping section, and a third pumping section downstream of the second pumping section. An exit from the first chamber having a relatively lower pressure is linked to a first pump inlet. A fluid flows from the first chamber through the first pump inlet into a pump and can flow only through the first pumping section, the second pumping section, and the third pumping section to a pump outlet.

    Inductive coupling plasma ms/ms type mass spectroscope
    43.
    发明专利
    Inductive coupling plasma ms/ms type mass spectroscope 有权
    电感耦合等离子体质谱MS / MS型质谱仪

    公开(公告)号:JP2013143196A

    公开(公告)日:2013-07-22

    申请号:JP2012001616

    申请日:2012-01-06

    IPC分类号: H01J49/42 G01N27/62 H01J49/10

    摘要: PROBLEM TO BE SOLVED: To provide new differential evacuation structure in an inductive coupling plasma MS/MS type mass spectroscope (ICP-MS/MS).SOLUTION: A device 10 has: a first vacuum chamber 11 which draws plasma containing an ionized sample in a vacuum; a second vacuum chamber 12 which includes means 18 for drawing ion beams from ions emitted from the first vacuum chamber to be guided; a third vacuum chamber 13 with first ion optical separation means 20; a fourth vacuum chamber 14 with a cell 25 to which reaction gas is introduced; and a fifth vacuum chamber 15 with second ion optical separation means 29 and a detector 30. The second vacuum chamber 12 and the third vacuum chamber 13 are independently evacuated.

    摘要翻译: 要解决的问题:在感应耦合等离子体质谱(ICP-MS / MS)质谱仪(ICP-MS / MS)中提供新的差分抽空结构。解决方案:装置10具有:第一真空室11,其将含有电离样品的等离子体 真空; 第二真空室12,其包括用于从要被引导的第一真空室发射的离子抽出离子束的装置18; 具有第一离子光学分离装置20的第三真空室13; 具有引入反应气体的单元25的第四真空室14; 以及具有第二离子光学分离装置29和检测器30的第五真空室15.第二真空室12和第三真空室13被独立排空。

    Mass spectrometry system
    46.
    发明专利

    公开(公告)号:JP2013506242A

    公开(公告)日:2013-02-21

    申请号:JP2012530336

    申请日:2010-09-13

    摘要: 本発明は、低真空段(16)から高真空段(44)まで流体連通状態にある複数個の質量分析計段(16,18,20,44)を含む質量分析計(12)を有する質量分析システム(10)を提供する。 分割流多段ポンプ(14)が質量分析計段を排気する。 ポンプは、ポンプエンベロープ(28)を有し、このポンプエンベロープ(28)内では、複数個のポンプ輸送段(20,32,34)が流体を主ポンプ入口(36)から主ポンプ出口(38)にポンプ輸送するために質量分析計段内における流れ方向にほぼ平行な軸線X回りに回転可能に支持されている。 高真空段(44)の少なくとも一部は、ポンプエンベロープ内で主ポンプ入口のところに配置されている。

    Mass spectroscope
    48.
    发明专利
    Mass spectroscope 有权
    质谱仪

    公开(公告)号:JP2012104247A

    公开(公告)日:2012-05-31

    申请号:JP2010249260

    申请日:2010-11-08

    IPC分类号: H01J49/26 H01J49/10

    摘要: PROBLEM TO BE SOLVED: To provide a small and light mass spectroscope capable of analyzing a mass at high accuracy.SOLUTION: The mass spectroscope has an ion source for ionizing gas 23 flowing from outside to ionize a measurement sample 4, and a mass analyzing part 102 for separating the ionized measurement sample 4. The internal pressure of the ion source is reduced by differential evacuation from the mass analyzing part 102. The ion source takes in the gas 23 to increase the internal pressure, and ionizes the gas 23 when the internal pressure is about 100 Pa to about 10000 Pa. The mass analyzing part 102 separates the ionized measurement sample 4 when the internal pressure increased while taking in the gas 23 is reduced to about 0.1 Pa or less after taking in the gas 23. The spectroscope has restraining means 9 for restraining a flow rate of the gas 23 taken in by the ion source, and opening/closing means 8 for opening/closing a flow of the gas 23 taken in by the ion source.

    摘要翻译: 要解决的问题:提供能够以高精度分析质量的小型轻质量分光器。 解决方案:质谱仪具有用于从外部离子化的离子化气体23离子化离子源离子化测量样品4的离子源和用于分离离子化测量样品4的质量分析部件102.离子源的内部压力通过 质量分析部件102的差分抽出。离子源吸入气体23以增加内部压力,并且当内部压力为约100Pa至约10000Pa时使气体23离子化。质量分析部件102将离子化测量 在吸入气体23时使内部压力增加时的样品4在吸入气体23后降低至约0.1Pa以下。分光镜具有抑制由离子源吸入的气体23的流量的抑制装置9, 以及用于打开/关闭由离子源吸入的气体23的流动的打开/关闭装置8。 版权所有(C)2012,JPO&INPIT

    Mass spectroscope
    49.
    发明专利
    Mass spectroscope 有权
    质谱仪

    公开(公告)号:JP2012043672A

    公开(公告)日:2012-03-01

    申请号:JP2010184648

    申请日:2010-08-20

    发明人: SUGAWARA HIROSHI

    CPC分类号: H01J49/24

    摘要: PROBLEM TO BE SOLVED: To provide a mass spectroscope that pre-detects occurrence of a problem in CID gas supply and a device trouble such as clogging of a heating capillary or the like, and informs the detection result to an analyzer.SOLUTION: Vacuum gauges 31, 32 are set in an intermediate vacuum chamber 4 and an analysis chamber 10 in which a collision cell 12 is disposed, and before analysis, a gas pressure determining unit 34 determines whether gas pressure detected by each of the vacuum gauges 31, 32 is not more than a threshold value. When the gas pressure is not more than the threshold value, the gas pressure determining unit 34 outputs an alarm. When supply of CID gas into the collision cell 12 stagnates, the amount of CID gas flowing into the analysis chamber 10 decreases, and thus the vacuum degree in the analysis chamber 10 excessively increases. On the other hand, when the heating capillary 3 clogs, the amount of gas flowing from an ionization chamber 1 as an atmospheric pressure environment into the intermediate vacuum chamber 4 decreases, and thus the vacuum degree in the intermediate vacuum chamber 4 excessively increases. Accordingly, in any case, a trouble can be recognized by detecting excessive decrease of gas pressure.

    摘要翻译: 要解决的问题:提供预先检测CID气体供应中的问题的发生和加热毛细管等的堵塞等装置故障的质谱仪,并将检测结果通知给分析装置。 解决方案:真空计31,32设置在中间真空室4和分析室10中,其中设置有碰撞室12,在分析之前,气体压力确定单元34确定是否检测到气体压力 真空度计31,32不大于阈值。 当气体压力不大于阈值时,气体压力确定单元34输出报警。 当将CID气体供应到碰撞池12中停滞时,流入分析室10的CID气体的量减少,因此分析室10中的真空度过大。 另一方面,当加热毛细管3堵塞时,从作为大气压环境的电离室1流入中间真空室4的气体量减少,中间真空室4的真空度过度增加。 因此,在任何情况下,可以通过检测气压的过度下降来识别故障。 版权所有(C)2012,JPO&INPIT