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公开(公告)号：JP2007178406A
公开(公告)日：2007-07-12
申请号：JP2005380381
申请日：2005-12-28
Applicant: Nhk Spring Co Ltd , 日本発条株式会社
Inventor： ISHIKAWA SHIGEKI , NIHEI TAKASHI
CPC classification number: G01R1/07342
Abstract: PROBLEM TO BE SOLVED: To restrain an influence of crosstalk between adjacent inspection objects. SOLUTION: This probe card is provided with a plurality of probes for contacting with the inspection objects to at least input or output an electric signal, a substrate having a wiring pattern corresponding to circuit structure for generating a signal for inspection, a plurality of input conductors with one end connected electrically to any of the plurality of probes to transmit an input signal to the inspection object, a plurality of coaxial cables with one end connected electrically to the substrate, and with the other end connected electrically to any of the plurality of input conductors, or connected electrically to any of the plurality of probes, and a plurality of output conductors with one end connected electrically to any of the plurality of probes to transmit an output signal from the inspection object, and a shield plate provided in the vicinity of an area where the output conductor connected to one out of the two adjacent inspection objects intersects with the input conductor connected to the other thereof. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：为了抑制相邻检查对象之间串扰的影响。 解决方案：该探针卡设置有多个用于与检查对象接触的探针，以至少输入或输出电信号;具有对应于用于产生检测信号的电路结构的布线图案的基板，多个 输入导体，其一端电连接到所述多个探针中的任一个，以将输入信号传输到所述检查对象;多个同轴电缆，其一端电连接到所述基板，并且另一端电连接到所述检测对象 多个输入导体，或者电连接到所述多个探针中的任一个，以及多个输出导体，其一端电连接到所述多个探针中的任一个，以传输来自所述检查对象的输出信号;以及屏蔽板， 连接到两个相邻检查对象中的一个的输出导体与输入导体相交的区域附近 连接到另一个。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007178405A
公开(公告)日：2007-07-12
申请号：JP2005380380
申请日：2005-12-28
Applicant: Nhk Spring Co Ltd , 日本発条株式会社
Inventor： YAMADA YOSHIO , NAKAYAMA HIROSHI , NAGAYA MITSUHIRO , IMUTA SHOGO
CPC classification number: G01R1/07378 , G01R1/44 , G01R31/2863 , G01R31/2874
Abstract: PROBLEM TO BE SOLVED: To provide a probe card capable of bringing a probe into contact with a contact target reliably regardless of a temperature environment in inspection. SOLUTION: The probe card comprises: a plurality of probes that are made of a conductive material and input or output an electric signal while being in contact with an electrode pad that the semiconductor wafer has; a probe head for storing and holding the plurality of probes; a substrate having a wiring pattern corresponding to the circuit structure; and a space transformer that overlies the probe head, changes the interval of the wiring patterns that the substrate has for relaying, and has an electrode pad provided on the surface of a side opposing the probe head corresponding to the relayed wiring. Both the ends of the probe are in contact with an area near the center of the electrode pad that the semiconductor wafer and the space transformer have under environment having the average temperature between the minimum and maximum temperatures when inspecting the semiconductor wafer. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：提供能够可靠地使探针与接触目标接触的探针卡，而与检查中的温度环境无关。 解决方案：探针卡包括：由导电材料制成并在与半导体晶片具有的电极焊盘接触的同时输入或输出电信号的多个探针; 用于存储和保持多个探针的探针头; 具有对应于所述电路结构的布线图案的基板; 以及覆盖在探针头上的空间变换器，改变了基板具有的用于中继的布线图案的间隔，并且在与中继布线对应的与探针相对的一侧的表面上设置有电极焊盘。 探测器的两端都与电极焊盘中心附近接触，半导体晶片和空间变压器在检测半导体晶片时具有平均温度在最小和最大温度之间的环境。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007178404A
公开(公告)日：2007-07-12
申请号：JP2005380378
申请日：2005-12-28
Applicant: Nhk Spring Co Ltd , 日本発条株式会社
Inventor： KAZAMA TOSHIO , ISHIKAWA SHIGEKI
CPC classification number: G01R1/06722 , G01R1/06716 , G01R1/07357
Abstract: PROBLEM TO BE SOLVED: To provide contact probes that satisfy a desired pitch between them, and can further satisfy various characteristics such as a load characteristic, wear resistance characteristic, electric characteristic required for contact probes. SOLUTION: The contact probe has a plunger 1 in contact with an inspected object, a plunger 2 in contact with a connection terminal 31 on the side of the inspection device, and a wire 3 disposed between the plungers 1 and 2. Each of the plungers 1 and 2 having a desired characteristic selected according to the inspected object and the wire 3 having a desired characteristic selected according to the inspected object are combined with each other and mechanically interconnected using close coiling spring joints 4 and 5. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：提供在它们之间满足期望间距的接触探针，并且可以进一步满足诸如负载特性，耐磨性，接触探针所需的电特性等各种特性。
解决方案：接触探针具有与被检查物体接触的柱塞1，与检查装置一侧的连接端子31相接触的柱塞2和布置在柱塞1和2之间的线3。 具有根据检查对象选择的期望特性的柱塞1和2，并且具有根据检查对象选择的期望特性的线3彼此组合并且使用紧卷绕弹簧接头4和5机械地互连。 版权所有（C）2007，JPO＆INPIT
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Patent Agency Ranking
公开(公告)号：JP2007168701A
公开(公告)日：2007-07-05
申请号：JP2005371979
申请日：2005-12-26
Applicant: Nhk Spring Co Ltd , Toyota Boshoku Corp , Toyota Motor Corp , トヨタ紡織株式会社 , トヨタ自動車株式会社 , 日本発条株式会社
Inventor： KIMATA HIDEKI , NOMURA MISAO , KURONO KOICHI , KUROSAKI YOSHIHISA
IPC: B60J3/00
Abstract: PROBLEM TO BE SOLVED: To provide a vehicular sun shade device having good operability in use.
SOLUTION: first ends of a pair of shielding members 4 folded in bellows shapes are respectively fixed to right and left both end portions of a vehicular front window MC, and moving elements 5 are coupled to second ends of the shielding members 4. Upper end portions of the moving elements 5 are engaged with a guide rail 7 extending in a lateral direction on an upper edge of the front window MC, and lower end portions are engaged with a recessed portion LG of a defroster nozzle FL formed on an instrument panel PB. While guided by the guide rail 7 and the recessed portion LG, the moving elements 5 are pulled out on the front window MC from a state retracted in the right and left ends of the front window MC. Then, the pair of moving elements 5 is individually engaged with a fixing device 8 attached to an upper end center portion of the front window MC, and fixed to cover the front window MC.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种在使用中具有良好可操作性的车辆遮阳装置。 解决方案：折叠成波纹管形状的一对遮蔽构件4的第一端分别固定在车辆前窗MC的左右两端部，移动体5与屏蔽构件4的第二端连结。 移动元件5的上端部与在前窗MC的上边缘上沿横向延伸的导轨7接合，下端部与形成在仪器上的除霜器喷嘴FL的凹部LG卡合 面板PB。 在由导轨7和凹部LG引导的同时，从前窗MC的右端部和左端收回的状态将移动体5从前窗MC拉出。 然后，一对移动元件5分别与安装在前窗MC的上端中央部的固定装置8卡合，并固定以覆盖前窗MC。 版权所有（C）2007，JPO＆INPIT
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67.发明专利
公开(公告)号：JP2007164853A
公开(公告)日：2007-06-28
申请号：JP2005357046
申请日：2005-12-09
Applicant: Nhk Spring Co Ltd , 日本発条株式会社
Inventor： ARAI HAJIME
IPC: G11B21/21
CPC classification number: G11B5/486
Abstract: PROBLEM TO BE SOLVED: To compatibly obtain low impedance, low loss, and a wide band of wiring lines on a recording side, and high impedance, low loss, and a wide band of wiring lines on a reproduction side.
SOLUTION: A head suspension 1 has: a load beam 3 which places a load on a head part 21 recording/reproducing information to and from a hard disk; and a flexure 7 which has recording-side and reproduction-side wiring lines 25 and 27 connected to the head part 21 and is fitted to the load beam 3 while supporting the head part 21, the flexure 7 having the wiring lines 25 and 27 arranged on a base material 17 of a conductive thin plate across a base insulating layer 33 made of flexible resin. The head suspension 1 is characterized in that a high-conductivity ground layer 39 of copper having higher conductivity than the base material 17 of the conductive thin plate is formed at at least a portion between the base material 17 and base insulating layer 33 corresponding to the wiring line 25 only on a width-directional recording side of the flexure 7.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：在再现侧兼容地获得记录侧的低阻抗，低损耗和宽带的布线，以及高阻抗，低损耗和宽带的布线。 解决方案：头悬挂1具有：负载梁3，其将负载放置在头部21上，以从硬盘记录/再现信息; 以及挠曲件7，其具有连接到头部21的记录侧和再现侧布线25和27，并且在支撑头部21的同时装配到负载梁3，布置有布线25和27的挠曲部7 在由柔性树脂制成的基底绝缘层33上的导电薄板的基材17上。 磁头悬架1的特征在于，在基体材料17和基体绝缘层33之间的至少一部分上形成有比导电薄板的基体材料17导电性高的铜的高导电性的接地层39， 布线25仅在挠曲7的宽度方向记录侧。版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007139711A
公开(公告)日：2007-06-07
申请号：JP2005337212
申请日：2005-11-22
Applicant: Nhk Spring Co Ltd , 日本発条株式会社
Inventor： RIKIMARU TAIICHI , ISHIKAWA KOJI , TOMINAGA JUN
IPC: G01R1/067
CPC classification number: G01R1/06738 , G01R1/06722 , G01R1/07307
Abstract: PROBLEM TO BE SOLVED: To cope with narrowed arrangement interval, to facilitate visual observation of contact state with an inspection object, even from the upper part, and to achieve stable electrical contact, without applying excessive loads. SOLUTION: The conductive contactor unit is provided with a conductive contactor holder, having first guide grooves and second guide grooves holding edge end parts of the conductive contactor in the longitudinal direction, respectively; the plurality of conductive contactors, having first and second contact parts physically contacting with mutually different circuit structures, an elastic part, intervening between the first and second contact parts and expandable and contractible in the longitudinal direction; and a second connection part which connects the elastic part and the second contact part, in which the opening part through the thickness direction is formed, and which protrudes from an end part of the second guide groove, to the outside when accommodated in the conductive contactor holder; and a bar-like member, passing through the opening part formed in the second connection part included in the plurality of conductive contactors and is fixed to the conductive contactor holder. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：为了应对变窄的排列间隔，为了便于目视观察与检查对象的接触状态，甚至从上部观察，并且实现稳定的电接触，而不施加过大的负载。 导电接触器单元设置有导电接触器保持器，其具有分别沿纵向保持导电接触器的端部的第一引导槽和第二引导槽; 所述多个导电接触器具有与相互不同的电路结构物理接触的第一和第二接触部分，介于所述第一和第二接触部分之间的弹性部分，并且在纵向方向上可伸缩; 以及第二连接部，其连接弹性部和第二接触部，其中形成有开口部的厚度方向，并且当容纳在导电接触器中时，从第二引导槽的端部突出到外部 持有人; 以及棒状构件，其穿过形成在所述多个导电接触器中的所述第二连接部中的所述开口部，并且固定到所述导电接触器保持器。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007095982A
公开(公告)日：2007-04-12
申请号：JP2005283233
申请日：2005-09-29
Applicant: Hitachi High-Technologies Corp , Nhk Spring Co Ltd , 日本発条株式会社 , 株式会社日立ハイテクノロジーズ
Inventor： KOBAYASHI MICHIAKI , NAKAMURA TSUTOMU , UCHINO TAKEO , MAKINO AKITAKA , NAKAGOME TADASHI
IPC: H01L21/3065
CPC classification number: H01L21/67126 , H01J37/32495 , H01J37/3266 , H01J37/32743
Abstract: PROBLEM TO BE SOLVED: To provide a plasma processing device with processing efficiency and device working efficiency improved by shortening maintenance time.
SOLUTION: A vacuum processing device includes a vacuum vessel in which a substrate-like specimen is placed in an internally provided and decompressed processing chamber, a conveyance vessel having the vacuum vessel coupled in which the specimen is carried in a decompressed atmosphere, a path for communicating a conveyance chamber with the processing chamber with the conveyance vessel coupled with the vacuum vessel in which the specimen before or after the processing is carried, and a detachable cover member attached to cover an inner wall surface of the path for processing the specimen in the processing chamber using plasma formed in the processing chamber.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：通过缩短维护时间来提供具有加工效率和装置工作效率的等离子体处理装置。 解决方案：真空处理装置包括：真空容器，其中将衬底样的样品放置在内部提供和减压的处理室中;输送容器，其具有耦合的真空容器，其中样品被携带在减压气氛中， 用于将输送室与处理室连通的输送室与运送容器连接的输送容器，在该真空容器中携带有处理之前或之后的样品，以及可拆卸的盖构件，其安装以覆盖路径的内壁表面，用于处理 在处理室中使用在处理室中形成的等离子体的样品。 版权所有（C）2007，JPO＆INPIT
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