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公开(公告)号：JP4252584B2
公开(公告)日：2009-04-08
申请号：JP2006127017
申请日：2006-04-28
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
IPC: H03H9/17 , H01L41/09 , H01L41/18 , H01L41/187 , H03H9/58
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公开(公告)号：JP4223428B2
公开(公告)日：2009-02-12
申请号：JP2004101878
申请日：2004-03-31
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
IPC: H01L41/09 , H03H9/02 , H01L41/187 , H01L41/22 , H01L41/253 , H03H3/02 , H03H3/04 , H03H9/17 , H03H9/56 , H03H9/58 , H03H9/70
CPC classification number: H03H3/04 , H03H9/02094 , H03H9/02149 , H03H9/174 , H03H9/564 , H03H9/568 , H03H2003/023 , H03H2003/0428
Abstract: A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Deltaf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.
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公开(公告)号：JP4149444B2
公开(公告)日：2008-09-10
申请号：JP2005005791
申请日：2005-01-12
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
CPC classification number: H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H2003/021
Abstract: A piezoelectric thin-film resonator includes a film laminate formed on a device substrate (41), the film laminate including a lower electrode (43), a piezoelectric film (44) provided on the device substrate and the lower electrode, and an upper electrode (45) provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.
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Patent Agency Ranking
公开(公告)号：JP4024741B2
公开(公告)日：2007-12-19
申请号：JP2003360054
申请日：2003-10-20
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
IPC: H01L41/09 , H03H9/17 , H01L29/82 , H01L41/08 , H01L41/187 , H03H9/13 , H03H9/15 , H03H9/54 , H03H9/56 , H03H9/58
CPC classification number: H03H9/174 , H03H9/02133 , H03H9/132 , H03H9/564 , H03H9/568
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公开(公告)号：JP4550658B2
公开(公告)日：2010-09-22
申请号：JP2005130989
申请日：2005-04-28
Applicant: 太陽誘電株式会社 , 富士通メディアデバイス株式会社
CPC classification number: H03H9/173 , H03H3/04 , H03H9/132 , H03H9/174 , H03H2003/0428 , H03H2003/0457
Abstract: A piezoelectric thin-film resonator includes a lower electrode provided on a substrate, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film. A membrane region is defined by a region where the upper electrode and the lower electrode overlap each other to sandwich the piezoelectric thin film therebetween and has an elliptical shape, and the lower electrode is also provided at an outer side of the membrane region in a region in which neither an extraction electrode of the upper electrode nor an extraction electrode of the lower electrode is provided.
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公开(公告)号：JP4535841B2
公开(公告)日：2010-09-01
申请号：JP2004313727
申请日：2004-10-28
Applicant: 太陽誘電株式会社 , 富士通メディアデバイス株式会社
CPC classification number: H03H9/02149 , H03H9/02118 , H03H9/132 , H03H9/174 , H03H2003/0428
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公开(公告)号：JPWO2009066380A1
公开(公告)日：2011-03-31
申请号：JP2009542439
申请日：2007-11-21
Applicant: 太陽誘電株式会社 , 富士通メディアデバイス株式会社
Inventor： 基揚 原 , 基揚 原 , 西原 時弘 , 時弘 西原 , 眞司 谷口 , 眞司 谷口 , 坂下 武 , 武 坂下 , 横山 剛 , 剛 横山 , 匡郁 岩城 , 匡郁 岩城 , 上田 政則 , 政則 上田 , 康之 斎藤 , 康之 斎藤
CPC classification number: H03H9/132 , H03H9/174 , H03H9/588 , H03H9/605 , H03H2003/0428
Abstract: 損失が低い高性能なフィルタを提供する。直列腕に配置された直列腕圧電薄膜共振器と、並列腕に配置された並列腕圧電薄膜共振器とを有し、直列腕圧電薄膜共振器および並列腕圧電薄膜共振器は、それぞれ、基板(21)と、基板(21)上に形成された下部電極(22)と、下部電極(22)上に形成された圧電膜(23)と、圧電膜(23)上に形成された上部電極(24)とを有する。直列腕圧電薄膜共振器は、共振部(29)の短軸の長さBに対する長軸の長さAの比(A/B)が、並列腕圧電薄膜共振器における比よりも高い。
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公开(公告)号：JP4585431B2
公开(公告)日：2010-11-24
申请号：JP2005330335
申请日：2005-11-15
Applicant: 太陽誘電株式会社 , 富士通メディアデバイス株式会社
CPC classification number: H03H9/706 , H03H9/0571 , H03H9/0576 , H03H9/72 , H03H9/725
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