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    Manufacturing method of a micro structure
    2.
    发明专利
    Manufacturing method of a micro structure 有权

    公开(公告)号：JP4967204B2

    公开(公告)日：2012-07-04

    申请号：JP2001234277

    申请日：2001-08-01

    Applicant: 株式会社豊田中央研究所

    Inventor： 智由 土屋 ,  博文 船橋 ,  徳夫 藤塚

    IPC: G01P9/04 ,  H01L29/84 ,  G01C19/56

    Abstract: PROBLEM TO BE SOLVED: To realize a microstructure, which has a thick movable section and a wide space between the movable section and a fixed section, and still has a structure layer, such as an electrode disposed above the movable section and the space between the movable section and the fixed section. SOLUTION: A method of manufacturing the microstructure comprises (1) forming of projecting patterns, which are divided into the movable section 106a which becomes movable at the end of manufacturing, the fixed section 106c spaced apart from the movable sections 106a, and a dummy section 106b which is disposed in the space between the movable section 106a and the fixed section 106c and disappears at end of manufacturing, (2) depositing a sacrificial layer, in a region which begins from the movable section 106a and reaches the fixed section 106c via the dummy section 106b, (3) forming a structure layer on the sacrificial layer, (4) after depositing the sacrificial layer or forming the structure layer, removing the dummy section 106b, and (5) after forming the structure layer, removing the sacrificial layer.

    Manufacturing method of the optical deflection device and an optical deflection device
    8.
    发明专利
    Manufacturing method of the optical deflection device and an optical deflection device 有权

    公开(公告)号：JP5445378B2

    公开(公告)日：2014-03-19

    申请号：JP2010170268

    申请日：2010-07-29

    Applicant: 株式会社豊田中央研究所

    Inventor： 徳夫 藤塚 ,  貴志 尾崎 ,  勲 青柳 ,  敬一 島岡

    IPC: G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  H04N1/113

    Abstract: PROBLEM TO BE SOLVED: To provide an optical deflector capable of accurately swinging a movable part, and a method for manufacturing the optical deflector.SOLUTION: The optical deflector includes a substrate, the movable part, a flexible beam which supports the movable part in a position off the substrate so that the movable part can swing around a swing axis, a fixed electrode provided on the substrate in a position facing a lower surface of the movable part, and a movable electrode provided on the movable part. A projection projecting toward the substrate is formed on the lower surface of the movable part. The projection has a peak in a plane which includes the swing axis of the movable part and is perpendicular to the movable part. In a period when the movable part is swung, the projection is in contact with the substrate.

    Vehicle lighting equipment
    9.
    发明专利
    Vehicle lighting equipment 有权
    空值

    公开(公告)号：JP5287121B2

    公开(公告)日：2013-09-11

    申请号：JP2008265549

    申请日：2008-10-14

    Applicant: 株式会社豊田中央研究所

    Inventor： 千恵 豊田 ,  壮史 野村 ,  徳夫 藤塚

    IPC: B60Q1/04

    CPC classification number: B60Q1/143 ,  B60Q1/085 ,  B60Q9/008 ,  B60Q2300/054 ,  B60Q2300/112 ,  B60Q2300/122 ,  B60Q2300/41 ,  B60Q2300/42 ,  B60Q2300/45 ,  F21S41/645 ,  F21S41/675

    Abstract: PROBLEM TO BE SOLVED: To provide a vehicular illumination device capable of drawing some patterns of the same shape and same size irrespective of a distance ranging from a vehicle when optical images including a predetermined pattern are projected onto a road surface in front of the vehicle. SOLUTION: Some image data stored in advance are read out in response to whether or not a road surface is illuminated with high beams. A trapezoidal distortion correction is performed against the read-out image data in such a way that some patterns of the same shape and same size may be formed on the road surface irrespective of a distance ranging from a vehicle, and a plurality of image data of which trapezoidal distortion correction is performed in response to an angle θ formed with projecting light and the road surface are produced for every position where patterns are formed. Then, the number of micromirrors of MEMS mirror corresponding to one pixel of the image data and their arrangements are changed in response to an illuminating position (a size of the angle θ) of the projected light so as to eliminate non-alignment of resolution generated through the trapezoidal distortion correction, and a driving signal for driving and controlling MEMS mirrors is generated in response to each of the plurality of image data and outputted to a lamp driving unit. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种车辆照明装置，其能够在与包括预定图案的光学图像投影到前方的路面上时从车辆的距离而从相同形状和相同尺寸绘制一些图案 机动车。 解决方案：响应于路面是否用高光束照亮，预先存储的某些图像数据被读出。 对于读出的图像数据执行梯形失真校正，使得可以在路面上形成相同形状和相同尺寸的一些图案，而不管距离车辆的距离，以及多个图像数据 响应于由投影光形成的角度θ执行梯形失真校正，并且对于形成图案的每个位置产生路面。 然后，响应于投射光的照明位置（角度θ的大小）改变对应于图像数据的一个像素的MEMS镜的微镜数量及其布置，以消除所产生的分辨率的不对准 通过梯形失真校正，并且响应于多个图像数据中的每一个而产生用于驱动和控制MEMS反射镜的驱动信号并输出​​到灯驱动单元。 版权所有（C）2010，JPO＆INPIT

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