公开(公告)号：JP2015028851A

公开(公告)日：2015-02-12

申请号：JP2013157424

申请日：2013-07-30

Applicant: 株式会社日立ハイテクノロジーズ ,  Hitachi High-Technologies Corp

Inventor： HOQUE SHAHEDUL ,  TAKAHASHI HIROYUKI ,  IWASAKI TAKASHI

IPC: H01J37/147 ,  H01J37/244 ,  H01J37/28

Abstract: 【課題】1次ビームを高速照射することによる影響を簡易な構成により緩和することができる荷電粒子線装置を提供する。【解決手段】本発明に係る荷電粒子線装置は、2次電子を検出する複数の検出器と2次電子を検出器に向かって偏向させる偏向器を備え、荷電粒子線の走査座標に応じて異なる検出器に向けて2次電子を偏向させる。【選択図】図4

Abstract translation: 要解决的问题：提供一种能够通过以简单的配置高速照射主光束来减轻影响的带电粒子束装置。解决方案：带电粒子束装置包括多个检测二次电子的检测器和偏转器 次级光束朝向检测器。 该装置根据带电粒子束的扫描坐标将二次电子偏转到不同的检测器。

公开(公告)号：JP2012156076A

公开(公告)日：2012-08-16

申请号：JP2011015903

申请日：2011-01-28

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： HOQUE SHAHEDUL ,  KAWANO HAJIME

IPC: H01J37/147 ,  H01L21/66

CPC classification number: H01J37/28 ,  H01J37/1474 ,  H01J2237/004 ,  H01J2237/0048 ,  H01J2237/281

Abstract: PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which the potential gradient, which is brought about by preliminary charging, is suppressed without changing the lens conditions of the electron microscope.SOLUTION: A scanning deflector is controlled so that a specimen is scanned with a second beam for detecting electrons emitted from the specimen after scanning the specimen with a first beam for charging the surface of the specimen. Scanning with the first beam is carried out so that the charge density on the periphery of the scanning region of the first beam is increased relatively to the charge density in the center part of the scanning region of the first beam.

Abstract translation: 要解决的问题：提供一种其中通过预充电产生的电位梯度被抑制而不改变电子显微镜的透镜条件的扫描电子显微镜。 解决方案：控制扫描偏转器，使得用第二光束扫描样本，用于在用用于对样本表面充电的第一光束扫描样本之后检测从样品发射的电子。 进行与第一光束的扫描，使得第一光束的扫描区域周围的电荷密度相对于第一光束的扫描区域的中心部分的电荷密度增加。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2014143075A

公开(公告)日：2014-08-07

申请号：JP2013010790

申请日：2013-01-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： TAKAHASHI HIROYUKI ,  IWASAKI TAKASHI ,  MORI WATARU ,  HOQUE SHAHEDUL

IPC: H01J37/147 ,  H01J37/22 ,  H01J37/28

Abstract: PROBLEM TO BE SOLVED: To solve the problem in which: when positional deviation occurs according to a scanning direction of electron beams, the amount of deviation becomes different for each scanning direction in reciprocating scanning, and therefore, continuity of images is lost and a correct image cannot be obtained; every image is deviated in the same direction in a one-way scanning, and the center position of the images is deviated; and if the center position of the images is deviated, a field of view becomes different when the images are enlarged or reduced.SOLUTION: A charged particle beam device includes: a deflector that scans beams emitted from a charged particle source on a sample; a scanning signal generating unit that generates scanning signals to be provided to the deflector; a detecting unit that detects charged particles obtained on the basis of the irradiation of the beams emitted from the charged particle source; an AD conversion unit that digitally converts the output of the detecting unit; a control unit that generates operation timing of the deflector; and a delaying unit that delays the operation timing. The AD conversion unit is operated at the operation timing delayed by the delaying unit.

Abstract translation: 要解决的问题：为了解决以下问题：当根据电子束的扫描方向发生位置偏离时，往复扫描中的每个扫描方向的偏差量变得不同，因此图像的连续性丢失并且正确 图像无法获得; 每个图像在单向扫描中以相同的方向偏离，图像的中心位置偏离; 并且如果图像的中心位置偏离，则当图像被放大或缩小时视场变得不同。解决方案：带电粒子束装置包括：偏转器，其从样本上的带电粒子源发射的光束扫描; 扫描信号产生单元，其生成要提供给偏转器的扫描信号; 检测单元，其检测基于从带电粒子源发射的光束的照射获得的带电粒子; AD转换单元，其对所述检测单元的输出进行数字转换; 产生所述偏转器的操作定时的控制单元; 以及延迟操作时序的延迟单元。 AD转换单元在由延迟单元延迟的操作定时下操作。

公开(公告)号：JP2014022165A

公开(公告)日：2014-02-03

申请号：JP2012159179

申请日：2012-07-18

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： HOQUE SHAHEDUL ,  KAWANO HAJIME

IPC: H01J37/244 ,  H01J37/04 ,  H01J37/28

CPC classification number: H01J37/29 ,  G01N23/203 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24475

Abstract: PROBLEM TO BE SOLVED: To provide an electron beam irradiation device capable of suppressing influences of an electric field generated by a plurality of back-scattered electron detectors.SOLUTION: An electron beam irradiation device having a scanning deflector scanning an electron beam emitted from an electron source, comprises: a plurality of back-scattered electron detectors; a detector power supply applying a voltage to each of the plurality of back-scattered electron detectors; and a control device adjusting an application voltage of the detector power supply on the basis of image deviation upon application of the voltage to the plurality of back-scattered electron detectors.

Abstract translation: 要解决的问题：提供一种能够抑制由多个反向散射电子检测器产生的电场的影响的电子束照射装置。解决方案：一种具有扫描偏转器的电子束照射装置，其扫描从电子发射的电子束 源，包括：多个反向散射电子检测器; 对所述多个反向散射电子检测器中的每一个施加电压的检测器电源; 以及控制装置，在对多个反向散射电子检测器施加电压时，基于图像偏差来调整检测器电源的施加电压。