公开(公告)号：JP2013178879A

公开(公告)日：2013-09-09

申请号：JP2012040863

申请日：2012-02-28

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： MORI WATARU ,  ITO HIROYUKI ,  SASAKI HIROKO ,  INADA HIROMI

IPC: H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which resolution improvement is made compatible with pattern identification capability improvement.SOLUTION: In a scanning electron microscope comprising a monochromator which makes an electron beam monochromatic, the monochromator includes a magnetic field generator which deflects the electron beam and a selectively energy diaphragm which passes a part of the electron beam deflected by the magnetic field generator. On a trajectory where electrons discharged from a sample are deflected by a magnetic field generated by the magnetic field generator, there are arranged a stop which passes a part of electrons discharged from the sample and a detector which detects the electrons passing through the diaphragm.

Abstract translation: 要解决的问题：提供一种扫描电子显微镜，其中分辨率改善与图案识别能力改进兼容。解决方案：在包括使单色电子束形成电子束的单色仪的扫描电子显微镜中，单色仪包括磁场发生器， 电子束和通过由磁场发生器偏转的电子束的一部分的选择性能量膜片。 在由磁场发生器产生的磁场使得从样品放电的电子偏转的轨迹上，设置有通过从样品放出的电子的一部分的检测器和检测通过隔膜的电子的检测器的轨迹。

公开(公告)号：JP2011150956A

公开(公告)日：2011-08-04

申请号：JP2010012733

申请日：2010-01-25

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： MORI WATARU

IPC: H01J37/21 ,  H01J37/22

Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam processing apparatus suppressing direct influence of a floating magnetic field on a charged particle beam, and to provide a method of adjusting a charged particle beam apparatus.
SOLUTION: In a charged particle beam apparatus having a focusing lens provided between a charged particle source and an objective lens to adjust the focusing position of a charged particle beam, the focusing position of the charged particle beam by the focusing lens is changed; detection signals in a plurality of different focus positions are acquired, based on charged particles detected, while the focus position is changed; and conditions of the focusing lens at a focusing position in which evaluation value of the amount of image deviation or the amount of image deviation is relatively small are selected. A method of adjusting the charged particle beam apparatus is also provided.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 解决的问题：提供一种抑制浮动磁场对带电粒子束的直接影响的带电粒子束处理装置，并提供调整带电粒子束装置的方法。 解决方案：在带电粒子源和物镜之间设置聚焦透镜以调节带电粒子束的聚焦位置的带电粒子束装置中，通过聚焦透镜改变带电粒子束的聚焦位置 ; 在聚焦位置改变的同时，基于检测到的带电粒子获取多个不同聚焦位置中的检测信号; 并且选择聚焦透镜在图像偏差量或图像偏差量的评估值相对较小的聚焦位置处的条件。 还提供了一种调整带电粒子束装置的方法。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2007184139A

公开(公告)日：2007-07-19

申请号：JP2006000764

申请日：2006-01-05

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： MORI WATARU ,  ESUMI MAKOTO ,  OSE YOICHI

IPC: H01J37/153 ,  H01J37/05 ,  H01J37/21

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/057 ,  H01J2237/1501 ,  H01J2237/216

Abstract: PROBLEM TO BE SOLVED: To automatically execute adjustment of an electron beam entering into a monochromator and adjustment of an operating condition of the monochromator, in a scanning electron microscope equipped with the monochromator.
SOLUTION: This scanning electron microscope equipped with the monochromator is provided, between an electron source and the monochromator, with a first focusing lens for adjusting focusing of an electron beam entering into the monochromator, and a first astigmatism correction lens for correcting astigmatism of the electron beam entering into the monochromator, and also provided with a means for acquiring an image of an electron beam adjusting sample arranged at a position in the monochromator for focusing the electron beam and for driving the first focusing lens and the first astigmatism correction lens to adjust the focusing and astigmatism of the electron beam entering into the monochromator based on the acquired image.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：在配备有单色仪的扫描电子显微镜中，自动执行进入单色仪的电子束的调整和调节单色仪的工作状态。 解决方案：配备有单色仪的扫描电子显微镜在电子源和单色仪之间设置有用于调节进入单色仪的电子束的聚焦的第一聚焦透镜和用于校正像散的第一散光校正透镜 的电子束，并且还设置有用于获取布置在单色仪中的位置处的电子束调节样本的图像的装置，用于聚焦电子束和用于驱动第一聚焦透镜和第一散光校正透镜 基于所获取的图像来调整进入单色仪的电子束的聚焦和散光。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2014143075A

公开(公告)日：2014-08-07

申请号：JP2013010790

申请日：2013-01-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： TAKAHASHI HIROYUKI ,  IWASAKI TAKASHI ,  MORI WATARU ,  HOQUE SHAHEDUL

IPC: H01J37/147 ,  H01J37/22 ,  H01J37/28

Abstract: PROBLEM TO BE SOLVED: To solve the problem in which: when positional deviation occurs according to a scanning direction of electron beams, the amount of deviation becomes different for each scanning direction in reciprocating scanning, and therefore, continuity of images is lost and a correct image cannot be obtained; every image is deviated in the same direction in a one-way scanning, and the center position of the images is deviated; and if the center position of the images is deviated, a field of view becomes different when the images are enlarged or reduced.SOLUTION: A charged particle beam device includes: a deflector that scans beams emitted from a charged particle source on a sample; a scanning signal generating unit that generates scanning signals to be provided to the deflector; a detecting unit that detects charged particles obtained on the basis of the irradiation of the beams emitted from the charged particle source; an AD conversion unit that digitally converts the output of the detecting unit; a control unit that generates operation timing of the deflector; and a delaying unit that delays the operation timing. The AD conversion unit is operated at the operation timing delayed by the delaying unit.

Abstract translation: 要解决的问题：为了解决以下问题：当根据电子束的扫描方向发生位置偏离时，往复扫描中的每个扫描方向的偏差量变得不同，因此图像的连续性丢失并且正确 图像无法获得; 每个图像在单向扫描中以相同的方向偏离，图像的中心位置偏离; 并且如果图像的中心位置偏离，则当图像被放大或缩小时视场变得不同。解决方案：带电粒子束装置包括：偏转器，其从样本上的带电粒子源发射的光束扫描; 扫描信号产生单元，其生成要提供给偏转器的扫描信号; 检测单元，其检测基于从带电粒子源发射的光束的照射获得的带电粒子; AD转换单元，其对所述检测单元的输出进行数字转换; 产生所述偏转器的操作定时的控制单元; 以及延迟操作时序的延迟单元。 AD转换单元在由延迟单元延迟的操作定时下操作。

公开(公告)号：JP2012049045A

公开(公告)日：2012-03-08

申请号：JP2010191631

申请日：2010-08-30

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： RI UEN ,  MAKUUCHI MASAMI ,  KAWANO HAJIME ,  MORI WATARU ,  TAKAHASHI HIROYUKI ,  ESUMI MAKOTO

IPC: H01J37/09 ,  H01J37/147 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an electron beam type measurement and inspection apparatus and a measurement and inspection method featuring a reduced divergence in electron beam scanning caused by a mirror body current noise.SOLUTION: A measurement or inspection apparatus includes an electron irradiation system which irradiates a subject to be inspected with an electron beam, a mirror body though which an electron beam passes until it irradiates the subject to be inspected after being emitted from the electron irradiation system, a secondary electron detection system which detects secondary electrons generated by irradiating the subject to be inspected with the electron beam which passes through the mirror body, a signal processing system which processes a signal based on the secondary electrons detected by the secondary electron detection system, and correction means which measures a current value flowing in the mirror body when the electron beam emitted from the electron irradiation system passes through the mirror body and corrects the irradiated position of the electron beam based on a relationship between the current value and a predetermined current value and a divergence in beam position.

Abstract translation: 要解决的问题：提供一种电子束型测量和检查装置以及由镜体电流噪声引起的电子束扫描发散减小的测量和检查方法。 解决方案：一种测量或检查装置包括：电子束照射待检查对象的电子照射系统，电子束通过的镜体，直到从电子发射后照射待检查对象 照射系统，二次电子检测系统，其通过用通过镜体的电子束照射待检查对象产生的二次电子;基于由二次电子检测检测到的二次电子处理信号的信号处理系统 系统和校正装置，其当从电子照射系统发射的电子束通过镜体时，测量在镜体中流动的电流值，并根据电流值与预定的电流值之间的关系校正电子束的照射位置 电流值和光束位置的偏差。 版权所有（C）2012，JPO＆INPIT