公开(公告)号：JP2013120169A

公开(公告)日：2013-06-17

申请号：JP2011269519

申请日：2011-12-09

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  RI AKIRA ,  KAZUMI HIDEYUKI ,  KOBAYASHI KINYA

IPC: G01B15/04 ,  G01B15/00 ,  H01J37/22 ,  H01J37/28

Abstract: PROBLEM TO BE SOLVED: To provide a pattern measuring device and a computer program capable of performing highly accurate measurement of a pattern height, without depending on existence of electrification, etc.SOLUTION: A pattern measuring device and a computer program are configured: to detect a portion separated away from an edge of the pattern and having a predetermined signal strength, according to a detection signal obtained by scanning a specimen with an electron beam; and to derive a height of the pattern on the basis of positional information of the portion. With this configuration, highly accurate measurement of a pattern height can be performed without depending on existence of electrification, etc.

Abstract translation: 要解决的问题：提供一种图案测量装置和能够对图案高度进行高精度测量的计算机程序，而不依赖于电气化的存在等。解决方案：图案测量装置和计算机 程序被配置为：根据通过用电子束扫描样本获得的检测信号来检测远离图案的边缘并具有预定信号强度的部分; 并且基于该部分的位置信息导出图案的高度。 利用这种配置，可以在不依赖于电气化等的情况下进行高精度的图案高度的测量。（C）2013，JPO＆INPIT

公开(公告)号：JP2010117377A

公开(公告)日：2010-05-27

申请号：JP2010044603

申请日：2010-03-01

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOSHINARI KIYOMI ,  YOKOSUKA TOSHIYUKI ,  SANO AKIHIRO ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI ,  KOBAYASHI KINYA ,  UCHIDA NORITAKA

IPC: G01N27/62 ,  G01N33/00 ,  G01N33/68 ,  H01J49/04

CPC classification number: G01N33/6851 ,  G01N33/6848 ,  H01J49/0031 ,  H01J49/0036 ,  H01J49/004

Abstract: PROBLEM TO BE SOLVED: To avoid a peptide ion derived from a protein that has already been measured and that is expressed in great quantities as a tandem mass spectroscopy target, and to determine a peptide or the like derived from a minute amount of protein, which has heretofore been difficult to analyze as a tandem mass spectroscopy target, automatically within the real time of measurement, during the structural analysis of a protein or peptide by tandem mass spectroscopy. SOLUTION: Data concerning a protein that has already been measured and a peptide derived from the protein are automatically stored in an internal database. The stored data are collated with measured data with high accuracy to determine an isotope peak. In this way, the process of selecting a peptide peak that has not been measured as the target for the next tandem analysis can be performed within the real time of measurement and a redundant measurement of peptides derived from the same protein can be avoided. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 待解决的问题：为了避免衍生自已经测量并且作为串联质谱目标大量表达的蛋白质的肽离子，并且确定衍生自微量量的肽的肽等 蛋白质在蛋白质或肽通过串联质谱法的结构分析期间，在测量的实际时间内自动地被分析为串联质谱目标。 解决方案：已经测量的蛋白质和源自蛋白质的肽的数据被自动存储在内部数据库中。 存储的数据与测量数据以高精度进行核对以确定同位素峰。 以这种方式，可以在测量的实时内进行未被测定为下一个串联分析的靶标的肽峰的过程，并且可以避免衍生自相同蛋白质的肽的冗余测量。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2007218692A

公开(公告)日：2007-08-30

申请号：JP2006038461

申请日：2006-02-15

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOSHINARI KIYOMI ,  TERUI YASUSHI ,  YOKOSUKA TOSHIYUKI ,  KOBAYASHI KINYA ,  HIRABAYASHI TSUDOI

IPC: G01N27/62 ,  G01N30/72

CPC classification number: H01J49/02 ,  H01J49/004

Abstract: PROBLEM TO BE SOLVED: To provide a tandem type mass analyzing system capable of performing fluctuation analysis with high efficiency by a tandem type mass analyzer. SOLUTION: A predetermined number of m/z regions are set, all of ions contained in the m/z regions are collectively separated at every m/z region and mass analysis is performed to acquire measured MS 2 data. The measured MS 2 data is compared with the reference MS 2 data stored in a reference database to detect the difference between both of them. Mass analysis not separating all of ions contained in the m/z region where a fluctuation component is detected is performed with respect to the m/z region to acquire measured MS 1 data and the measured MS 1 data is compared with reference MS 1 data to detect the difference between these data. Parent ions considered to be the cause of the fluctuation component are estimated from the difference and separated to perform mass analysis. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够通过串联式质量分析器以高效率进行波动分析的串联型质量分析系统。 解决方案：设置预定数量的m / z区域，m / z区域中包含的所有离子在每个m / z区域被共同分离，并进行质量分析以获得测量的MS SP>数据。 将测量的MS 2 数据与存储在参考数据库中的参考MS 2 数据进行比较，以检测它们之间的差异。 对于m / z区域进行不分离检测出波动成分的m / z区域中包含的所有离子的质量分析，得到测定的MS 1 数据，测定的MS 1 数据与参考MS 1 数据进行比较，以检测这些数据之间的差异。 被认为是波动成分的原因的父离子是从差异估计出来的，分离出来进行质量分析。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006177877A

公开(公告)日：2006-07-06

申请号：JP2004373475

申请日：2004-12-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  KOBAYASHI KINYA ,  YOSHINARI KIYOMI ,  OTAKE ATSUSHI ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI

IPC: G01N27/62

CPC classification number: H01J49/004 ,  H01J49/0031

Abstract: PROBLEM TO BE SOLVED: To determine whether a measured object is a material required by a user within a real time of measurement when a material (especially protein, sugar chain, or the like) is analyzed.
SOLUTION: In a mass spectrometry system using a tandem mass spectrometry device, a specific material obtained by sample separation is ionized, the spectrum acquired by mass spectrometry of it is compared with a previously recorded specific spectrum, whether both match with each other is determined, and, when they match with each other, the specific ion is further ionized and detail analysis is performed. The present invention discloses the mass spectrometry method, the diagnosis system and inspection system using the mass spectrometry system, and the program for making a computer for controlling these systems attain a desired function.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 待解决的问题：当分析材料（特别是蛋白质，糖链等）时，确定测量对象是否是在测量的实际时间内用户所需的材料。 解决方案：在使用串联质谱装置的质谱系统中，通过样品分离获得的特定材料被电离，将通过其质谱获得的光谱与先前记录的特定光谱进行比较，两者是否彼此匹配 并且当它们彼此匹配时，特定离子被进一步电离并进行细节分析。 本发明公开了使用质谱系统的质谱法，诊断系统和检查系统，以及用于制造控制这些系统的计算机的程序达到期望的功能。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005241251A

公开(公告)日：2005-09-08

申请号：JP2004047172

申请日：2004-02-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI ,  KOBAYASHI KINYA ,  YOSHINARI KIYOMI

IPC: G01N27/62 ,  G01N30/72 ,  G01N30/86 ,  G01N30/88 ,  H01J49/00

CPC classification number: H01J49/0036 ,  H01J49/004

Abstract: PROBLEM TO BE SOLVED: To solve the problems in the present mass spectrometry system wherein it cannot be determined during measurement whether information necessary for analysis is sufficient or not when analyzing a material (especially a protein, a sugar chain or the like), and it is difficult to determine an isomer having a completely equal mass or a compound having a very similar mass only from MS data. SOLUTION: In this system, it is determined during the actual time of measurement whether a retention time of LC (or GC) of a peptide generated when a protein is subjected to enzymatic hydrolysis agrees with a predicted retention time estimated from an amino acid sequence predicted from MS 2 mass spectrum data, thereby determines the quality (information quantity) of the MS 2 mass spectrum data. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题为了解决在分析材料（特别是蛋白质，糖链等）时在测量中不能确定分析所需的信息是否足够的本质谱系统中的问题， ，并且难以从MS数据确定具有完全相同质量的异构体或具有非常相似质量的化合物。 解决方案：在该系统中，在实际测量时间确定蛋白质经受酶促水解后产生的肽的LC（或GC）的保留时间是否与从氨基酸估计的预测保留时间一致 由MS 2质谱数据预测的酸序列，从而确定MS 2质谱数据的质量（信息量）。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2008170260A

公开(公告)日：2008-07-24

申请号：JP2007003387

申请日：2007-01-11

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  YOSHINARI KIYOMI ,  KOBAYASHI KINYA

IPC: G01N27/62 ,  H01J49/26

Abstract: PROBLEM TO BE SOLVED: To provide a mass analyzing system capable of accurately obtaining the data of a measuring object required by a user, with high efficiency.
SOLUTION: In a tandem-type mass analyzing system, a database is searched in relation to the first parameter of precursor ions for MS
1 mass analysis, when the intensity of the peak ions of an MS
1 mass spectrum is a predetermined threshold or higher, when the candidate of precursor ions for MS
2 mass analysis is selected to determine whether the ions are stored in the data base. When the intensity of the peak ions of the MS
1 mass spectrum is lower than the predetermined threshold, the database is searched in relation to a second parameter that is smaller than the first parameter, to determine whether the peak ions are stored in the database and the ions that are not stored in the database are selected as the candidate of the precursor ions for the MS
2 mass analysis.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供能够以高效率精确地获得用户所需的测量对象的数据的质量分析系统。 解决方案：在串联型质量分析系统中，当MS（SP）质量分析的前体离子的第一参数与MS的峰离子的强度相关时，搜索数据库 当选择用于MS 2质量分析的前体离子的候选物以确定离子是否存储在数据库中时，质谱是预定阈值或更高。 当MS 1 质谱的峰值离子的强度低于预定阈值时，相对于小于第一参数的第二参数搜索数据库，以确定峰值 离子被存储在数据库中，并且不存储在数据库中的离子被选择作为用于MS 2 质量分析的前体离子的候选物。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007121134A

公开(公告)日：2007-05-17

申请号：JP2005314393

申请日：2005-10-28

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  KOBAYASHI KINYA ,  YOSHINARI KIYOMI ,  HIRABAYASHI TSUDOI

IPC: G01N27/62

Abstract: PROBLEM TO BE SOLVED: To perform tandem mass analysis with high efficiency without performing waste dissociation and analysis.
SOLUTION: This tandem mass analyzing system is equipped with mass analyzing means (14 and 14A) for dissociating a specific ion kind selected from a plurality of parent ions into a plurality of dissociation ions to perform mass analysis and constituted so as to use the dissociation ions dissociated in the front stage as the parent ions to repeat mass analysis. The tandem mass analyzing system is equipped with a database (10) for storing the respective dissociation data of a plurality of the dissociation ions analyzed by mass analysis in the front stage and a combination and determination means (16) for combining a plurality of dissociation data and using the combined dissociation data to determinate a specific ion seed.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：以高效率进行串联质量分析，而不进行废物解离和分析。 解决方案：该串联质量分析系统配备有用于将选自多个母离子的特定离子种类离解成多个离解离子的质量分析装置（14和14A），以进行质量分析并构成使用 离子离子在前期离子作为母体离子重复质量分析。 串联质量分析系统配备有用于存储通过前级质量分析分析的多个解离离子的各自解离数据的数据库（10）和用于组合多个解离数据的组合和确定装置（16） 并使用组合解离数据来确定特定的离子种子。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006064562A

公开(公告)日：2006-03-09

申请号：JP2004248169

申请日：2004-08-27

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOSHINARI KIYOMI ,  YOKOSUKA TOSHIYUKI ,  OTAKE ATSUSHI ,  KOBAYASHI KINYA ,  HASHIMOTO YUICHIRO

IPC: G01N27/62 ,  G01N30/24 ,  G01N30/46 ,  G01N30/72 ,  G01N30/86 ,  G01N30/88

CPC classification number: H01J49/04 ,  G01N30/24 ,  G01N30/467 ,  G01N30/7206 ,  G01N30/724 ,  G01N30/8658 ,  H01J49/0027

Abstract: PROBLEM TO BE SOLVED: To enable tandem analysis of high efficiency and high throughput in a system for subjecting the sample separated by a chromatography apparatus to tandem mass analysis.
SOLUTION: Elution is started with a predetermined time lag from a plurality of chromatography devices arrange to a mass analyzer in parallel and mass analysis is performed by the succeeding mass analyzer. In this method, the chromatogram in the preceding chromatography device is subjected to real time analysis and the analyzing result is used in a real time in the alteration of the elution condition of the succeeding chromatography device. The mass analyzing system suitable for making mass analysis is also provided.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了在使由色谱装置分离的样品进行串联质量分析的系统中实现高效率和高通量的串联分析。 解决方案：从多个色谱装置并排设置到质量分析器的预定时间延迟开始洗脱，并由随后的质量分析仪进行质量分析。 在该方法中，对上述色谱装置中的色谱图进行实时分析，并且实时地使用分析结果改变后续色谱装置的洗脱条件。 还提供了适合进行质量分析的质量分析系统。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005345332A

公开(公告)日：2005-12-15

申请号：JP2004166728

申请日：2004-06-04

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： OTAKE ATSUSHI ,  KOBAYASHI KINYA ,  YOSHINARI KIYOMI ,  YOKOSUKA TOSHIYUKI ,  HIRABAYASHI TSUDOI

IPC: G01N27/62 ,  G01N30/06 ,  G01N30/72 ,  G01N30/88 ,  H01J49/00

CPC classification number: H01J49/004 ,  G01N33/6848 ,  H01J49/0031 ,  Y10T436/13 ,  Y10T436/25

Abstract: PROBLEM TO BE SOLVED: To enhance measuring throughput in measuring a sample, which is converted to an isotope, using a tandem type mass analyzer in a mass analyzing method which is related to a mass analyzer and an analyzing system of a mass analyzing spectrum and precisely identfies and determinates a biopolymer such as protein, polypeptide, sugar, nucleic acid or the like with high throughput, and a mass analyzing system therefor. SOLUTION: In the analyzing technique of an isotope labelling sample using the tandem type mass analyzer, the measuring (MS 1 ) spectrum of the first stage is analyzed in a real time within a measuring session and ions used in dissociation/spectrum measurement (MS 2 ) on and after the second stage are determined. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了提高使用串联型质量分析器测定样品的测定通量，该质量分析方法与质量分析仪和质量分析用分析系统有关 光谱和精确识别并确定具有高通量的生物聚合物如蛋白质，多肽，糖，核酸等及其质量分析系统。 解决方案：在使用串联质量分析仪的同位素标记样品的分析技术中，在测量会话中实时分析第一级的测量（MS 1 ）光谱， 确定在第二阶段和之后的离解/光谱测量（MS 2 ）中使用的离子。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2012014890A

公开(公告)日：2012-01-19

申请号：JP2010148463

申请日：2010-06-30

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： KOBAYASHI KINYA ,  YOKOSUKA TOSHIYUKI ,  RI AKIRA

IPC: H01J37/147 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/147 ,  H01J37/244 ,  H01J2201/025 ,  H01J2237/24592 ,  H01J2237/281

Abstract: PROBLEM TO BE SOLVED: To provide a method of scanning an electron beam for forming an electric field to properly guide electrons discharged from a pattern to the outside of the pattern, and an electron scanning microscope.SOLUTION: When a sample is irradiated with the electron beam for forming electrification, after irradiating a first electron beam at a first position and a second position using a center of the pattern formed on the sample as a symmetrical point, the first electron beam is further irradiated at two center positions between a first and a second irradiation positions, which are on the same radius as that of the first and the second positions having the symmetrical point as the center. After that, the irradiation of the first electron beam at the center position between the scanned positions on the radius is further repeated.

Abstract translation: 要解决的问题：提供一种扫描用于形成电场的电子束以将从图案排出的电子正确地引导到图案外部的方法和电子扫描显微镜。 解决方案：当用用于形成带电的电子束照射样品时，使用形成在样品上的图案的中心作为对称点在第一位置和第二位置照射第一电子束之后，第一电子 在与对称点为中心的第一和第二位置的半径相同的第一和第二照射位置之间的两个中心位置进一步照射光束。 之后，进一步重复第一电子束在半径上的扫描位置之间的中心位置的照射。 版权所有（C）2012，JPO＆INPIT