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公开(公告)号：JP2013206641A
公开(公告)日：2013-10-07
申请号：JP2012072710
申请日：2012-03-28
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： YOKOSUKA TOSHIYUKI , RI AKIRA , KAZUMI HIDEYUKI , MAKINO HIROSHI , MIZUHARA YUZURU , IZAWA MIKI , HATANO MICHIO , MOMOI YOSHINORI
CPC classification number: H01J37/28 , G01B15/00 , G01B15/04 , H01J2237/0492 , H01J2237/24495 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
Abstract: PROBLEM TO BE SOLVED: To provide a scanning electron microscope forming an electric field that pulls up electrons discharged from the bottom of a hole or the like with high efficiency even when a sample surface is made of a conductive material.SOLUTION: A scanning electron microscope includes: a deflector for deflecting a scanning position of an electron beam; a sample stage for mounting a sample thereon; and a controller for controlling the deflector or the sample stage so that an underlying lower layer pattern of a pattern to be measured irradiates underlying other patterns with the electron beam before the pattern to be measured is irradiated with the electron beam.
Abstract translation: 要解决的问题：提供一种形成电场的扫描电子显微镜，即使当样品表面由导电材料制成时，也可以高效率地拉出从孔底等排出的电子。溶解度：扫描电子显微镜 包括：偏转器，用于偏转电子束的扫描位置; 用于在其上安装样品的样品台; 以及控制器，用于控制偏转器或样品台，使得要被测量的图案的下面的下层图案用电子束照射待测量图案之前用电子束照射下面的其他图案。
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公开(公告)号：JP2009156722A
公开(公告)日：2009-07-16
申请号：JP2007335523
申请日：2007-12-27
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： YOKOSUKA TOSHIYUKI , YOSHINARI KIYOMI , KOBAYASHI KINYA
IPC: G01N27/62
Abstract: PROBLEM TO BE SOLVED: To overcome the problem wherein mapping of components is difficult by a shortage of a separation due to mixture of a plurality of the components, fluctuations in the intensity between measurements, fluctuations in the retention times in chromatography or fluctuations in samples due to pretreatments, even if measurements are implemented under conditions similar to chromatography mass spectrometry of biological samples.
SOLUTION: Ion information (masses, valences, intensities, isotope peak distribution, retention times) on a MS spectrum of the components to be mapped and MS spectrum information on the other components detected in the mass and time zone similar to the components to be mapped are utilized so as to implement mapping of the components among a plurality of the chromatography mass spectrometric data. Information on the other component includes the masses, the valences, the intensities, the isotope peak distribution, the retention times, and the like. The degree of matching is estimated as a score. The mapping accuracy is improved, by utilizing the component information detected in a similar time zone, in addition to the components to be mapped during determination.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题：为了克服由于多个组分的混合而导致的分离不足导致组分的映射困难的问题，测量之间的强度的波动，色谱中的保留时间的波动或波动 在样品中由于预处理，即使在类似于生物样品的色谱质谱的条件下进行测量。 解决方案：要映射的组件的MS频谱上的离子信息（质量，价态，强度，同位素峰值分布，保留时间）和质谱和时间带中检测到的其他成分的质谱信息类似于组分 被使用以便实现多个色谱质谱数据之间的组分的映射。 关于另一部分的信息包括质量，价态，强度，同位素峰分布，保留时间等。 匹配度被估计为一个分数。 除了在确定期间要映射的组件之外，通过利用在相似时区中检测到的分量信息来提高映射精度。 版权所有（C）2009，JPO＆INPIT
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公开(公告)号：JP2006329881A
公开(公告)日：2006-12-07
申请号：JP2005156157
申请日：2005-05-27
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： OTAKE ATSUSHI , KOBAYASHI KINYA , YOKOSUKA TOSHIYUKI , YOSHINARI KIYOMI
CPC classification number: H01J49/02 , H01J49/004
Abstract: PROBLEM TO BE SOLVED: To automatically determine and process peptides derived from a very small amount of proteins as targets of tandem mass spectrometry desired by users without any measurement waste.
SOLUTION: In this tandem type analysis system, by ionizing an object to be measured and performing mass spectrometry on generated various ion species, ion species having a specific mass-to-charge ratio are selected from among the generated various ion species and dissociated, and ion mass spectrometry measurement is repeated at n-stages (n=1, 2, etc.). On the basis of ionic strength expressed by a peak to the mass-to-charge ratio of ions in results of MS
n , mass spectrometry at the n-th stage, control contents of the next analysis of MS
n are determined for every ion to be analyzed. An ionization detector 14 highly precisely collates sample measurement and ionization data and determines the peaks of isotopes. When a count number of MS
1 of a parent ion peptide measured for some prescribed period is, for example, I, a data processing part 15 makes the number of times of integration of MS
2 of the peptide or its analysis time proportional to 1/I.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：自动确定和处理由非常少量的蛋白质衍生的肽作为用户所期望的串联质谱的目标，而没有任何测量浪费。 解决方案：在这种串联型分析系统中，通过电离待测物体并对生成的各种离子种类进行质谱分析，从生成的各种离子种类中选出具有特定质荷比的离子种类， 离解和离子质谱测量在n阶段重复（n = 1,2等）。 基于离子强度表示的离子强度与离子的质荷比在MS
n 的结果中，第n阶段的质谱法，下一步MS分析的控制内容 对于要分析的每个离子确定 n 。 电离检测器14高度精确地对照样品测量和电离数据并确定同位素的峰。 当在某个规定时间内测量的母离子肽的MS 1 的计数是例如I时，数据处理部15使MS 2的积分次数< / SP>或其分析时间与1 / I成比例。 版权所有（C）2007，JPO＆INPIT -
公开(公告)号：JP2011210509A
公开(公告)日：2011-10-20
申请号：JP2010076567
申请日：2010-03-30
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： YOKOSUKA TOSHIYUKI , YAMAZAKI MINORU , KAZUMI HIDEYUKI , TAGO KAZUATSU
IPC: H01J37/147 , H01J37/20 , H01J37/28
CPC classification number: H01J37/28 , H01J37/026 , H01J37/266 , H01J37/268 , H01J2237/0048 , H01J2237/24564 , H01J2237/2594
Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam irradiation method and a charged particle beam device, capable of restraining unevenness in electrostatic charge, even if a sample contains a plurality of different materials, in a pre-dosing area or the sample contains density of patterns in the pre-dosing area which is different for different positions.SOLUTION: The pre-dosing are is divided into a plurality of regions, and the charged particle beam irradiation method and the charged particle beam device for applying electrostatic charge are provided with the use of beams having different beam irradiation conditions to the plurality of regions. According to such a structure, since adhesion of electrostatic charge to the pre-dosing area is enabled in the pre-dosing area, on the basis of an irradiation condition in which the differences in the electrostatic charges at each position can be restrained, the effect of an electric field on the electrons emitted from a charged particle beam or a sample can be restrained.
Abstract translation: 要解决的问题：为了提供一种带电粒子束照射方法和带电粒子束装置，即使样品含有多种不同的材料，在预给料区域中或者样品含有密度也能够抑制静电荷的不均匀性 在不同位置上的预给料区域中的图案。解决方案：预给料被分成多个区域，带电粒子束照射方法和用于施加静电荷的带电粒子束装置设置有 使用具有不同光束照射条件的光束到多个区域。 根据这样的结构，由于在预给料区域中能够将静电电荷附着在预给料区域，所以基于能够抑制各位置的静电电荷的差异的照射条件， 可以抑制从带电粒子束或样品发射的电子上的电场。
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公开(公告)号：JP2008170260A
公开(公告)日：2008-07-24
申请号：JP2007003387
申请日：2007-01-11
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： YOKOSUKA TOSHIYUKI , YOSHINARI KIYOMI , KOBAYASHI KINYA
Abstract: PROBLEM TO BE SOLVED: To provide a mass analyzing system capable of accurately obtaining the data of a measuring object required by a user, with high efficiency.
SOLUTION: In a tandem-type mass analyzing system, a database is searched in relation to the first parameter of precursor ions for MS
1 mass analysis, when the intensity of the peak ions of an MS
1 mass spectrum is a predetermined threshold or higher, when the candidate of precursor ions for MS
2 mass analysis is selected to determine whether the ions are stored in the data base. When the intensity of the peak ions of the MS
1 mass spectrum is lower than the predetermined threshold, the database is searched in relation to a second parameter that is smaller than the first parameter, to determine whether the peak ions are stored in the database and the ions that are not stored in the database are selected as the candidate of the precursor ions for the MS
2 mass analysis.
COPYRIGHT: (C)2008,JPO&INPITAbstract translation: 要解决的问题：提供能够以高效率精确地获得用户所需的测量对象的数据的质量分析系统。 解决方案：在串联型质量分析系统中，当MS（SP）质量分析的前体离子的第一参数与MS的峰离子的强度相关时，搜索数据库 当选择用于MS
2质量分析的前体离子的候选物以确定离子是否存储在数据库中时，质谱是预定阈值或更高。 当MS 1 质谱的峰值离子的强度低于预定阈值时，相对于小于第一参数的第二参数搜索数据库，以确定峰值 离子被存储在数据库中，并且不存储在数据库中的离子被选择作为用于MS 2 质量分析的前体离子的候选物。 版权所有（C）2008，JPO＆INPIT -
Patent Agency Ranking
公开(公告)号：JP2007121134A
公开(公告)日：2007-05-17
申请号：JP2005314393
申请日：2005-10-28
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： YOKOSUKA TOSHIYUKI , KOBAYASHI KINYA , YOSHINARI KIYOMI , HIRABAYASHI TSUDOI
IPC: G01N27/62
Abstract: PROBLEM TO BE SOLVED: To perform tandem mass analysis with high efficiency without performing waste dissociation and analysis.
SOLUTION: This tandem mass analyzing system is equipped with mass analyzing means (14 and 14A) for dissociating a specific ion kind selected from a plurality of parent ions into a plurality of dissociation ions to perform mass analysis and constituted so as to use the dissociation ions dissociated in the front stage as the parent ions to repeat mass analysis. The tandem mass analyzing system is equipped with a database (10) for storing the respective dissociation data of a plurality of the dissociation ions analyzed by mass analysis in the front stage and a combination and determination means (16) for combining a plurality of dissociation data and using the combined dissociation data to determinate a specific ion seed.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：以高效率进行串联质量分析，而不进行废物解离和分析。 解决方案：该串联质量分析系统配备有用于将选自多个母离子的特定离子种类离解成多个离解离子的质量分析装置（14和14A），以进行质量分析并构成使用 离子离子在前期离子作为母体离子重复质量分析。 串联质量分析系统配备有用于存储通过前级质量分析分析的多个解离离子的各自解离数据的数据库（10）和用于组合多个解离数据的组合和确定装置（16） 并使用组合解离数据来确定特定的离子种子。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2006064562A
公开(公告)日：2006-03-09
申请号：JP2004248169
申请日：2004-08-27
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： YOSHINARI KIYOMI , YOKOSUKA TOSHIYUKI , OTAKE ATSUSHI , KOBAYASHI KINYA , HASHIMOTO YUICHIRO
CPC classification number: H01J49/04 , G01N30/24 , G01N30/467 , G01N30/7206 , G01N30/724 , G01N30/8658 , H01J49/0027
Abstract: PROBLEM TO BE SOLVED: To enable tandem analysis of high efficiency and high throughput in a system for subjecting the sample separated by a chromatography apparatus to tandem mass analysis.
SOLUTION: Elution is started with a predetermined time lag from a plurality of chromatography devices arrange to a mass analyzer in parallel and mass analysis is performed by the succeeding mass analyzer. In this method, the chromatogram in the preceding chromatography device is subjected to real time analysis and the analyzing result is used in a real time in the alteration of the elution condition of the succeeding chromatography device. The mass analyzing system suitable for making mass analysis is also provided.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：为了在使由色谱装置分离的样品进行串联质量分析的系统中实现高效率和高通量的串联分析。 解决方案：从多个色谱装置并排设置到质量分析器的预定时间延迟开始洗脱，并由随后的质量分析仪进行质量分析。 在该方法中，对上述色谱装置中的色谱图进行实时分析，并且实时地使用分析结果改变后续色谱装置的洗脱条件。 还提供了适合进行质量分析的质量分析系统。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2005345332A
公开(公告)日：2005-12-15
申请号：JP2004166728
申请日：2004-06-04
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： OTAKE ATSUSHI , KOBAYASHI KINYA , YOSHINARI KIYOMI , YOKOSUKA TOSHIYUKI , HIRABAYASHI TSUDOI
CPC classification number: H01J49/004 , G01N33/6848 , H01J49/0031 , Y10T436/13 , Y10T436/25
Abstract: PROBLEM TO BE SOLVED: To enhance measuring throughput in measuring a sample, which is converted to an isotope, using a tandem type mass analyzer in a mass analyzing method which is related to a mass analyzer and an analyzing system of a mass analyzing spectrum and precisely identfies and determinates a biopolymer such as protein, polypeptide, sugar, nucleic acid or the like with high throughput, and a mass analyzing system therefor. SOLUTION: In the analyzing technique of an isotope labelling sample using the tandem type mass analyzer, the measuring (MS 1 ) spectrum of the first stage is analyzed in a real time within a measuring session and ions used in dissociation/spectrum measurement (MS 2 ) on and after the second stage are determined. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：为了提高使用串联型质量分析器测定样品的测定通量，该质量分析方法与质量分析仪和质量分析用分析系统有关 光谱和精确识别并确定具有高通量的生物聚合物如蛋白质，多肽，糖，核酸等及其质量分析系统。 解决方案：在使用串联质量分析仪的同位素标记样品的分析技术中，在测量会话中实时分析第一级的测量（MS
1 ）光谱， 确定在第二阶段和之后的离解/光谱测量（MS 2 ）中使用的离子。 版权所有（C）2006，JPO＆NCIPI -
公开(公告)号：JP2012014890A
公开(公告)日：2012-01-19
申请号：JP2010148463
申请日：2010-06-30
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： KOBAYASHI KINYA , YOKOSUKA TOSHIYUKI , RI AKIRA
IPC: H01J37/147 , H01J37/244 , H01J37/28
CPC classification number: H01J37/28 , H01J37/147 , H01J37/244 , H01J2201/025 , H01J2237/24592 , H01J2237/281
Abstract: PROBLEM TO BE SOLVED: To provide a method of scanning an electron beam for forming an electric field to properly guide electrons discharged from a pattern to the outside of the pattern, and an electron scanning microscope.SOLUTION: When a sample is irradiated with the electron beam for forming electrification, after irradiating a first electron beam at a first position and a second position using a center of the pattern formed on the sample as a symmetrical point, the first electron beam is further irradiated at two center positions between a first and a second irradiation positions, which are on the same radius as that of the first and the second positions having the symmetrical point as the center. After that, the irradiation of the first electron beam at the center position between the scanned positions on the radius is further repeated.
Abstract translation: 要解决的问题：提供一种扫描用于形成电场的电子束以将从图案排出的电子正确地引导到图案外部的方法和电子扫描显微镜。 解决方案：当用用于形成带电的电子束照射样品时，使用形成在样品上的图案的中心作为对称点在第一位置和第二位置照射第一电子束之后，第一电子 在与对称点为中心的第一和第二位置的半径相同的第一和第二照射位置之间的两个中心位置进一步照射光束。 之后，进一步重复第一电子束在半径上的扫描位置之间的中心位置的照射。 版权所有（C）2012，JPO＆INPIT
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公开(公告)号：JP2010211973A
公开(公告)日：2010-09-24
申请号：JP2009054369
申请日：2009-03-09
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： TSUCHIYA TSUGUTOSHI , YOKOSUKA TOSHIYUKI , TAGO KAZUATSU , RI AKIRA , KOBAYASHI KINYA
IPC: H01J37/21
Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam device for measuring correct sample surface potential or adjusting a focus in accordance with the potential of the sample surface without the irradiation of charged particle beams on the sample. SOLUTION: The charged particle beam device includes a charged particle source, an objective lens which focuses the charged particle beams emitted from the charged particle source and irradiates the beams on the sample, a negative potential applying power source which forms an electric field for decelerating charged particle beams reaching the sample by the application of a negative voltage, and a control device which achieves the focus adjustment of the charged particle beams by controlling the negative potential applying power source. The control device determines the sample potential on the basis of solid state property data and the scanning state of the charged particle beams of the sample, and controls the negative potential applying power source on the basis of the surface potential. COPYRIGHT: (C)2010,JPO&INPIT
Abstract translation: 要解决的问题：提供一种用于根据样品表面的电位测量正确的样品表面电位或调整焦点的带电粒子束装置，而不对样品上的带电粒子束进行照射。 解决方案：带电粒子束装置包括带电粒子源，对从带电粒子源发射的带电粒子束进行聚焦并将样品上的束照射的物镜，形成电场的负电位施加电源 用于通过施加负电压减速到达样品的带电粒子束;以及控制装置，其通过控制负电位施加电源来实现带电粒子束的聚焦调节。 控制装置基于固体特性数据和样品的带电粒子束的扫描状态来确定样品电位，并且基于表面电位来控制负电位施加电源。 版权所有（C）2010，JPO＆INPIT
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